B	C	D	E	F	G	H	I	J	K	M	N	O	P	Q	R	S
1				PTE / Capacity Rates							Actual Rates (For CY 2024)
2	Emissions Unit Information			Activity Information (YEARLY)			Activity Information (DAILY)			Comments	Activity Information (YEARLY)			Activity Information (DAILY)			Comments
3	Emissions Unit ID	Unit Description	Control Device[s]	Unit of Measure	Description/Type	Activity [units/yr]	Unit of Measure	Description/Type	Activity [units/day]		Unit of Measure	Description/Type	Activity [units/yr]	Unit of Measure	Description/Type	Activity [units/day]
4	EU-1	Widget Maker 1 (EXAMPLE)	Widget Waste RCO	tons	Input Material X	100	tons	Input Material X	100
5	Blr1-NG	Boiler 1 750 HP, 26 MMBtu/hr (EXAMPLE)	none	MMscf	Natural Gas	900	MMscf	Natural Gas	900
6	EU_ID	Unit Description	Control Device	UnitOfMeasure	Description	Activity	Activity	Activity	Activity		UnitOfMeasure	Description	Activity	Activity	Activity	Activity
7	Emergency Generator 1	Bldg 1, 1,456 hp, 1988 install	None	Mgal	Diesel	1.7784	Mgal	Diesel	0.47	Assumed 59.28 gal/hr is 100% fuel consumption rate for UB1 # A. Assumed 30 hours per year of operation.	Mgal	Diesel	0.77	Mgal	Diesel	0.06	Assumed 13 run days a year
8	Emergency Generator 2	Bldg 1, 1,456 hp, 1988 install	None	Mgal	Diesel	1.7784	Mgal	Diesel	0.47	Assumed 59.28 gal/hr is 100% fuel consumption rate for UB1 # B. Assumed 30 hours per year of operation.	Mgal	Diesel	0.47	Mgal	Diesel	0.04	Assumed 13 run days a year
9	Emergency Generator 3	Bldg 2, 1,582 hp, 1996 install	None	Mgal	Diesel	2.2326	Mgal	Diesel	0.60	Assumed 74.42 gal/hr is 100% fuel consumption rate for Fab 4-2 #1. Assumed 30 hours per year of operation.	Mgal	Diesel	1.38	Mgal	Diesel	0.11	Assumed 13 run days a year
10	Emergency Generator 4	Bldg 2, 1,582 hp, 1996 install	None	Mgal	Diesel	2.2326	Mgal	Diesel	0.60	Assumed 74.42 gal/hr is 100% fuel consumption rate for Fab 4-2 #2. Assumed 30 hours per year of operation.	Mgal	Diesel	1.16	Mgal	Diesel	0.10	Assumed 13 run days a year
11	Emergency Generator 5	Bldg 2, 1,582 hp, 1996 install	None	Mgal	Diesel	2.2326	Mgal	Diesel	0.60	Assumed 74.42 gal/hr is 100% fuel consumption rate for Fab 4-2 #3. Assumed 30 hours per year of operation.	Mgal	Diesel	1.11	Mgal	Diesel	0.09	Assumed 13 run days a year
12	Fire Pump	Fire pump	None	Mgal	Diesel	0.195	Mgal	Diesel	0.05	Assumed 6.5 gal/hr is 100% fuel consumption rate for fire pump. Assumed 30 hours per year of operation.	Mgal	Diesel	0.18	Mgal	Diesel	0.02	Assumed 13 run days a year
13	Boiler 1 Fab 4-1 NG	Natural gas (primary fuel type)	None	MMscf	Natural Gas	107.9	MMscf	Natural Gas	0.30	Assumed natural gas heat content of 1,020 Btu/scf per AP-42 Section 1.4	MMscf	Natural Gas	18.01	MMscf	Natural Gas	0.05	Assumed daily maximum, is annual total divided by 365 days.
14	Boiler 2 Fab 4-1 NG	Natural gas (primary fuel type)	None	MMscf	Natural Gas	107.9	MMscf	Natural Gas	0.30	Assumed natural gas heat content of 1,020 Btu/scf per AP-42 Section 1.4	MMscf	Natural Gas	18.12	MMscf	Natural Gas	0.05	Assumed daily maximum, is annual total divided by 365 days.
15	Boiler 3 Fab 4-1 NG	Natural gas (primary fuel type)	None	MMscf	Natural Gas	107.9	MMscf	Natural Gas	0.30	Assumed natural gas heat content of 1,020 Btu/scf per AP-42 Section 1.4	MMscf	Natural Gas	15.42	MMscf	Natural Gas	0.04	Assumed daily maximum, is annual total divided by 365 days.
16	Boiler 4 Fab 4-1 NG	Natural gas (primary fuel type)	None	MMscf	Natural Gas	86.23	MMscf	Natural Gas	0.24	Assumed natural gas heat content of 1,020 Btu/scf per AP-42 Section 1.4	MMscf	Natural Gas	11.32	MMscf	Natural Gas	0.03	Assumed daily maximum, is annual total divided by 365 days.
17	Boiler 5 Fab 4-1 NG	Natural gas (primary fuel type)	None	MMscf	Natural Gas	86.23	MMscf	Natural Gas	0.24	Assumed natural gas heat content of 1,020 Btu/scf per AP-42 Section 1.4	MMscf	Natural Gas	16.26	MMscf	Natural Gas	0.04	Assumed daily maximum, is annual total divided by 365 days.
18	Boiler 1 Fab 4-2 NG	Natural gas (primary fuel type)	None	MMscf	Natural Gas	251.6	MMscf	Natural Gas	0.69	Assumed natural gas heat content of 1,020 Btu/scf per AP-42 Section 1.4	MMscf	Natural Gas	33.11	MMscf	Natural Gas	0.09	Assumed daily maximum, is annual total divided by 365 days.
19	Boiler 2 Fab 4-2 NG	Natural gas (primary fuel type)	None	MMscf	Natural Gas	251.6	MMscf	Natural Gas	0.69	Assumed natural gas heat content of 1,020 Btu/scf per AP-42 Section 1.4	MMscf	Natural Gas	43.67	MMscf	Natural Gas	0.12	Assumed daily maximum, is annual total divided by 365 days.
20	Boiler 3 Fab 4-2 NG	Natural gas (primary fuel type)	None	MMscf	Natural Gas	251.6	MMscf	Natural Gas	0.69	Assumed natural gas heat content of 1,020 Btu/scf per AP-42 Section 1.4	MMscf	Natural Gas	38.55	MMscf	Natural Gas	0.11	Assumed daily maximum, is annual total divided by 365 days.
21	Boiler 1 Fab 4-1 Diesel	Diesel dual fire mode	None	Mgal	Diesel	2.20	Mgal	Diesel	0.73	Assumed maximum unit fuel input of 91.75 gal/hr. Assumed PTE of 24 hours per year and 8 hours per day maximum.	Mgal	Diesel	0.00	Mgal	Diesel	0	Assumed daily maximum, is annual total divided by 365 days.
22	Boiler 2 Fab 4-1 Diesel	Diesel dual fire mode	None	Mgal	Diesel	2.20	Mgal	Diesel	0.73	Assumed maximum unit fuel input of 91.75 gal/hr. Assumed PTE of 24 hours per year and 8 hours per day maximum.	Mgal	Diesel	0.00	Mgal	Diesel	0	Assumed daily maximum, is annual total divided by 365 days.
23	Boiler 3 Fab 4-1 Diesel	Diesel dual fire mode	None	Mgal	Diesel	2.20	Mgal	Diesel	0.73	Assumed maximum unit fuel input of 91.75 gal/hr. Assumed PTE of 24 hours per year and 8 hours per day maximum.	Mgal	Diesel	0.00	Mgal	Diesel	0	Assumed daily maximum, is annual total divided by 365 days.
24	Boiler 1 Fab 4-2 Diesel	Diesel dual fire mode	None	Mgal	Diesel	5.13	Mgal	Diesel	1.71	Assumed maximum unit fuel input of 213.77 gal/hr. Assumed PTE of 24 hours per year and 8 hours per day maximum.	Mgal	Diesel	0.00	Mgal	Diesel	0	Assumed daily maximum, is annual total divided by 365 days.
25	Boiler 2 Fab 4-2 Diesel	Diesel dual fire mode	None	Mgal	Diesel	5.13	Mgal	Diesel	1.71	Assumed maximum unit fuel input of 213.77 gal/hr. Assumed PTE of 24 hours per year and 8 hours per day maximum.	Mgal	Diesel	0.00	Mgal	Diesel	0	Assumed daily maximum, is annual total divided by 365 days.
26	Boiler 3 Fab 4-2 Diesel	Diesel dual fire mode	None	Mgal	Diesel	5.13	Mgal	Diesel	1.71	Assumed maximum unit fuel input of 213.77 gal/hr. Assumed PTE of 24 hours per year and 8 hours per day maximum.	Mgal	Diesel	0.00	Mgal	Diesel	0	Assumed daily maximum, is annual total divided by 365 days.
27	Boiler 4 Fab 4-1 Diesel	Diesel dual fire mode	None	Mgal	Diesel	1.53	Mgal	Diesel	0.51	Assumed maximum unit fuel input of 63.55 gal/hr. Assumed PTE of 24 hours per year and 8 hours per day maximum.	Mgal	Diesel	0.00	Mgal	Diesel	0	Assumed daily maximum, is annual total divided by 365 days.
28	Boiler 5 Fab 4-1 Diesel	Diesel dual fire mode	None	Mgal	Diesel	1.53	Mgal	Diesel	0.51	Assumed maximum unit fuel input of 63.55 gal/hr. Assumed PTE of 24 hours per year and 8 hours per day maximum.	Mgal	Diesel	0.00	Mgal	Diesel	0	Assumed daily maximum, is annual total divided by 365 days.
29	RCTO 1 Natural Gas	Natural gas	None	MMscf	Natural Gas	25.8	MMscf	Natural Gas	0.07	Based on burner capacity and assumed continuous operation.	MMscf	Natural Gas	20.38	MMscf	Natural Gas	0.06	RCTOs were commissioned in the calendar year. Assumed all natural gas through old and new RCTOs is represented as single RCTO. Assumed daily maximum is annual total divided by 365.
30	RCTO 2 Natural Gas	Natural gas	None	MMscf	Natural Gas	25.8	MMscf	Natural Gas	0.07	Based on burner capacity and assumed continuous operation.	MMscf	Natural Gas	0.00	MMscf	Natural Gas	0.00
31	RCTO 3 Natural Gas	Natural gas	None	MMscf	Natural Gas	25.8	MMscf	Natural Gas	0.07	Based on burner capacity and assumed continuous operation.	MMscf	Natural Gas	0.00	MMscf	Natural Gas	0.00
32	50:1 BOE Use (NH3 Emissions)	Buffered Oxide Etchant (50:1)	Wet Scrubber	lbs	Material Used - Liquid Chemical	213616.5	lbs	Material Used - Liquid Chemical	585.25	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	59411.72	lbs	Material Used	162.772	Assumed daily maximum, is annual total divided by 365 days.
33	7:1 BOE Use (NH3 Emissions)	Buffered Oxide Etchant (7:1)	Wet Scrubber	lbs	Material Used - Liquid Chemical	22214.4	lbs	Material Used - Liquid Chemical	60.86	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	12142.32	lbs	Material Used	33.267	Assumed daily maximum, is annual total divided by 365 days.
34	50:1 BOE Use (HF Emissions)	Buffered Oxide Etchant (50:1)	Wet Scrubber	lbs	Material Used - Liquid Chemical	213616.5	lbs	Material Used - Liquid Chemical	585.25	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	59411.72	lbs	Material Used	162.772	Assumed daily maximum, is annual total divided by 365 days.
35	7:1 BOE Use (HF Emissions)	Buffered Oxide Etchant (7:1)	Wet Scrubber	lbs	Material Used - Liquid Chemical	22214.4	lbs	Material Used - Liquid Chemical	60.86	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	12142.32	lbs	Material Used	33.267	Assumed daily maximum, is annual total divided by 365 days.
36	Ammonia Use	CVD / Diffusion	Wet Scrubber	lbs	Material Used - Gaseous Chemical	12777.8	lbs	Material Used - Gaseous Chemical	35.01	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	5768.40	lbs	Material Used	15.804	Assumed daily maximum, is annual total divided by 365 days.
37	Isopropanol - Bottles	Cleaning	None	lbs	Material Used - Liquid Chemical	12500.0	lbs	Material Used - Liquid Chemical	34.25	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	2161.08	lbs	Material Used	5.921	Assumed daily maximum, is annual total divided by 365 days.
38	Isopropanol - Process	Process Use	RCTO	lbs	Material Used - Liquid Chemical	450000.0	lbs	Material Used - Liquid Chemical	1232.88	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	224255.16	lbs	Material Used	614.398	Assumed daily maximum, is annual total divided by 365 days.
39	Isopropanol - Wipe Cleaning	Wipe cleaning only	None	lbs	Material Used - Liquid Chemical	20000.0	lbs	Material Used - Liquid Chemical	54.79	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	8093.78	lbs	Material Used	22.175	Assumed daily maximum, is annual total divided by 365 days.
40	Nitric Acid Use (Process 1)	Heated wet etch	Wet Scrubber	lbs	Material Used - Liquid Chemical	132420.1	lbs	Material Used - Liquid Chemical	362.79	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	50401.40	lbs	Material Used	138.086	Assumed daily maximum, is annual total divided by 365 days.
41	Nitric Acid Use (Process 2)	Un-heated wet etch	Wet Scrubber	lbs	Material Used - Liquid Chemical	197626.7	lbs	Material Used - Liquid Chemical	541.44	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	94517.50	lbs	Material Used	258.952	Assumed daily maximum, is annual total divided by 365 days.
42	Phosphoric Acid Use	Wet etch baths	Wet Scrubber	lbs	Material Used - Liquid Chemical	223309.3	lbs	Material Used - Liquid Chemical	611.81	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	96172.91	lbs	Material Used	263.487	Assumed daily maximum, is annual total divided by 365 days.
43	Silver Nitrate Use	Lab reagent	None	lbs	Material Used - Liquid Chemical	0.6	lbs	Material Used - Liquid Chemical	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.53	lbs	Material Used	0.001	Assumed daily maximum, is annual total divided by 365 days.
44	Sodium Hydroxide Wk Sol'n Use	Lab reagent	None	lbs	Material Used - Liquid Chemical	2.5	lbs	Material Used - Liquid Chemical	0.01	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.97	lbs	Material Used	0.003	Assumed daily maximum, is annual total divided by 365 days.
45	Sulfuric Acid Use	Misc processes/facilities	Wet Scrubber	lbs	Material Used - Facilities	2302220.5	lbs	Material Used - Facilities	6307.45	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	1048994.58	lbs	Material Used	2873.958	Assumed daily maximum, is annual total divided by 365 days.
46	Boron Trichloride Use	Etch	Wet Scrubber	lbs	Material Used - Gaseous Chemical	2195.9	lbs	Material Used - Gaseous Chemical	6.02	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	990.00	lbs	Material Used	2.712	Assumed daily maximum, is annual total divided by 365 days.
47	Silane Use	CVD	None	lbs	Material Used - Gaseous Chemical	18704.2	lbs	Material Used - Gaseous Chemical	51.24	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	5530.14	lbs	Material Used	15.151	Assumed daily maximum, is annual total divided by 365 days.
48	Dichlorosilane	CVD	None	lbs	Material Used - Gaseous Chemical	626.4	lbs	Material Used - Gaseous Chemical	1.72	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	300.00	lbs	Material Used	0.822	Assumed daily maximum, is annual total divided by 365 days.
49	Phosphine Use (Process 1)	Ion Implant	none	lbs	Material Used - Gaseous Chemical	67.0	lbs	Material Used - Gaseous Chemical	0.18	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	3.40	lbs	Material Used	0.009	Assumed daily maximum, is annual total divided by 365 days.
50	Phosphine Use (Process 2)	Atmospheric CVD	none	lbs	Material Used - Gaseous Chemical	0.0	lbs	Material Used - Gaseous Chemical	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	14.28	lbs	Material Used	0.039	Assumed daily maximum, is annual total divided by 365 days.

51	Phosphine Use (Process 3)	Non-atmospheric CVD	none	lbs	Material Used - Gaseous Chemical	61.3	lbs	Material Used - Gaseous Chemical	0.17	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	14.28	lbs	Material Used	0.039	Assumed daily maximum, is annual total divided by 365 days.
52	HMDS Oxidation in RCTO	Photolithography	none	lbs	Material Used - Liquid Chemical	8516.8	lbs	Material Used - Liquid Chemical	23.33	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	3510.11	lbs	Material Used	9.617	Assumed daily maximum, is annual total divided by 365 days.
53	DEATS Oxidation in RCTO	Photolithography	none	lbs	Material Used - Liquid Chemical	42.8	lbs	Material Used - Liquid Chemical	0.12	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	17.64	lbs	Material Used	0.048	Assumed daily maximum, is annual total divided by 365 days.
54	HCl Storage Tank	Facilities	Wet Scrubber	gallons	Material Used - Facilities	20826.5	gallons	Material Used - Facilities	57.06	Assumed daily maximum, is annual total divided by 365 days.	gallons	Material Used	4946.28	gallons	Material Used	13.551	Assumed daily maximum, is annual total divided by 365 days.
55	Cresols Use	Organic Liquid for Photo or Cleaning	RCTO	lbs	Material Used - Liquid Chemical	213.1	lbs	Material Used - Liquid Chemical	0.58	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	97.20	lbs	Material Used	0.266	Assumed daily maximum, is annual total divided by 365 days.
56	M-Cresol Use	Organic Liquid for Photo or Cleaning	RCTO	lbs	Material Used - Liquid Chemical	81.7	lbs	Material Used - Liquid Chemical	0.22	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	43.25	lbs	Material Used	0.119	Assumed daily maximum, is annual total divided by 365 days.
57	1,4-Dioxane Use	Organic Liquid for Photo or Cleaning	RCTO	lbs	Material Used - Liquid Chemical	312.1	lbs	Material Used - Liquid Chemical	0.86	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	93.75	lbs	Material Used	0.257	Assumed daily maximum, is annual total divided by 365 days.
58	n-Butyl Alcohol Use	Organic Liquid for Photo or Cleaning	RCTO	lbs	Material Used - Liquid Chemical	76.1	lbs	Material Used - Liquid Chemical	0.21	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	16.47	lbs	Material Used	0.045	Assumed daily maximum, is annual total divided by 365 days.
59	Ethylene Glycol Use	Organic Liquid for Photo or Cleaning	RCTO	lbs	Material Used - Liquid Chemical	1563.8	lbs	Material Used - Liquid Chemical	4.28	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	504.02	lbs	Material Used	1.381	Assumed daily maximum, is annual total divided by 365 days.
60	Hydrochloric Acid Use	Wet etch baths	Wet Scrubber	lbs	Material Used - Liquid Chemical	78976.5	lbs	Material Used - Liquid Chemical	216.37	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	26136.47	lbs	Material Used	71.607	Assumed daily maximum, is annual total divided by 365 days.
61	Hydrofluoric Acid Wk Soln Use	Wet etch baths	Wet Scrubber	lbs	Material Used - Liquid Chemical	9881.3	lbs	Material Used - Liquid Chemical	27.07	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	4725.87	lbs	Material Used	12.948	Assumed daily maximum, is annual total divided by 365 days.
62	Hydrofluoric Acid 49% Soln Use	Wet etch baths	Wet Scrubber	lbs	Material Used - Liquid Chemical	109570.2	lbs	Material Used - Liquid Chemical	300.19	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	45603.71	lbs	Material Used	124.942	Assumed daily maximum, is annual total divided by 365 days.
63	Methanol Use	Photolithography	None	lbs	Material Used - Liquid Chemical	182.8	lbs	Material Used - Liquid Chemical	0.50	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	53.53	lbs	Material Used	0.147	Assumed daily maximum, is annual total divided by 365 days.
64	Arsine Use	Ion Implant	none	lbs	Material Used - Gaseous Chemical	64.5	lbs	Material Used - Gaseous Chemical	0.18	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	3.68	lbs	Material Used	0.010	Assumed daily maximum, is annual total divided by 365 days.
65	Chlorine Use	Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	3007.80	lbs	Material Used - Gaseous Chemical	8.24	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	1200.00	lbs	Material Used	3.288	Assumed daily maximum, is annual total divided by 365 days.
66	Boron Trifluoride Use	Ion Implant	Wet Scrubber	lbs	Material Used - Gaseous Chemical	83.0	lbs	Material Used - Gaseous Chemical	0.23	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	16.06	lbs	Material Used	0.044	Assumed daily maximum, is annual total divided by 365 days.
67	Difluoromethane Use	Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	919.6	lbs	Material Used - Gaseous Chemical	2.52	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
68	Fluorine Use	Photolithography	Wet Scrubber	lbs	Material Used - Gaseous Chemical	2.2	lbs	Material Used - Gaseous Chemical	0.01	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.76	lbs	Material Used	0.002	Assumed daily maximum, is annual total divided by 365 days.
69	Germanium Tetrafluoride Use	Ion Implant	Wet Scrubber	lbs	Material Used - Gaseous Chemical	15.6	lbs	Material Used - Gaseous Chemical	0.04	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	1.16	lbs	Material Used	0.003	Assumed daily maximum, is annual total divided by 365 days.
70	Hexafluoroethane Use	CVD/Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	9566.5	lbs	Material Used - Gaseous Chemical	26.21	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	4900.00	lbs	Material Used	13.425	Assumed daily maximum, is annual total divided by 365 days.
71	Hexafluoroethane Use - HF Byproduct from C2F6 combustion in POU abatement devices	CVD/Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	9566.5	lbs	Material Used - Gaseous Chemical	26.21	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	4900.00	lbs	Material Used	13.425	Assumed daily maximum, is annual total divided by 365 days.
72	Hexafluoroethane Use - HF Byproduct from CF4 combustion in POU abatement devices	CVD/Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	9566.5	lbs	Material Used - Gaseous Chemical	26.21	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	4900.00	lbs	Material Used	13.425	Assumed daily maximum, is annual total divided by 365 days.
73	Nitrogen Trifluoride Use (Process 1)	CVD In-situ Plasma Clean	Wet Scrubber	lbs	Material Used - Gaseous Chemical	0.0	lbs	Material Used - Gaseous Chemical	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	10601.71	lbs	Material Used	29.046	Assumed daily maximum, is annual total divided by 365 days.
74	Nitrogen Trifluoride Use (Process 1) - HF Byproduct from NF3 combustion in POU abatement devices in process 1	CVD In-situ Plasma Clean	Wet Scrubber	lbs	Material Used - Gaseous Chemical	0.0	lbs	Material Used - Gaseous Chemical	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	10601.71	lbs	Material Used	29.046	Assumed daily maximum, is annual total divided by 365 days.
75	Nitrogen Trifluoride Use (Process 1) - HF Byproduct from CF4 combustion in POU abatement devices in process 1	CVD In-situ Plasma Clean	Wet Scrubber	lbs	Material Used - Gaseous Chemical	0.0	lbs	Material Used - Gaseous Chemical	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	10601.71	lbs	Material Used	29.046	Assumed daily maximum, is annual total divided by 365 days.
76	Nitrogen Trifluoride Use (Process 2)	CVD Remote Plasma Clean	Wet Scrubber	lbs	Material Used - Gaseous Chemical	32527.7	lbs	Material Used - Gaseous Chemical	89.12	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	2202.29	lbs	Material Used	6.034	Assumed daily maximum, is annual total divided by 365 days.
77	Nitrogen Trifluoride Use (Process 2) - HF Byproduct from NF3 combustion in POU abatement devices in process 2	CVD Remote Plasma Clean	Wet Scrubber	lbs	Material Used - Gaseous Chemical	32527.7	lbs	Material Used - Gaseous Chemical	89.12	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	2202.29	lbs	Material Used	6.034	Assumed daily maximum, is annual total divided by 365 days.
78	Nitrogen Trifluoride Use (Process 2) - HF Byproduct from CF4 combustion in POU abatement devices in process 2	CVD Remote Plasma Clean	Wet Scrubber	lbs	Material Used - Gaseous Chemical	32527.7	lbs	Material Used - Gaseous Chemical	89.12	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	2202.29	lbs	Material Used	6.034	Assumed daily maximum, is annual total divided by 365 days.
79	Octafluorocyclobutane Use	Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	594.0	lbs	Material Used - Gaseous Chemical	1.63	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	308.00	lbs	Material Used	0.844	Assumed daily maximum, is annual total divided by 365 days.
80	Octafluorocyclopentene Use	Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	2,739	lbs	Material Used - Gaseous Chemical	7.50	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	813.44	lbs	Material Used	2.229	Assumed daily maximum, is annual total divided by 365 days.
81	Octafluoropropane Use	CVD	Wet Scrubber	lbs	Material Used - Gaseous Chemical	29,718	lbs	Material Used - Gaseous Chemical	81.42	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	14175.00	lbs	Material Used	38.836	Assumed daily maximum, is annual total divided by 365 days.
82	Octafluoropropane Use - HF Byproduct from C3F8 combustion in POU abatement devices	CVD	Wet Scrubber	lbs	Material Used - Gaseous Chemical	29,718	lbs	Material Used - Gaseous Chemical	81.42	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	14175.00	lbs	Material Used	38.836	Assumed daily maximum, is annual total divided by 365 days.
83	Octafluoropropane Use - HF Byproduct from CF4 combustion in POU abatement devices	CVD	Wet Scrubber	lbs	Material Used - Gaseous Chemical	29,718	lbs	Material Used - Gaseous Chemical	81.42	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	14175.00	lbs	Material Used	38.836	Assumed daily maximum, is annual total divided by 365 days.
84	Sulfur Hexafluoride Use	Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	3,119	lbs	Material Used - Gaseous Chemical	8.55	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	1400.00	lbs	Material Used	3.836	Assumed daily maximum, is annual total divided by 365 days.
85	Tetrafluoromethane (CF4) (Process 1)	CVD	Wet Scrubber	lbs	Material Used - Gaseous Chemical	0	lbs	Material Used - Gaseous Chemical	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	17576.64	lbs	Material Used	48.155	Assumed daily maximum, is annual total divided by 365 days.
86	Tetrafluoromethane (CF4) (Process 1) - HF Byproduct from CF4 combustion in POU abatement devices	CVD	Wet Scrubber	lbs	Material Used - Gaseous Chemical	0	lbs	Material Used - Gaseous Chemical	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	17576.64	lbs	Material Used	48.155	Assumed daily maximum, is annual total divided by 365 days.
87	Tetrafluoromethane (CF4) (Process 2)	Etch/Wafer Clean	Wet Scrubber	lbs	Material Used - Gaseous Chemical	48,336	lbs	Material Used - Gaseous Chemical	132.43	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	6903.36	lbs	Material Used	18.913	Assumed daily maximum, is annual total divided by 365 days.
88	Trifluoromethane	Etch/Wafer Clean	Wet Scrubber	lbs	Material Used - Gaseous Chemical	1,486	lbs	Material Used - Gaseous Chemical	4.07	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	376.00	lbs	Material Used	1.030	Assumed daily maximum, is annual total divided by 365 days.
89	Tungsten Hexafluoride	CVD	Wet Scrubber	lbs	Material Used - Gaseous Chemical	6,504	lbs	Material Used - Gaseous Chemical	17.82	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	4247.04	lbs	Material Used	11.636	Assumed daily maximum, is annual total divided by 365 days.
90	Hydrogen Chloride Gas Use	Diffusion	Wet Scrubber	lbs	Material Used - Gaseous Chemical	1,071	lbs	Material Used - Gaseous Chemical	2.93	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	600.00	lbs	Material Used	1.644	Assumed daily maximum, is annual total divided by 365 days.
91	Hydrogen Bromide Use	Etch gas	Wet Scrubber	lbs	Material Used - Gaseous Chemical	4,376	lbs	Material Used - Gaseous Chemical	11.99	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	1560.00	lbs	Material Used	4.274	Assumed daily maximum, is annual total divided by 365 days.
92	1-Methoxy-2-propanol (PGME) Use	Photolithography	RCTO	lbs	Material Used - Liquid Chemical	435576.65578558	lbs	Material Used - Liquid Chemical	1193.36	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	264143.23	lbs	Material Used	723.680	Assumed daily maximum, is annual total divided by 365 days.
93	2-(1-Methoxy)propyl acetate (PGMEA) Use	Photolithography	RCTO	lbs	Material Used - Liquid Chemical	206316.52479251	lbs	Material Used - Liquid Chemical	565.25	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	124793.39	lbs	Material Used	341.900	Assumed daily maximum, is annual total divided by 365 days.
94	3-Amino-1,2,4 Triazole Use	CMP	Wet Scrubber	lbs	Material Used - Liquid Chemical	90.36022409	lbs	Material Used - Liquid Chemical	0.25	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	21.34	lbs	Material Used	0.058	Assumed daily maximum, is annual total divided by 365 days.
95	Acetone Use	Photolithography	RCTO	lbs	Material Used - Liquid Chemical	338	lbs	Material Used - Liquid Chemical	0.93	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	171.34	lbs	Material Used	0.469	Assumed daily maximum, is annual total divided by 365 days.
96	Phosphorus Oxychloride Use	Etch	Wet Scrubber	lbs	Material Used - Liquid Chemical	381	lbs	Material Used - Liquid Chemical	1.04	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
97	Pyrocatechol Use	Photolithography	RCTO	lbs	Material Used - Liquid Chemical	10428	lbs	Material Used - Liquid Chemical	28.57	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	9243.00	lbs	Material Used	25.323	Assumed daily maximum, is annual total divided by 365 days.
98	Silicon Dioxide Use	Acid/Base Chemical Use	Wet Scrubber	lbs	Material Used - Liquid Chemical	381232.12806171	lbs	Material Used - Liquid Chemical	1044.47	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	146746.92	lbs	Material Used	402.046	Assumed daily maximum, is annual total divided by 365 days.
99	Silicon Tetrafluoride Use	Acid/Base Chemical Use	Wet Scrubber	lbs	Material Used - Gaseous Chemical	40	lbs	Material Used - Gaseous Chemical	0.11	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
100	Fluorides	HF Emissions	Wet Scrubber	lbs	HF lbs Emitted	9185.48335744	lbs	HF lbs Emitted	25.17	Assumed daily maximum, is annual total divided by 365 days.	lbs	HF lbs Emitted	3507.20	lbs	Material Used	9.609	Assumed daily maximum, is annual total divided by 365 days.

101	Ammonium Hydroxide Use	Acid/Base Chemical Use	Wet Scrubber	lbs	Material Used - Liquid Chemical	98826.24781888	lbs	Material Used - Liquid Chemical	270.76	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	44999.45	lbs	Material Used	123.286	Assumed daily maximum, is annual total divided by 365 days.
102	Aluminum Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	5,694.72	lbs	Material Used - Solid Materials	15.60	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	948.53	lbs	Material Used	2.599	Assumed daily maximum, is annual total divided by 365 days.
103	Cadmium Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	0.02	lbs	Material Used - Solid Materials	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
104	Chlorine Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	0.02	lbs	Material Used - Solid Materials	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
105	Copper Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	177,556.13	lbs	Material Used - Solid Materials	486.46	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	5971.55	lbs	Material Used	16.360	Assumed daily maximum, is annual total divided by 365 days.
106	Manganese Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	0.02	lbs	Material Used - Solid Materials	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
107	Nickel Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	0.19	lbs	Material Used - Solid Materials	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.01	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
108	Lead Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	1.15	lbs	Material Used - Solid Materials	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
109	Vanadium Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	0.04	lbs	Material Used - Solid Materials	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
110	Antimony Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	1.9835	lbs	Material Used - Solid Materials	0.01	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
111	Cobalt Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	566.35	lbs	Material Used - Solid Materials	1.55	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	8.47	lbs	Material Used	0.023	Assumed daily maximum, is annual total divided by 365 days.
112	Arsenic Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	0.06	lbs	Material Used - Solid Materials	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
113	Uranium Use Target/Anode Usage	Target/Anode Usage	None	lbs	Material Used - Solid Materials	1.84E-05	lbs	Material Used - Solid Materials	0.00	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	0.00	lbs	Material Used	0.000	Assumed daily maximum, is annual total divided by 365 days.
114	TMPI Use	CVD	None	lbs	Material Used - Liquid Chemical	327	lbs	Material Used - Liquid Chemical	0.90	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	20.09	lbs	Material Used	0.055	Assumed daily maximum, is annual total divided by 365 days.
115	pH 7 Buffer solution-Yellow 4L	Buffer Solution	None	lbs	Material Used - Facilities	159	lbs	Material Used - Facilities	0.43	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	91.80	lbs	Material Used	0.251	Assumed daily maximum, is annual total divided by 365 days.
116	pH 10 Buffer solution-Blue 4L	Buffer Solution	None	lbs	Material Used - Facilities	159	lbs	Material Used - Facilities	0.43	Assumed daily maximum, is annual total divided by 365 days.	lbs	Material Used	41.73	lbs	Material Used	0.114	Assumed daily maximum, is annual total divided by 365 days.
117	SMAW E6010 Welding	Exempt TEU – with DEQ Approval	None	lbs	Material Used - Facilities	40	lbs	Material Used - Facilities	40	Exempt TEU per Appendix B of the Oregon DEQ’s Exempt TEU Guidance. Assumed daily maximum is the same as annual.	lbs	Material Used	40	lbs	Material Used	40	Assumed daily maximum, is annual total divided by 365 days.
118	SMAW E7018 Welding	Exempt TEU – with DEQ Approval	None	lbs	Material Used - Facilities	40	lbs	Material Used - Facilities	40	Exempt TEU per Appendix B of the Oregon DEQ’s Exempt TEU Guidance. Assumed daily maximum is the same as annual.	lbs	Material Used	40	lbs	Material Used	40	Assumed daily maximum, is annual total divided by 365 days.

	A	B	C	D	E	F	G	H	I	J	K	L	M
1
2		Emissions Unit ID	Pollutant Information		Emission Factor Information					Calculated Annual Emissions [lb/yr]	Long Term Emission Rate (g/s)	Calculated Daily Emissions [lb/day]	Short Term Emission Rate (g/s)
3			CAS or DEQ ID	Pollutant Name	Controlled EF?	Control Efficiency	EF Values	Units	EF Reference/Notes
4		EU-1	61-82-5	Amitrole	N	97.50%	2.5	lb/ton	Manufacturer estimate	a
5		EU-1	7440-38-2	Arsenic and compounds	N	0.00%	0.1	lb/ton	The control efficiency does not apply to this pollutant	1.00E+01
6		Blr1-NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext.Comb. (b)	5.22E+00
7		EU_ID	CAS	PollutantName	ControlledEF	ControlEfficiency	EFValue	Units	Notes
8		Emergency Generator 1	71-43-2	Benzene	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.39E-01	4.88E-06	8.90E-02	4.67E-04
9		Emergency Generator 1	106-99-0	1,3-Butadiene	N	0.00%	0.2174	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.96E-01	5.69E-06	1.04E-01	5.45E-04
10		Emergency Generator 1	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.67E-03	3.84E-08	7.11E-04	3.73E-06
11		Emergency Generator 1	50-00-0	Formaldehyde	N	0.00%	1.7261	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.14E+00	4.52E-05	8.24E-01	4.33E-03
12		Emergency Generator 1	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.78E-04	2.56E-09	4.74E-05	2.49E-07
13		Emergency Generator 1	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.85E-03	4.09E-08	7.59E-04	3.98E-06
14		Emergency Generator 1	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.48E-02	2.12E-07	3.94E-03	2.07E-05
15		Emergency Generator 1	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.94E-03	9.98E-08	1.85E-03	9.71E-06
16		Emergency Generator 1	91-20-3	Naphthalene	N	0.00%	0.0197	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.59E-02	5.16E-07	9.41E-03	4.94E-05
17		Emergency Generator 1	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0362	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.59E-02	9.48E-07	1.73E-02	9.07E-05
18		Emergency Generator 1	75-07-0	Acetaldehyde	N	0.00%	0.7833	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.43E+00	2.05E-05	3.74E-01	1.96E-03
19		Emergency Generator 1	107-02-8	Acrolein	N	0.00%	0.0339	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.17E-02	8.88E-07	1.62E-02	8.50E-05
20		Emergency Generator 1	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.42E+00	2.05E-05	3.79E-01	1.99E-03
21		Emergency Generator 1	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.29E-03	1.05E-07	1.94E-03	1.02E-05
22		Emergency Generator 1	100-41-4	Ethyl benzene	N	0.00%	0.0109	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.98E-02	2.85E-07	5.20E-03	2.73E-05
23		Emergency Generator 1	110-54-3	Hexane	N	0.00%	0.0269	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.90E-02	7.04E-07	1.28E-02	6.74E-05
24		Emergency Generator 1	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.39E-01	4.88E-06	8.90E-02	4.67E-04
25		Emergency Generator 1	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	5.51E-03	7.93E-08	1.47E-03	7.72E-06
26		Emergency Generator 1	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.56E-03	5.12E-08	9.48E-04	4.98E-06
27		Emergency Generator 1	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.91E-03	5.63E-08	1.04E-03	5.48E-06
28		Emergency Generator 1	108-88-3	Toluene	N	0.00%	0.1054	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.92E-01	2.76E-06	5.03E-02	2.64E-04
29		Emergency Generator 1	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0424	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.72E-02	1.11E-06	2.02E-02	1.06E-04
30		Emergency Generator 1	200	Diesel particulate matter	N	0.00%	33.5	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.10E+01	8.77E-04	1.60E+01	8.40E-02
31		Emergency Generator 2	71-43-2	Benzene	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.39E-01	4.88E-06	8.90E-02	4.67E-04
32		Emergency Generator 2	106-99-0	1,3-Butadiene	N	0.00%	0.2174	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.96E-01	5.69E-06	1.04E-01	5.45E-04
33		Emergency Generator 2	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.67E-03	3.84E-08	7.11E-04	3.73E-06
34		Emergency Generator 2	50-00-0	Formaldehyde	N	0.00%	1.7261	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.14E+00	4.52E-05	8.24E-01	4.33E-03
35		Emergency Generator 2	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.78E-04	2.56E-09	4.74E-05	2.49E-07
36		Emergency Generator 2	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.85E-03	4.09E-08	7.59E-04	3.98E-06
37		Emergency Generator 2	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.48E-02	2.12E-07	3.94E-03	2.07E-05
38		Emergency Generator 2	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.94E-03	9.98E-08	1.85E-03	9.71E-06
39		Emergency Generator 2	91-20-3	Naphthalene	N	0.00%	0.0197	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.59E-02	5.16E-07	9.41E-03	4.94E-05
40		Emergency Generator 2	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0362	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.59E-02	9.48E-07	1.73E-02	9.07E-05
41		Emergency Generator 2	75-07-0	Acetaldehyde	N	0.00%	0.7833	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.43E+00	2.05E-05	3.74E-01	1.96E-03
42		Emergency Generator 2	107-02-8	Acrolein	N	0.00%	0.0339	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.17E-02	8.88E-07	1.62E-02	8.50E-05
43		Emergency Generator 2	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.42E+00	2.05E-05	3.79E-01	1.99E-03
44		Emergency Generator 2	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.29E-03	1.05E-07	1.94E-03	1.02E-05
45		Emergency Generator 2	100-41-4	Ethyl benzene	N	0.00%	0.0109	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.98E-02	2.85E-07	5.20E-03	2.73E-05
46		Emergency Generator 2	110-54-3	Hexane	N	0.00%	0.0269	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.90E-02	7.04E-07	1.28E-02	6.74E-05
47		Emergency Generator 2	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.39E-01	4.88E-06	8.90E-02	4.67E-04
48		Emergency Generator 2	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	5.51E-03	7.93E-08	1.47E-03	7.72E-06
49		Emergency Generator 2	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.56E-03	5.12E-08	9.48E-04	4.98E-06
50		Emergency Generator 2	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.91E-03	5.63E-08	1.04E-03	5.48E-06

51		Emergency Generator 2	108-88-3	Toluene	N	0.00%	0.1054	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.92E-01	2.76E-06	5.03E-02	2.64E-04
52		Emergency Generator 2	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0424	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.72E-02	1.11E-06	2.02E-02	1.06E-04
53		Emergency Generator 2	200	Diesel particulate matter	N	0.00%	33.5	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.10E+01	8.77E-04	1.60E+01	8.40E-02
54		Emergency Generator 3	71-43-2	Benzene	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.26E-01	6.12E-06	1.12E-01	5.86E-04
55		Emergency Generator 3	106-99-0	1,3-Butadiene	N	0.00%	0.2174	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.97E-01	7.15E-06	1.30E-01	6.84E-04
56		Emergency Generator 3	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.35E-03	4.82E-08	8.93E-04	4.69E-06
57		Emergency Generator 3	50-00-0	Formaldehyde	N	0.00%	1.7261	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.94E+00	5.67E-05	1.03E+00	5.43E-03
58		Emergency Generator 3	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.23E-04	3.21E-09	5.95E-05	3.13E-07
59		Emergency Generator 3	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.57E-03	5.14E-08	9.53E-04	5.00E-06
60		Emergency Generator 3	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.85E-02	2.67E-07	4.94E-03	2.59E-05
61		Emergency Generator 3	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	8.71E-03	1.25E-07	2.32E-03	1.22E-05
62		Emergency Generator 3	91-20-3	Naphthalene	N	0.00%	0.0197	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.50E-02	6.48E-07	1.18E-02	6.20E-05
63		Emergency Generator 3	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0362	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	8.27E-02	1.19E-06	2.17E-02	1.14E-04
64		Emergency Generator 3	75-07-0	Acetaldehyde	N	0.00%	0.7833	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.79E+00	2.57E-05	4.70E-01	2.46E-03
65		Emergency Generator 3	107-02-8	Acrolein	N	0.00%	0.0339	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.75E-02	1.11E-06	2.03E-02	1.07E-04
66		Emergency Generator 3	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.79E+00	2.57E-05	4.76E-01	2.50E-03
67		Emergency Generator 3	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	9.15E-03	1.32E-07	2.44E-03	1.28E-05
68		Emergency Generator 3	100-41-4	Ethyl benzene	N	0.00%	0.0109	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.49E-02	3.58E-07	6.53E-03	3.43E-05
69		Emergency Generator 3	110-54-3	Hexane	N	0.00%	0.0269	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.15E-02	8.84E-07	1.61E-02	8.47E-05
70		Emergency Generator 3	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.26E-01	6.12E-06	1.12E-01	5.86E-04
71		Emergency Generator 3	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.92E-03	9.95E-08	1.85E-03	9.69E-06
72		Emergency Generator 3	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.47E-03	6.42E-08	1.19E-03	6.25E-06
73		Emergency Generator 3	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.91E-03	7.06E-08	1.31E-03	6.88E-06
74		Emergency Generator 3	108-88-3	Toluene	N	0.00%	0.1054	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.41E-01	3.46E-06	6.32E-02	3.32E-04
75		Emergency Generator 3	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0424	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	9.69E-02	1.39E-06	2.54E-02	1.33E-04
76		Emergency Generator 3	200	Diesel particulate matter	N	0.00%	33.5	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.66E+01	1.10E-03	2.01E+01	1.05E-01
77		Emergency Generator 4	71-43-2	Benzene	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.26E-01	6.12E-06	1.12E-01	5.86E-04
78		Emergency Generator 4	106-99-0	1,3-Butadiene	N	0.00%	0.2174	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.97E-01	7.15E-06	1.30E-01	6.84E-04
79		Emergency Generator 4	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.35E-03	4.82E-08	8.93E-04	4.69E-06
80		Emergency Generator 4	50-00-0	Formaldehyde	N	0.00%	1.7261	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.94E+00	5.67E-05	1.03E+00	5.43E-03
81		Emergency Generator 4	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.23E-04	3.21E-09	5.95E-05	3.13E-07
82		Emergency Generator 4	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.57E-03	5.14E-08	9.53E-04	5.00E-06
83		Emergency Generator 4	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.85E-02	2.67E-07	4.94E-03	2.59E-05
84		Emergency Generator 4	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	8.71E-03	1.25E-07	2.32E-03	1.22E-05
85		Emergency Generator 4	91-20-3	Naphthalene	N	0.00%	0.0197	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.50E-02	6.48E-07	1.18E-02	6.20E-05
86		Emergency Generator 4	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0362	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	8.27E-02	1.19E-06	2.17E-02	1.14E-04
87		Emergency Generator 4	75-07-0	Acetaldehyde	N	0.00%	0.7833	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.79E+00	2.57E-05	4.70E-01	2.46E-03
88		Emergency Generator 4	107-02-8	Acrolein	N	0.00%	0.0339	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.75E-02	1.11E-06	2.03E-02	1.07E-04
89		Emergency Generator 4	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.79E+00	2.57E-05	4.76E-01	2.50E-03
90		Emergency Generator 4	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	9.15E-03	1.32E-07	2.44E-03	1.28E-05
91		Emergency Generator 4	100-41-4	Ethyl benzene	N	0.00%	0.0109	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.49E-02	3.58E-07	6.53E-03	3.43E-05
92		Emergency Generator 4	110-54-3	Hexane	N	0.00%	0.0269	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.15E-02	8.84E-07	1.61E-02	8.47E-05
93		Emergency Generator 4	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.26E-01	6.12E-06	1.12E-01	5.86E-04
94		Emergency Generator 4	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.92E-03	9.95E-08	1.85E-03	9.69E-06
95		Emergency Generator 4	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.47E-03	6.42E-08	1.19E-03	6.25E-06
96		Emergency Generator 4	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.91E-03	7.06E-08	1.31E-03	6.88E-06
97		Emergency Generator 4	108-88-3	Toluene	N	0.00%	0.1054	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.41E-01	3.46E-06	6.32E-02	3.32E-04
98		Emergency Generator 4	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0424	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	9.69E-02	1.39E-06	2.54E-02	1.33E-04
99		Emergency Generator 4	200	Diesel particulate matter	N	0.00%	33.5	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.66E+01	1.10E-03	2.01E+01	1.05E-01
100		Emergency Generator 5	71-43-2	Benzene	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.26E-01	6.12E-06	1.12E-01	5.86E-04

101		Emergency Generator 5	106-99-0	1,3-Butadiene	N	0.00%	0.2174	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.97E-01	7.15E-06	1.30E-01	6.84E-04
102		Emergency Generator 5	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.35E-03	4.82E-08	8.93E-04	4.69E-06
103		Emergency Generator 5	50-00-0	Formaldehyde	N	0.00%	1.7261	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.94E+00	5.67E-05	1.03E+00	5.43E-03
104		Emergency Generator 5	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.23E-04	3.21E-09	5.95E-05	3.13E-07
105		Emergency Generator 5	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.57E-03	5.14E-08	9.53E-04	5.00E-06
106		Emergency Generator 5	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.85E-02	2.67E-07	4.94E-03	2.59E-05
107		Emergency Generator 5	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	8.71E-03	1.25E-07	2.32E-03	1.22E-05
108		Emergency Generator 5	91-20-3	Naphthalene	N	0.00%	0.0197	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.50E-02	6.48E-07	1.18E-02	6.20E-05
109		Emergency Generator 5	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0362	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	8.27E-02	1.19E-06	2.17E-02	1.14E-04
110		Emergency Generator 5	75-07-0	Acetaldehyde	N	0.00%	0.7833	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.79E+00	2.57E-05	4.70E-01	2.46E-03
111		Emergency Generator 5	107-02-8	Acrolein	N	0.00%	0.0339	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.75E-02	1.11E-06	2.03E-02	1.07E-04
112		Emergency Generator 5	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.79E+00	2.57E-05	4.76E-01	2.50E-03
113		Emergency Generator 5	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	9.15E-03	1.32E-07	2.44E-03	1.28E-05
114		Emergency Generator 5	100-41-4	Ethyl benzene	N	0.00%	0.0109	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.49E-02	3.58E-07	6.53E-03	3.43E-05
115		Emergency Generator 5	110-54-3	Hexane	N	0.00%	0.0269	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.15E-02	8.84E-07	1.61E-02	8.47E-05
116		Emergency Generator 5	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.26E-01	6.12E-06	1.12E-01	5.86E-04
117		Emergency Generator 5	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.92E-03	9.95E-08	1.85E-03	9.69E-06
118		Emergency Generator 5	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.47E-03	6.42E-08	1.19E-03	6.25E-06
119		Emergency Generator 5	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.91E-03	7.06E-08	1.31E-03	6.88E-06
120		Emergency Generator 5	108-88-3	Toluene	N	0.00%	0.1054	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.41E-01	3.46E-06	6.32E-02	3.32E-04
121		Emergency Generator 5	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0424	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	9.69E-02	1.39E-06	2.54E-02	1.33E-04
122		Emergency Generator 5	200	Diesel particulate matter	N	0.00%	33.5	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.66E+01	1.10E-03	2.01E+01	1.05E-01
123		Fire Pump	71-43-2	Benzene	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.72E-02	5.35E-07	9.75E-03	5.12E-05
124		Fire Pump	106-99-0	1,3-Butadiene	N	0.00%	0.2174	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.34E-02	6.24E-07	1.14E-02	5.98E-05
125		Fire Pump	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.93E-04	4.21E-09	7.80E-05	4.09E-07
126		Fire Pump	50-00-0	Formaldehyde	N	0.00%	1.7261	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.46E-01	4.98E-06	9.05E-02	4.75E-04
127		Fire Pump	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.95E-05	2.80E-10	5.20E-06	2.73E-08
128		Fire Pump	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.12E-04	4.49E-09	8.32E-05	4.37E-07
129		Fire Pump	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.62E-03	2.33E-08	4.32E-04	2.27E-06
130		Fire Pump	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.61E-04	1.09E-08	2.03E-04	1.06E-06
131		Fire Pump	91-20-3	Naphthalene	N	0.00%	0.0197	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.93E-03	5.66E-08	1.03E-03	5.41E-06
132		Fire Pump	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0362	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	7.23E-03	1.04E-07	1.90E-03	9.95E-06
133		Fire Pump	75-07-0	Acetaldehyde	N	0.00%	0.7833	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.56E-01	2.25E-06	4.10E-02	2.15E-04
134		Fire Pump	107-02-8	Acrolein	N	0.00%	0.0339	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.77E-03	9.73E-08	1.77E-03	9.32E-06
135		Fire Pump	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.56E-01	2.24E-06	4.16E-02	2.18E-04
136		Fire Pump	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	8.00E-04	1.15E-08	2.13E-04	1.12E-06
137		Fire Pump	100-41-4	Ethyl benzene	N	0.00%	0.0109	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.18E-03	3.13E-08	5.71E-04	3.00E-06
138		Fire Pump	110-54-3	Hexane	N	0.00%	0.0269	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	5.37E-03	7.72E-08	1.41E-03	7.39E-06
139		Fire Pump	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.72E-02	5.35E-07	9.75E-03	5.12E-05
140		Fire Pump	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.05E-04	8.69E-09	1.61E-04	8.46E-07
141		Fire Pump	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.90E-04	5.61E-09	1.04E-04	5.46E-07
142		Fire Pump	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	4.29E-04	6.17E-09	1.14E-04	6.01E-07
143		Fire Pump	108-88-3	Toluene	N	0.00%	0.1054	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	2.10E-02	3.03E-07	5.52E-03	2.90E-05
144		Fire Pump	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0424	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	8.46E-03	1.22E-07	2.22E-03	1.17E-05
145		Fire Pump	200	Diesel particulate matter	N	0.00%	33.5	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.69E+00	9.62E-05	1.75E+00	9.21E-03
146		Boiler 1 Fab 4-1 NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	6.26E-01	9.00E-06	1.71E-03	9.00E-06
147		Boiler 1 Fab 4-1 NG	50-00-0	Formaldehyde	N	0.00%	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.33E+00	1.91E-05	3.64E-03	1.91E-05
148		Boiler 1 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	1.08E-02	1.55E-07	2.96E-05	1.55E-07
149		Boiler 1 Fab 4-1 NG	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.29E-04	1.86E-09	3.55E-07	1.86E-09
150		Boiler 1 Fab 4-1 NG	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	3.24E-02	4.66E-07	8.87E-05	4.66E-07

151		Boiler 1 Fab 4-1 NG	75-07-0	Acetaldehyde	N	0.00%	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	3.35E-01	4.81E-06	9.17E-04	4.81E-06
152		Boiler 1 Fab 4-1 NG	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	2.91E-01	4.19E-06	7.98E-04	4.19E-06
153		Boiler 1 Fab 4-1 NG	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	3.45E+02	4.97E-03	9.46E-01	4.97E-03
154		Boiler 1 Fab 4-1 NG	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	2.16E-02	3.10E-07	5.91E-05	3.10E-07
155		Boiler 1 Fab 4-1 NG	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	4.75E-01	6.83E-06	1.30E-03	6.83E-06
156		Boiler 1 Fab 4-1 NG	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.29E-03	1.86E-08	3.55E-06	1.86E-08
157		Boiler 1 Fab 4-1 NG	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	1.19E-01	1.71E-06	3.25E-04	1.71E-06
158		Boiler 1 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	1.51E-01	2.17E-06	4.14E-04	2.17E-06
159		Boiler 1 Fab 4-1 NG	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	9.06E-03	1.30E-07	2.48E-05	1.30E-07
160		Boiler 1 Fab 4-1 NG	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	9.17E-02	1.32E-06	2.51E-04	1.32E-06
161		Boiler 1 Fab 4-1 NG	100-41-4	Ethyl benzene	N	0.00%	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	7.45E-01	1.07E-05	2.04E-03	1.07E-05
162		Boiler 1 Fab 4-1 NG	110-54-3	Hexane	N	0.00%	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	4.96E-01	7.14E-06	1.36E-03	7.14E-06
163		Boiler 1 Fab 4-1 NG	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	5.40E-02	7.76E-07	1.48E-04	7.76E-07
164		Boiler 1 Fab 4-1 NG	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	4.10E-02	5.90E-07	1.12E-04	5.90E-07
165		Boiler 1 Fab 4-1 NG	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	2.81E-02	4.04E-07	7.69E-05	4.04E-07
166		Boiler 1 Fab 4-1 NG	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	1.78E-01	2.56E-06	4.88E-04	2.56E-06
167		Boiler 1 Fab 4-1 NG	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	2.27E-01	3.26E-06	6.21E-04	3.26E-06
168		Boiler 1 Fab 4-1 NG	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	2.59E-03	3.73E-08	7.10E-06	3.73E-08
169		Boiler 1 Fab 4-1 NG	108-88-3	Toluene	N	0.00%	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.86E+00	4.11E-05	7.83E-03	4.11E-05
170		Boiler 1 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	2.48E-01	3.57E-06	6.80E-04	3.57E-06
171		Boiler 1 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	2.13E+00	3.06E-05	5.82E-03	3.06E-05
172		Boiler 1 Fab 4-1 NG	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	3.13E+00	4.50E-05	8.57E-03	4.50E-05
173		Boiler 2 Fab 4-1 NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	6.26E-01	9.00E-06	1.71E-03	9.00E-06
174		Boiler 2 Fab 4-1 NG	50-00-0	Formaldehyde	N	0.00%	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.33E+00	1.91E-05	3.64E-03	1.91E-05
175		Boiler 2 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	1.08E-02	1.55E-07	2.96E-05	1.55E-07
176		Boiler 2 Fab 4-1 NG	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.29E-04	1.86E-09	3.55E-07	1.86E-09
177		Boiler 2 Fab 4-1 NG	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	3.24E-02	4.66E-07	8.87E-05	4.66E-07
178		Boiler 2 Fab 4-1 NG	75-07-0	Acetaldehyde	N	0.00%	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	3.35E-01	4.81E-06	9.17E-04	4.81E-06
179		Boiler 2 Fab 4-1 NG	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	2.91E-01	4.19E-06	7.98E-04	4.19E-06
180		Boiler 2 Fab 4-1 NG	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	3.45E+02	4.97E-03	9.46E-01	4.97E-03
181		Boiler 2 Fab 4-1 NG	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	2.16E-02	3.10E-07	5.91E-05	3.10E-07
182		Boiler 2 Fab 4-1 NG	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	4.75E-01	6.83E-06	1.30E-03	6.83E-06
183		Boiler 2 Fab 4-1 NG	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.29E-03	1.86E-08	3.55E-06	1.86E-08
184		Boiler 2 Fab 4-1 NG	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	1.19E-01	1.71E-06	3.25E-04	1.71E-06
185		Boiler 2 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	1.51E-01	2.17E-06	4.14E-04	2.17E-06
186		Boiler 2 Fab 4-1 NG	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	9.06E-03	1.30E-07	2.48E-05	1.30E-07
187		Boiler 2 Fab 4-1 NG	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	9.17E-02	1.32E-06	2.51E-04	1.32E-06
188		Boiler 2 Fab 4-1 NG	100-41-4	Ethyl benzene	N	0.00%	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	7.45E-01	1.07E-05	2.04E-03	1.07E-05
189		Boiler 2 Fab 4-1 NG	110-54-3	Hexane	N	0.00%	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	4.96E-01	7.14E-06	1.36E-03	7.14E-06
190		Boiler 2 Fab 4-1 NG	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	5.40E-02	7.76E-07	1.48E-04	7.76E-07
191		Boiler 2 Fab 4-1 NG	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	4.10E-02	5.90E-07	1.12E-04	5.90E-07
192		Boiler 2 Fab 4-1 NG	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	2.81E-02	4.04E-07	7.69E-05	4.04E-07
193		Boiler 2 Fab 4-1 NG	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	1.78E-01	2.56E-06	4.88E-04	2.56E-06
194		Boiler 2 Fab 4-1 NG	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	2.27E-01	3.26E-06	6.21E-04	3.26E-06
195		Boiler 2 Fab 4-1 NG	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	2.59E-03	3.73E-08	7.10E-06	3.73E-08
196		Boiler 2 Fab 4-1 NG	108-88-3	Toluene	N	0.00%	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.86E+00	4.11E-05	7.83E-03	4.11E-05
197		Boiler 2 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	2.48E-01	3.57E-06	6.80E-04	3.57E-06
198		Boiler 2 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	2.13E+00	3.06E-05	5.82E-03	3.06E-05
199		Boiler 2 Fab 4-1 NG	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	3.13E+00	4.50E-05	8.57E-03	4.50E-05
200		Boiler 3 Fab 4-1 NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	6.26E-01	9.00E-06	1.71E-03	9.00E-06

201		Boiler 3 Fab 4-1 NG	50-00-0	Formaldehyde	N	0.00%	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.33E+00	1.91E-05	3.64E-03	1.91E-05
202		Boiler 3 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	1.08E-02	1.55E-07	2.96E-05	1.55E-07
203		Boiler 3 Fab 4-1 NG	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.29E-04	1.86E-09	3.55E-07	1.86E-09
204		Boiler 3 Fab 4-1 NG	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	3.24E-02	4.66E-07	8.87E-05	4.66E-07
205		Boiler 3 Fab 4-1 NG	75-07-0	Acetaldehyde	N	0.00%	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	3.35E-01	4.81E-06	9.17E-04	4.81E-06
206		Boiler 3 Fab 4-1 NG	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	2.91E-01	4.19E-06	7.98E-04	4.19E-06
207		Boiler 3 Fab 4-1 NG	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	3.45E+02	4.97E-03	9.46E-01	4.97E-03
208		Boiler 3 Fab 4-1 NG	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	2.16E-02	3.10E-07	5.91E-05	3.10E-07
209		Boiler 3 Fab 4-1 NG	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	4.75E-01	6.83E-06	1.30E-03	6.83E-06
210		Boiler 3 Fab 4-1 NG	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.29E-03	1.86E-08	3.55E-06	1.86E-08
211		Boiler 3 Fab 4-1 NG	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	1.19E-01	1.71E-06	3.25E-04	1.71E-06
212		Boiler 3 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	1.51E-01	2.17E-06	4.14E-04	2.17E-06
213		Boiler 3 Fab 4-1 NG	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	9.06E-03	1.30E-07	2.48E-05	1.30E-07
214		Boiler 3 Fab 4-1 NG	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	9.17E-02	1.32E-06	2.51E-04	1.32E-06
215		Boiler 3 Fab 4-1 NG	100-41-4	Ethyl benzene	N	0.00%	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	7.45E-01	1.07E-05	2.04E-03	1.07E-05
216		Boiler 3 Fab 4-1 NG	110-54-3	Hexane	N	0.00%	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	4.96E-01	7.14E-06	1.36E-03	7.14E-06
217		Boiler 3 Fab 4-1 NG	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	5.40E-02	7.76E-07	1.48E-04	7.76E-07
218		Boiler 3 Fab 4-1 NG	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	4.10E-02	5.90E-07	1.12E-04	5.90E-07
219		Boiler 3 Fab 4-1 NG	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	2.81E-02	4.04E-07	7.69E-05	4.04E-07
220		Boiler 3 Fab 4-1 NG	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	1.78E-01	2.56E-06	4.88E-04	2.56E-06
221		Boiler 3 Fab 4-1 NG	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	2.27E-01	3.26E-06	6.21E-04	3.26E-06
222		Boiler 3 Fab 4-1 NG	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	2.59E-03	3.73E-08	7.10E-06	3.73E-08
223		Boiler 3 Fab 4-1 NG	108-88-3	Toluene	N	0.00%	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.86E+00	4.11E-05	7.83E-03	4.11E-05
224		Boiler 3 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	2.48E-01	3.57E-06	6.80E-04	3.57E-06
225		Boiler 3 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	2.13E+00	3.06E-05	5.82E-03	3.06E-05
226		Boiler 3 Fab 4-1 NG	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	3.13E+00	4.50E-05	8.57E-03	4.50E-05
227		Boiler 4 Fab 4-1 NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	5.00E-01	7.19E-06	1.37E-03	7.19E-06
228		Boiler 4 Fab 4-1 NG	50-00-0	Formaldehyde	N	0.00%	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.06E+00	1.53E-05	2.91E-03	1.53E-05
229		Boiler 4 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	8.62E-03	1.24E-07	2.36E-05	1.24E-07
230		Boiler 4 Fab 4-1 NG	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.03E-04	1.49E-09	2.83E-07	1.49E-09
231		Boiler 4 Fab 4-1 NG	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	2.59E-02	3.72E-07	7.09E-05	3.72E-07
232		Boiler 4 Fab 4-1 NG	75-07-0	Acetaldehyde	N	0.00%	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	2.67E-01	3.84E-06	7.32E-04	3.84E-06
233		Boiler 4 Fab 4-1 NG	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	2.33E-01	3.35E-06	6.38E-04	3.35E-06
234		Boiler 4 Fab 4-1 NG	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	2.76E+02	3.97E-03	7.56E-01	3.97E-03
235		Boiler 4 Fab 4-1 NG	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	1.72E-02	2.48E-07	4.72E-05	2.48E-07
236		Boiler 4 Fab 4-1 NG	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	3.79E-01	5.46E-06	1.04E-03	5.46E-06
237		Boiler 4 Fab 4-1 NG	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.03E-03	1.49E-08	2.83E-06	1.49E-08
238		Boiler 4 Fab 4-1 NG	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	9.48E-02	1.36E-06	2.60E-04	1.36E-06
239		Boiler 4 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	1.21E-01	1.74E-06	3.31E-04	1.74E-06
240		Boiler 4 Fab 4-1 NG	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	7.24E-03	1.04E-07	1.98E-05	1.04E-07
241		Boiler 4 Fab 4-1 NG	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	7.33E-02	1.05E-06	2.01E-04	1.05E-06
242		Boiler 4 Fab 4-1 NG	100-41-4	Ethyl benzene	N	0.00%	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	5.95E-01	8.56E-06	1.63E-03	8.56E-06
243		Boiler 4 Fab 4-1 NG	110-54-3	Hexane	N	0.00%	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	3.97E-01	5.70E-06	1.09E-03	5.70E-06
244		Boiler 4 Fab 4-1 NG	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	4.31E-02	6.20E-07	1.18E-04	6.20E-07
245		Boiler 4 Fab 4-1 NG	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	3.28E-02	4.71E-07	8.98E-05	4.71E-07
246		Boiler 4 Fab 4-1 NG	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	2.24E-02	3.22E-07	6.14E-05	3.22E-07
247		Boiler 4 Fab 4-1 NG	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	1.42E-01	2.05E-06	3.90E-04	2.05E-06
248		Boiler 4 Fab 4-1 NG	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	1.81E-01	2.60E-06	4.96E-04	2.60E-06
249		Boiler 4 Fab 4-1 NG	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	2.07E-03	2.98E-08	5.67E-06	2.98E-08
250		Boiler 4 Fab 4-1 NG	108-88-3	Toluene	N	0.00%	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.28E+00	3.29E-05	6.26E-03	3.29E-05

251		Boiler 4 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	1.98E-01	2.85E-06	5.43E-04	2.85E-06
252		Boiler 4 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	1.70E+00	2.44E-05	4.65E-03	2.44E-05
253		Boiler 4 Fab 4-1 NG	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	2.50E+00	3.60E-05	6.85E-03	3.60E-05
254		Boiler 5 Fab 4-1 NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	5.00E-01	7.19E-06	1.37E-03	7.19E-06
255		Boiler 5 Fab 4-1 NG	50-00-0	Formaldehyde	N	0.00%	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.06E+00	1.53E-05	2.91E-03	1.53E-05
256		Boiler 5 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	8.62E-03	1.24E-07	2.36E-05	1.24E-07
257		Boiler 5 Fab 4-1 NG	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.03E-04	1.49E-09	2.83E-07	1.49E-09
258		Boiler 5 Fab 4-1 NG	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	2.59E-02	3.72E-07	7.09E-05	3.72E-07
259		Boiler 5 Fab 4-1 NG	75-07-0	Acetaldehyde	N	0.00%	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	2.67E-01	3.84E-06	7.32E-04	3.84E-06
260		Boiler 5 Fab 4-1 NG	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	2.33E-01	3.35E-06	6.38E-04	3.35E-06
261		Boiler 5 Fab 4-1 NG	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	2.76E+02	3.97E-03	7.56E-01	3.97E-03
262		Boiler 5 Fab 4-1 NG	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	1.72E-02	2.48E-07	4.72E-05	2.48E-07
263		Boiler 5 Fab 4-1 NG	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	3.79E-01	5.46E-06	1.04E-03	5.46E-06
264		Boiler 5 Fab 4-1 NG	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	1.03E-03	1.49E-08	2.83E-06	1.49E-08
265		Boiler 5 Fab 4-1 NG	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	9.48E-02	1.36E-06	2.60E-04	1.36E-06
266		Boiler 5 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	1.21E-01	1.74E-06	3.31E-04	1.74E-06
267		Boiler 5 Fab 4-1 NG	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	7.24E-03	1.04E-07	1.98E-05	1.04E-07
268		Boiler 5 Fab 4-1 NG	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	7.33E-02	1.05E-06	2.01E-04	1.05E-06
269		Boiler 5 Fab 4-1 NG	100-41-4	Ethyl benzene	N	0.00%	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	5.95E-01	8.56E-06	1.63E-03	8.56E-06
270		Boiler 5 Fab 4-1 NG	110-54-3	Hexane	N	0.00%	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	3.97E-01	5.70E-06	1.09E-03	5.70E-06
271		Boiler 5 Fab 4-1 NG	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	4.31E-02	6.20E-07	1.18E-04	6.20E-07
272		Boiler 5 Fab 4-1 NG	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	3.28E-02	4.71E-07	8.98E-05	4.71E-07
273		Boiler 5 Fab 4-1 NG	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	2.24E-02	3.22E-07	6.14E-05	3.22E-07
274		Boiler 5 Fab 4-1 NG	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	1.42E-01	2.05E-06	3.90E-04	2.05E-06
275		Boiler 5 Fab 4-1 NG	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	1.81E-01	2.60E-06	4.96E-04	2.60E-06
276		Boiler 5 Fab 4-1 NG	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	2.07E-03	2.98E-08	5.67E-06	2.98E-08
277		Boiler 5 Fab 4-1 NG	108-88-3	Toluene	N	0.00%	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.28E+00	3.29E-05	6.26E-03	3.29E-05
278		Boiler 5 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	1.98E-01	2.85E-06	5.43E-04	2.85E-06
279		Boiler 5 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	1.70E+00	2.44E-05	4.65E-03	2.44E-05
280		Boiler 5 Fab 4-1 NG	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	2.50E+00	3.60E-05	6.85E-03	3.60E-05
281		Boiler 1 Fab 4-2 NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	1.46E+00	2.10E-05	4.00E-03	2.10E-05
282		Boiler 1 Fab 4-2 NG	50-00-0	Formaldehyde	N	0.00%	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	3.09E+00	4.45E-05	8.48E-03	4.45E-05
283		Boiler 1 Fab 4-2 NG	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	2.52E-02	3.62E-07	6.89E-05	3.62E-07
284		Boiler 1 Fab 4-2 NG	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	3.02E-04	4.34E-09	8.27E-07	4.34E-09
285		Boiler 1 Fab 4-2 NG	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	7.55E-02	1.09E-06	2.07E-04	1.09E-06
286		Boiler 1 Fab 4-2 NG	75-07-0	Acetaldehyde	N	0.00%	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	7.80E-01	1.12E-05	2.14E-03	1.12E-05
287		Boiler 1 Fab 4-2 NG	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	6.79E-01	9.77E-06	1.86E-03	9.77E-06
288		Boiler 1 Fab 4-2 NG	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	8.05E+02	1.16E-02	2.21E+00	1.16E-02
289		Boiler 1 Fab 4-2 NG	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	5.03E-02	7.24E-07	1.38E-04	7.24E-07
290		Boiler 1 Fab 4-2 NG	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	1.11E+00	1.59E-05	3.03E-03	1.59E-05
291		Boiler 1 Fab 4-2 NG	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	3.02E-03	4.34E-08	8.27E-06	4.34E-08
292		Boiler 1 Fab 4-2 NG	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	2.77E-01	3.98E-06	7.58E-04	3.98E-06
293		Boiler 1 Fab 4-2 NG	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	3.52E-01	5.07E-06	9.65E-04	5.07E-06
294		Boiler 1 Fab 4-2 NG	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	2.11E-02	3.04E-07	5.79E-05	3.04E-07
295		Boiler 1 Fab 4-2 NG	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	2.14E-01	3.08E-06	5.86E-04	3.08E-06
296		Boiler 1 Fab 4-2 NG	100-41-4	Ethyl benzene	N	0.00%	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	1.74E+00	2.50E-05	4.76E-03	2.50E-05
297		Boiler 1 Fab 4-2 NG	110-54-3	Hexane	N	0.00%	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	1.16E+00	1.66E-05	3.17E-03	1.66E-05
298		Boiler 1 Fab 4-2 NG	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	1.26E-01	1.81E-06	3.45E-04	1.81E-06
299		Boiler 1 Fab 4-2 NG	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	9.56E-02	1.37E-06	2.62E-04	1.37E-06
300		Boiler 1 Fab 4-2 NG	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	6.54E-02	9.41E-07	1.79E-04	9.41E-07

301		Boiler 1 Fab 4-2 NG	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	4.15E-01	5.97E-06	1.14E-03	5.97E-06
302		Boiler 1 Fab 4-2 NG	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	5.28E-01	7.60E-06	1.45E-03	7.60E-06
303		Boiler 1 Fab 4-2 NG	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	6.04E-03	8.68E-08	1.65E-05	8.68E-08
304		Boiler 1 Fab 4-2 NG	108-88-3	Toluene	N	0.00%	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	6.67E+00	9.59E-05	1.83E-02	9.59E-05
305		Boiler 1 Fab 4-2 NG	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	5.79E-01	8.32E-06	1.59E-03	8.32E-06
306		Boiler 1 Fab 4-2 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	4.96E+00	7.13E-05	1.36E-02	7.13E-05
307		Boiler 1 Fab 4-2 NG	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	7.30E+00	1.05E-04	2.00E-02	1.05E-04
308		Boiler 2 Fab 4-2 NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	1.46E+00	2.10E-05	4.00E-03	2.10E-05
309		Boiler 2 Fab 4-2 NG	50-00-0	Formaldehyde	N	0.00%	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	3.09E+00	4.45E-05	8.48E-03	4.45E-05
310		Boiler 2 Fab 4-2 NG	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	2.52E-02	3.62E-07	6.89E-05	3.62E-07
311		Boiler 2 Fab 4-2 NG	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	3.02E-04	4.34E-09	8.27E-07	4.34E-09
312		Boiler 2 Fab 4-2 NG	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	7.55E-02	1.09E-06	2.07E-04	1.09E-06
313		Boiler 2 Fab 4-2 NG	75-07-0	Acetaldehyde	N	0.00%	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	7.80E-01	1.12E-05	2.14E-03	1.12E-05
314		Boiler 2 Fab 4-2 NG	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	6.79E-01	9.77E-06	1.86E-03	9.77E-06
315		Boiler 2 Fab 4-2 NG	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	8.05E+02	1.16E-02	2.21E+00	1.16E-02
316		Boiler 2 Fab 4-2 NG	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	5.03E-02	7.24E-07	1.38E-04	7.24E-07
317		Boiler 2 Fab 4-2 NG	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	1.11E+00	1.59E-05	3.03E-03	1.59E-05
318		Boiler 2 Fab 4-2 NG	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	3.02E-03	4.34E-08	8.27E-06	4.34E-08
319		Boiler 2 Fab 4-2 NG	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	2.77E-01	3.98E-06	7.58E-04	3.98E-06
320		Boiler 2 Fab 4-2 NG	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	3.52E-01	5.07E-06	9.65E-04	5.07E-06
321		Boiler 2 Fab 4-2 NG	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	2.11E-02	3.04E-07	5.79E-05	3.04E-07
322		Boiler 2 Fab 4-2 NG	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	2.14E-01	3.08E-06	5.86E-04	3.08E-06
323		Boiler 2 Fab 4-2 NG	100-41-4	Ethyl benzene	N	0.00%	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	1.74E+00	2.50E-05	4.76E-03	2.50E-05
324		Boiler 2 Fab 4-2 NG	110-54-3	Hexane	N	0.00%	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	1.16E+00	1.66E-05	3.17E-03	1.66E-05
325		Boiler 2 Fab 4-2 NG	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	1.26E-01	1.81E-06	3.45E-04	1.81E-06
326		Boiler 2 Fab 4-2 NG	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	9.56E-02	1.37E-06	2.62E-04	1.37E-06
327		Boiler 2 Fab 4-2 NG	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	6.54E-02	9.41E-07	1.79E-04	9.41E-07
328		Boiler 2 Fab 4-2 NG	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	4.15E-01	5.97E-06	1.14E-03	5.97E-06
329		Boiler 2 Fab 4-2 NG	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	5.28E-01	7.60E-06	1.45E-03	7.60E-06
330		Boiler 2 Fab 4-2 NG	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	6.04E-03	8.68E-08	1.65E-05	8.68E-08
331		Boiler 2 Fab 4-2 NG	108-88-3	Toluene	N	0.00%	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	6.67E+00	9.59E-05	1.83E-02	9.59E-05
332		Boiler 2 Fab 4-2 NG	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	5.79E-01	8.32E-06	1.59E-03	8.32E-06
333		Boiler 2 Fab 4-2 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	4.96E+00	7.13E-05	1.36E-02	7.13E-05
334		Boiler 2 Fab 4-2 NG	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	7.30E+00	1.05E-04	2.00E-02	1.05E-04
335		Boiler 3 Fab 4-2 NG	71-43-2	Benzene	N	0.00%	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	1.46E+00	2.10E-05	4.00E-03	2.10E-05
336		Boiler 3 Fab 4-2 NG	50-00-0	Formaldehyde	N	0.00%	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	3.09E+00	4.45E-05	8.48E-03	4.45E-05
337		Boiler 3 Fab 4-2 NG	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	2.52E-02	3.62E-07	6.89E-05	3.62E-07
338		Boiler 3 Fab 4-2 NG	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	3.02E-04	4.34E-09	8.27E-07	4.34E-09
339		Boiler 3 Fab 4-2 NG	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	7.55E-02	1.09E-06	2.07E-04	1.09E-06
340		Boiler 3 Fab 4-2 NG	75-07-0	Acetaldehyde	N	0.00%	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	7.80E-01	1.12E-05	2.14E-03	1.12E-05
341		Boiler 3 Fab 4-2 NG	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	6.79E-01	9.77E-06	1.86E-03	9.77E-06
342		Boiler 3 Fab 4-2 NG	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	8.05E+02	1.16E-02	2.21E+00	1.16E-02
343		Boiler 3 Fab 4-2 NG	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	5.03E-02	7.24E-07	1.38E-04	7.24E-07
344		Boiler 3 Fab 4-2 NG	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	1.11E+00	1.59E-05	3.03E-03	1.59E-05
345		Boiler 3 Fab 4-2 NG	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	3.02E-03	4.34E-08	8.27E-06	4.34E-08
346		Boiler 3 Fab 4-2 NG	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	2.77E-01	3.98E-06	7.58E-04	3.98E-06
347		Boiler 3 Fab 4-2 NG	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	3.52E-01	5.07E-06	9.65E-04	5.07E-06
348		Boiler 3 Fab 4-2 NG	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	2.11E-02	3.04E-07	5.79E-05	3.04E-07
349		Boiler 3 Fab 4-2 NG	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	2.14E-01	3.08E-06	5.86E-04	3.08E-06
350		Boiler 3 Fab 4-2 NG	100-41-4	Ethyl benzene	N	0.00%	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	1.74E+00	2.50E-05	4.76E-03	2.50E-05

351		Boiler 3 Fab 4-2 NG	110-54-3	Hexane	N	0.00%	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	1.16E+00	1.66E-05	3.17E-03	1.66E-05
352		Boiler 3 Fab 4-2 NG	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	1.26E-01	1.81E-06	3.45E-04	1.81E-06
353		Boiler 3 Fab 4-2 NG	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	9.56E-02	1.37E-06	2.62E-04	1.37E-06
354		Boiler 3 Fab 4-2 NG	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	6.54E-02	9.41E-07	1.79E-04	9.41E-07
355		Boiler 3 Fab 4-2 NG	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	4.15E-01	5.97E-06	1.14E-03	5.97E-06
356		Boiler 3 Fab 4-2 NG	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	5.28E-01	7.60E-06	1.45E-03	7.60E-06
357		Boiler 3 Fab 4-2 NG	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	6.04E-03	8.68E-08	1.65E-05	8.68E-08
358		Boiler 3 Fab 4-2 NG	108-88-3	Toluene	N	0.00%	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	6.67E+00	9.59E-05	1.83E-02	9.59E-05
359		Boiler 3 Fab 4-2 NG	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	5.79E-01	8.32E-06	1.59E-03	8.32E-06
360		Boiler 3 Fab 4-2 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	4.96E+00	7.13E-05	1.36E-02	7.13E-05
361		Boiler 3 Fab 4-2 NG	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	7.30E+00	1.05E-04	2.00E-02	1.05E-04
362		Boiler 1 Fab 4-1 Diesel	106-99-0	1,3-Butadiene	N	0.00%	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	3.26E-02	4.69E-07	1.09E-02	5.70E-05
363		Boiler 1 Fab 4-1 Diesel	75-07-0	Acetaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
364		Boiler 1 Fab 4-1 Diesel	107-02-8	Acrolein	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
365		Boiler 1 Fab 4-1 Diesel	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.76E+00	2.53E-05	5.87E-01	3.08E-03
366		Boiler 1 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	3.52E-03	5.07E-08	1.17E-03	6.17E-06
367		Boiler 1 Fab 4-1 Diesel	71-43-2	Benzene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	9.69E-03	1.39E-07	3.23E-03	1.70E-05
368		Boiler 1 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	7.75E-05	1.11E-09	2.58E-05	1.36E-07
369		Boiler 1 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	3.30E-03	4.75E-08	1.10E-03	5.78E-06
370		Boiler 1 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	2.20E-04	3.17E-09	7.34E-05	3.85E-07
371		Boiler 1 Fab 4-1 Diesel	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	9.03E-03	1.30E-07	3.01E-03	1.58E-05
372		Boiler 1 Fab 4-1 Diesel	100-41-4	Ethyl benzene	N	0.00%	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	4.40E-04	6.33E-09	1.47E-04	7.71E-07
373		Boiler 1 Fab 4-1 Diesel	50-00-0	Formaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
374		Boiler 1 Fab 4-1 Diesel	110-54-3	Hexane	N	0.00%	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	7.71E-03	1.11E-07	2.57E-03	1.35E-05
375		Boiler 1 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	4.10E-01	5.90E-06	1.37E-01	7.18E-04
376		Boiler 1 Fab 4-1 Diesel	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	1.83E-02	2.63E-07	6.09E-03	3.20E-05
377		Boiler 1 Fab 4-1 Diesel	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	6.83E-03	9.82E-08	2.28E-03	1.19E-05
378		Boiler 1 Fab 4-1 Diesel	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	SCAQMD AB2588 B-2 External	4.40E-03	6.33E-08	1.47E-03	7.71E-06
379		Boiler 1 Fab 4-1 Diesel	91-20-3	Naphthalene	N	0.00%	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	1.17E-02	1.68E-07	3.89E-03	2.04E-05
380		Boiler 1 Fab 4-1 Diesel	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	8.59E-03	1.24E-07	2.86E-03	1.50E-05
381		Boiler 1 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	9.80E-02	1.41E-06	3.27E-02	1.71E-04
382		Boiler 1 Fab 4-1 Diesel	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	4.84E-03	6.97E-08	1.61E-03	8.48E-06
383		Boiler 1 Fab 4-1 Diesel	108-88-3	Toluene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	9.69E-03	1.39E-07	3.23E-03	1.70E-05
384		Boiler 1 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	3.52E-03	5.07E-08	1.17E-03	6.17E-06
385		Boiler 2 Fab 4-1 Diesel	106-99-0	1,3-Butadiene	N	0.00%	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	3.26E-02	4.69E-07	1.09E-02	5.70E-05
386		Boiler 2 Fab 4-1 Diesel	75-07-0	Acetaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
387		Boiler 2 Fab 4-1 Diesel	107-02-8	Acrolein	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
388		Boiler 2 Fab 4-1 Diesel	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.76E+00	2.53E-05	5.87E-01	3.08E-03
389		Boiler 2 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	3.52E-03	5.07E-08	1.17E-03	6.17E-06
390		Boiler 2 Fab 4-1 Diesel	71-43-2	Benzene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	9.69E-03	1.39E-07	3.23E-03	1.70E-05
391		Boiler 2 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	7.75E-05	1.11E-09	2.58E-05	1.36E-07
392		Boiler 2 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	3.30E-03	4.75E-08	1.10E-03	5.78E-06
393		Boiler 2 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	2.20E-04	3.17E-09	7.34E-05	3.85E-07
394		Boiler 2 Fab 4-1 Diesel	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	9.03E-03	1.30E-07	3.01E-03	1.58E-05
395		Boiler 2 Fab 4-1 Diesel	100-41-4	Ethyl benzene	N	0.00%	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	4.40E-04	6.33E-09	1.47E-04	7.71E-07
396		Boiler 2 Fab 4-1 Diesel	50-00-0	Formaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
397		Boiler 2 Fab 4-1 Diesel	110-54-3	Hexane	N	0.00%	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	7.71E-03	1.11E-07	2.57E-03	1.35E-05
398		Boiler 2 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	4.10E-01	5.90E-06	1.37E-01	7.18E-04
399		Boiler 2 Fab 4-1 Diesel	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	1.83E-02	2.63E-07	6.09E-03	3.20E-05
400		Boiler 2 Fab 4-1 Diesel	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	6.83E-03	9.82E-08	2.28E-03	1.19E-05

401		Boiler 2 Fab 4-1 Diesel	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	SCAQMD AB2588 B-2 External	4.40E-03	6.33E-08	1.47E-03	7.71E-06
402		Boiler 2 Fab 4-1 Diesel	91-20-3	Naphthalene	N	0.00%	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	1.17E-02	1.68E-07	3.89E-03	2.04E-05
403		Boiler 2 Fab 4-1 Diesel	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	8.59E-03	1.24E-07	2.86E-03	1.50E-05
404		Boiler 2 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	9.80E-02	1.41E-06	3.27E-02	1.71E-04
405		Boiler 2 Fab 4-1 Diesel	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	4.84E-03	6.97E-08	1.61E-03	8.48E-06
406		Boiler 2 Fab 4-1 Diesel	108-88-3	Toluene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	9.69E-03	1.39E-07	3.23E-03	1.70E-05
407		Boiler 2 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	3.52E-03	5.07E-08	1.17E-03	6.17E-06
408		Boiler 3 Fab 4-1 Diesel	106-99-0	1,3-Butadiene	N	0.00%	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	3.26E-02	4.69E-07	1.09E-02	5.70E-05
409		Boiler 3 Fab 4-1 Diesel	75-07-0	Acetaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
410		Boiler 3 Fab 4-1 Diesel	107-02-8	Acrolein	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
411		Boiler 3 Fab 4-1 Diesel	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.76E+00	2.53E-05	5.87E-01	3.08E-03
412		Boiler 3 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	3.52E-03	5.07E-08	1.17E-03	6.17E-06
413		Boiler 3 Fab 4-1 Diesel	71-43-2	Benzene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	9.69E-03	1.39E-07	3.23E-03	1.70E-05
414		Boiler 3 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	7.75E-05	1.11E-09	2.58E-05	1.36E-07
415		Boiler 3 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	3.30E-03	4.75E-08	1.10E-03	5.78E-06
416		Boiler 3 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	2.20E-04	3.17E-09	7.34E-05	3.85E-07
417		Boiler 3 Fab 4-1 Diesel	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	9.03E-03	1.30E-07	3.01E-03	1.58E-05
418		Boiler 3 Fab 4-1 Diesel	100-41-4	Ethyl benzene	N	0.00%	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	4.40E-04	6.33E-09	1.47E-04	7.71E-07
419		Boiler 3 Fab 4-1 Diesel	50-00-0	Formaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	7.72E-01	1.11E-05	2.57E-01	1.35E-03
420		Boiler 3 Fab 4-1 Diesel	110-54-3	Hexane	N	0.00%	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	7.71E-03	1.11E-07	2.57E-03	1.35E-05
421		Boiler 3 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	4.10E-01	5.90E-06	1.37E-01	7.18E-04
422		Boiler 3 Fab 4-1 Diesel	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	1.83E-02	2.63E-07	6.09E-03	3.20E-05
423		Boiler 3 Fab 4-1 Diesel	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	6.83E-03	9.82E-08	2.28E-03	1.19E-05
424		Boiler 3 Fab 4-1 Diesel	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	SCAQMD AB2588 B-2 External	4.40E-03	6.33E-08	1.47E-03	7.71E-06
425		Boiler 3 Fab 4-1 Diesel	91-20-3	Naphthalene	N	0.00%	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	1.17E-02	1.68E-07	3.89E-03	2.04E-05
426		Boiler 3 Fab 4-1 Diesel	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	8.59E-03	1.24E-07	2.86E-03	1.50E-05
427		Boiler 3 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	9.80E-02	1.41E-06	3.27E-02	1.71E-04
428		Boiler 3 Fab 4-1 Diesel	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	4.84E-03	6.97E-08	1.61E-03	8.48E-06
429		Boiler 3 Fab 4-1 Diesel	108-88-3	Toluene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	9.69E-03	1.39E-07	3.23E-03	1.70E-05
430		Boiler 3 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	3.52E-03	5.07E-08	1.17E-03	6.17E-06
431		Boiler 4 Fab 4-1 Diesel	106-99-0	1,3-Butadiene	N	0.00%	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	2.26E-02	3.25E-07	7.52E-03	3.95E-05
432		Boiler 4 Fab 4-1 Diesel	75-07-0	Acetaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	5.35E-01	7.69E-06	1.78E-01	9.36E-04
433		Boiler 4 Fab 4-1 Diesel	107-02-8	Acrolein	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	5.35E-01	7.69E-06	1.78E-01	9.36E-04
434		Boiler 4 Fab 4-1 Diesel	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.22E+00	1.75E-05	4.07E-01	2.14E-03
435		Boiler 4 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	2.44E-03	3.51E-08	8.13E-04	4.27E-06
436		Boiler 4 Fab 4-1 Diesel	71-43-2	Benzene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	6.71E-03	9.65E-08	2.24E-03	1.17E-05
437		Boiler 4 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	5.37E-05	7.72E-10	1.79E-05	9.40E-08
438		Boiler 4 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	2.29E-03	3.29E-08	7.63E-04	4.00E-06
439		Boiler 4 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	1.53E-04	2.19E-09	5.08E-05	2.67E-07
440		Boiler 4 Fab 4-1 Diesel	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	6.25E-03	8.99E-08	2.08E-03	1.09E-05
441		Boiler 4 Fab 4-1 Diesel	100-41-4	Ethyl benzene	N	0.00%	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	3.05E-04	4.39E-09	1.02E-04	5.34E-07
442		Boiler 4 Fab 4-1 Diesel	50-00-0	Formaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	5.35E-01	7.69E-06	1.78E-01	9.36E-04
443		Boiler 4 Fab 4-1 Diesel	110-54-3	Hexane	N	0.00%	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	5.34E-03	7.68E-08	1.78E-03	9.34E-06
444		Boiler 4 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	2.84E-01	4.09E-06	9.47E-02	4.97E-04
445		Boiler 4 Fab 4-1 Diesel	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	1.27E-02	1.82E-07	4.22E-03	2.22E-05
446		Boiler 4 Fab 4-1 Diesel	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	4.73E-03	6.80E-08	1.58E-03	8.27E-06
447		Boiler 4 Fab 4-1 Diesel	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	SCAQMD AB2588 B-2 External	3.05E-03	4.39E-08	1.02E-03	5.34E-06
448		Boiler 4 Fab 4-1 Diesel	91-20-3	Naphthalene	N	0.00%	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	8.08E-03	1.16E-07	2.69E-03	1.41E-05
449		Boiler 4 Fab 4-1 Diesel	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	5.95E-03	8.56E-08	1.98E-03	1.04E-05
450		Boiler 4 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	6.79E-02	9.76E-07	2.26E-02	1.19E-04

451		Boiler 4 Fab 4-1 Diesel	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	3.36E-03	4.83E-08	1.12E-03	5.87E-06
452		Boiler 4 Fab 4-1 Diesel	108-88-3	Toluene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	6.71E-03	9.65E-08	2.24E-03	1.17E-05
453		Boiler 4 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	2.44E-03	3.51E-08	8.13E-04	4.27E-06
454		Boiler 5 Fab 4-1 Diesel	106-99-0	1,3-Butadiene	N	0.00%	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	2.26E-02	3.25E-07	7.52E-03	3.95E-05
455		Boiler 5 Fab 4-1 Diesel	75-07-0	Acetaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	5.35E-01	7.69E-06	1.78E-01	9.36E-04
456		Boiler 5 Fab 4-1 Diesel	107-02-8	Acrolein	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	5.35E-01	7.69E-06	1.78E-01	9.36E-04
457		Boiler 5 Fab 4-1 Diesel	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.22E+00	1.75E-05	4.07E-01	2.14E-03
458		Boiler 5 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	2.44E-03	3.51E-08	8.13E-04	4.27E-06
459		Boiler 5 Fab 4-1 Diesel	71-43-2	Benzene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	6.71E-03	9.65E-08	2.24E-03	1.17E-05
460		Boiler 5 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	5.37E-05	7.72E-10	1.79E-05	9.40E-08
461		Boiler 5 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	2.29E-03	3.29E-08	7.63E-04	4.00E-06
462		Boiler 5 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	1.53E-04	2.19E-09	5.08E-05	2.67E-07
463		Boiler 5 Fab 4-1 Diesel	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	6.25E-03	8.99E-08	2.08E-03	1.09E-05
464		Boiler 5 Fab 4-1 Diesel	100-41-4	Ethyl benzene	N	0.00%	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	3.05E-04	4.39E-09	1.02E-04	5.34E-07
465		Boiler 5 Fab 4-1 Diesel	50-00-0	Formaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	5.35E-01	7.69E-06	1.78E-01	9.36E-04
466		Boiler 5 Fab 4-1 Diesel	110-54-3	Hexane	N	0.00%	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	5.34E-03	7.68E-08	1.78E-03	9.34E-06
467		Boiler 5 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	2.84E-01	4.09E-06	9.47E-02	4.97E-04
468		Boiler 5 Fab 4-1 Diesel	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	1.27E-02	1.82E-07	4.22E-03	2.22E-05
469		Boiler 5 Fab 4-1 Diesel	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	4.73E-03	6.80E-08	1.58E-03	8.27E-06
470		Boiler 5 Fab 4-1 Diesel	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	SCAQMD AB2588 B-2 External	3.05E-03	4.39E-08	1.02E-03	5.34E-06
471		Boiler 5 Fab 4-1 Diesel	91-20-3	Naphthalene	N	0.00%	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	8.08E-03	1.16E-07	2.69E-03	1.41E-05
472		Boiler 5 Fab 4-1 Diesel	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	5.95E-03	8.56E-08	1.98E-03	1.04E-05
473		Boiler 5 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	6.79E-02	9.76E-07	2.26E-02	1.19E-04
474		Boiler 5 Fab 4-1 Diesel	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	3.36E-03	4.83E-08	1.12E-03	5.87E-06
475		Boiler 5 Fab 4-1 Diesel	108-88-3	Toluene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	6.71E-03	9.65E-08	2.24E-03	1.17E-05
476		Boiler 5 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	2.44E-03	3.51E-08	8.13E-04	4.27E-06
477		Boiler 1 Fab 4-2 Diesel	106-99-0	1,3-Butadiene	N	0.00%	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	7.59E-02	1.09E-06	2.53E-02	1.33E-04
478		Boiler 1 Fab 4-2 Diesel	75-07-0	Acetaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
479		Boiler 1 Fab 4-2 Diesel	107-02-8	Acrolein	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
480		Boiler 1 Fab 4-2 Diesel	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	SCAQMD AB2588 B-2 External	4.10E+00	5.90E-05	1.37E+00	7.18E-03
481		Boiler 1 Fab 4-2 Diesel	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	8.21E-03	1.18E-07	2.74E-03	1.44E-05
482		Boiler 1 Fab 4-2 Diesel	71-43-2	Benzene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	2.26E-02	3.25E-07	7.52E-03	3.95E-05
483		Boiler 1 Fab 4-2 Diesel	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	1.81E-04	2.60E-09	6.02E-05	3.16E-07
484		Boiler 1 Fab 4-2 Diesel	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	7.70E-03	1.11E-07	2.57E-03	1.35E-05
485		Boiler 1 Fab 4-2 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	5.13E-04	7.38E-09	1.71E-04	8.98E-07
486		Boiler 1 Fab 4-2 Diesel	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	2.10E-02	3.03E-07	7.01E-03	3.68E-05
487		Boiler 1 Fab 4-2 Diesel	100-41-4	Ethyl benzene	N	0.00%	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	1.03E-03	1.48E-08	3.42E-04	1.80E-06
488		Boiler 1 Fab 4-2 Diesel	50-00-0	Formaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
489		Boiler 1 Fab 4-2 Diesel	110-54-3	Hexane	N	0.00%	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	1.80E-02	2.58E-07	5.99E-03	3.14E-05
490		Boiler 1 Fab 4-2 Diesel	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	9.56E-01	1.37E-05	3.19E-01	1.67E-03
491		Boiler 1 Fab 4-2 Diesel	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	4.26E-02	6.12E-07	1.42E-02	7.45E-05
492		Boiler 1 Fab 4-2 Diesel	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	1.59E-02	2.29E-07	5.30E-03	2.78E-05
493		Boiler 1 Fab 4-2 Diesel	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	SCAQMD AB2588 B-2 External	1.03E-02	1.48E-07	3.42E-03	1.80E-05
494		Boiler 1 Fab 4-2 Diesel	91-20-3	Naphthalene	N	0.00%	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	2.72E-02	3.91E-07	9.06E-03	4.76E-05
495		Boiler 1 Fab 4-2 Diesel	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	2.00E-02	2.88E-07	6.67E-03	3.50E-05
496		Boiler 1 Fab 4-2 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	2.28E-01	3.28E-06	7.61E-02	4.00E-04
497		Boiler 1 Fab 4-2 Diesel	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	1.13E-02	1.62E-07	3.76E-03	1.98E-05
498		Boiler 1 Fab 4-2 Diesel	108-88-3	Toluene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	2.26E-02	3.25E-07	7.52E-03	3.95E-05
499		Boiler 1 Fab 4-2 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	8.21E-03	1.18E-07	2.74E-03	1.44E-05
500		Boiler 2 Fab 4-2 Diesel	106-99-0	1,3-Butadiene	N	0.00%	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	7.59E-02	1.09E-06	2.53E-02	1.33E-04

501		Boiler 2 Fab 4-2 Diesel	75-07-0	Acetaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
502		Boiler 2 Fab 4-2 Diesel	107-02-8	Acrolein	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
503		Boiler 2 Fab 4-2 Diesel	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	SCAQMD AB2588 B-2 External	4.10E+00	5.90E-05	1.37E+00	7.18E-03
504		Boiler 2 Fab 4-2 Diesel	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	8.21E-03	1.18E-07	2.74E-03	1.44E-05
505		Boiler 2 Fab 4-2 Diesel	71-43-2	Benzene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	2.26E-02	3.25E-07	7.52E-03	3.95E-05
506		Boiler 2 Fab 4-2 Diesel	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	1.81E-04	2.60E-09	6.02E-05	3.16E-07
507		Boiler 2 Fab 4-2 Diesel	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	7.70E-03	1.11E-07	2.57E-03	1.35E-05
508		Boiler 2 Fab 4-2 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	5.13E-04	7.38E-09	1.71E-04	8.98E-07
509		Boiler 2 Fab 4-2 Diesel	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	2.10E-02	3.03E-07	7.01E-03	3.68E-05
510		Boiler 2 Fab 4-2 Diesel	100-41-4	Ethyl benzene	N	0.00%	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	1.03E-03	1.48E-08	3.42E-04	1.80E-06
511		Boiler 2 Fab 4-2 Diesel	50-00-0	Formaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
512		Boiler 2 Fab 4-2 Diesel	110-54-3	Hexane	N	0.00%	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	1.80E-02	2.58E-07	5.99E-03	3.14E-05
513		Boiler 2 Fab 4-2 Diesel	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	9.56E-01	1.37E-05	3.19E-01	1.67E-03
514		Boiler 2 Fab 4-2 Diesel	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	4.26E-02	6.12E-07	1.42E-02	7.45E-05
515		Boiler 2 Fab 4-2 Diesel	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	1.59E-02	2.29E-07	5.30E-03	2.78E-05
516		Boiler 2 Fab 4-2 Diesel	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	SCAQMD AB2588 B-2 External	1.03E-02	1.48E-07	3.42E-03	1.80E-05
517		Boiler 2 Fab 4-2 Diesel	91-20-3	Naphthalene	N	0.00%	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	2.72E-02	3.91E-07	9.06E-03	4.76E-05
518		Boiler 2 Fab 4-2 Diesel	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	2.00E-02	2.88E-07	6.67E-03	3.50E-05
519		Boiler 2 Fab 4-2 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	2.28E-01	3.28E-06	7.61E-02	4.00E-04
520		Boiler 2 Fab 4-2 Diesel	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	1.13E-02	1.62E-07	3.76E-03	1.98E-05
521		Boiler 2 Fab 4-2 Diesel	108-88-3	Toluene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	2.26E-02	3.25E-07	7.52E-03	3.95E-05
522		Boiler 2 Fab 4-2 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	8.21E-03	1.18E-07	2.74E-03	1.44E-05
523		Boiler 3 Fab 4-2 Diesel	106-99-0	1,3-Butadiene	N	0.00%	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	7.59E-02	1.09E-06	2.53E-02	1.33E-04
524		Boiler 3 Fab 4-2 Diesel	75-07-0	Acetaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
525		Boiler 3 Fab 4-2 Diesel	107-02-8	Acrolein	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
526		Boiler 3 Fab 4-2 Diesel	7664-41-7	Ammonia	N	0.00%	0.8	lb/M gal	SCAQMD AB2588 B-2 External	4.10E+00	5.90E-05	1.37E+00	7.18E-03
527		Boiler 3 Fab 4-2 Diesel	7440-38-2	Arsenic and compounds	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	8.21E-03	1.18E-07	2.74E-03	1.44E-05
528		Boiler 3 Fab 4-2 Diesel	71-43-2	Benzene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	2.26E-02	3.25E-07	7.52E-03	3.95E-05
529		Boiler 3 Fab 4-2 Diesel	50-32-8	Benzo[a]pyrene	N	0.00%	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	1.81E-04	2.60E-09	6.02E-05	3.16E-07
530		Boiler 3 Fab 4-2 Diesel	7440-43-9	Cadmium and compounds	N	0.00%	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	7.70E-03	1.11E-07	2.57E-03	1.35E-05
531		Boiler 3 Fab 4-2 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	5.13E-04	7.38E-09	1.71E-04	8.98E-07
532		Boiler 3 Fab 4-2 Diesel	7440-50-8	Copper and compounds	N	0.00%	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	2.10E-02	3.03E-07	7.01E-03	3.68E-05
533		Boiler 3 Fab 4-2 Diesel	100-41-4	Ethyl benzene	N	0.00%	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	1.03E-03	1.48E-08	3.42E-04	1.80E-06
534		Boiler 3 Fab 4-2 Diesel	50-00-0	Formaldehyde	N	0.00%	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.80E+00	2.59E-05	6.00E-01	3.15E-03
535		Boiler 3 Fab 4-2 Diesel	110-54-3	Hexane	N	0.00%	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	1.80E-02	2.58E-07	5.99E-03	3.14E-05
536		Boiler 3 Fab 4-2 Diesel	7647-01-0	Hydrochloric acid	N	0.00%	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	9.56E-01	1.37E-05	3.19E-01	1.67E-03
537		Boiler 3 Fab 4-2 Diesel	7439-92-1	Lead and compounds	N	0.00%	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	4.26E-02	6.12E-07	1.42E-02	7.45E-05
538		Boiler 3 Fab 4-2 Diesel	7439-96-5	Manganese and compounds	N	0.00%	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	1.59E-02	2.29E-07	5.30E-03	2.78E-05
539		Boiler 3 Fab 4-2 Diesel	7439-97-6	Mercury and compounds	N	0.00%	0.002	lb/M gal	SCAQMD AB2588 B-2 External	1.03E-02	1.48E-07	3.42E-03	1.80E-05
540		Boiler 3 Fab 4-2 Diesel	91-20-3	Naphthalene	N	0.00%	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	2.72E-02	3.91E-07	9.06E-03	4.76E-05
541		Boiler 3 Fab 4-2 Diesel	365	Nickel compounds, insoluble	N	0.00%	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	2.00E-02	2.88E-07	6.67E-03	3.50E-05
542		Boiler 3 Fab 4-2 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	2.28E-01	3.28E-06	7.61E-02	4.00E-04
543		Boiler 3 Fab 4-2 Diesel	7782-49-2	Selenium and compounds	N	0.00%	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	1.13E-02	1.62E-07	3.76E-03	1.98E-05
544		Boiler 3 Fab 4-2 Diesel	108-88-3	Toluene	N	0.00%	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	2.26E-02	3.25E-07	7.52E-03	3.95E-05
545		Boiler 3 Fab 4-2 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	8.21E-03	1.18E-07	2.74E-03	1.44E-05
546		RCTO 1 Natural Gas	71-43-2	Benzene	N	0.00%	0.008	lb/MMSCF	CAO NG Ext. Comb. (a)	2.06E-01	2.96E-06	5.65E-04	2.96E-06
547		RCTO 1 Natural Gas	50-00-0	Formaldehyde	N	0.00%	0.017	lb/MMSCF	CAO NG Ext. Comb. (a)	4.38E-01	6.30E-06	1.20E-03	6.30E-06
548		RCTO 1 Natural Gas	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (a)	2.58E-03	3.71E-08	7.06E-06	3.71E-08
549		RCTO 1 Natural Gas	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (a)	7.73E-03	1.11E-07	2.12E-05	1.11E-07
550		RCTO 1 Natural Gas	75-07-0	Acetaldehyde	N	0.00%	0.0043	lb/MMSCF	CAO NG Ext. Comb. (a)	1.11E-01	1.59E-06	3.04E-04	1.59E-06

551		RCTO 1 Natural Gas	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (a)	6.96E-02	1.00E-06	1.91E-04	1.00E-06
552		RCTO 1 Natural Gas	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (a)	8.24E+01	1.19E-03	2.26E-01	1.19E-03
553		RCTO 1 Natural Gas	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (a)	5.15E-03	7.41E-08	1.41E-05	7.41E-08
554		RCTO 1 Natural Gas	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (a)	1.13E-01	1.63E-06	3.11E-04	1.63E-06
555		RCTO 1 Natural Gas	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (a)	3.09E-04	4.45E-09	8.47E-07	4.45E-09
556		RCTO 1 Natural Gas	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (a)	2.83E-02	4.08E-07	7.76E-05	4.08E-07
557		RCTO 1 Natural Gas	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (a)	3.61E-02	5.19E-07	9.88E-05	5.19E-07
558		RCTO 1 Natural Gas	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (a)	2.16E-03	3.11E-08	5.93E-06	3.11E-08
559		RCTO 1 Natural Gas	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (a)	2.19E-02	3.15E-07	6.00E-05	3.15E-07
560		RCTO 1 Natural Gas	100-41-4	Ethyl benzene	N	0.00%	0.0095	lb/MMSCF	CAO NG Ext. Comb. (a)	2.45E-01	3.52E-06	6.71E-04	3.52E-06
561		RCTO 1 Natural Gas	110-54-3	Hexane	N	0.00%	0.0063	lb/MMSCF	CAO NG Ext. Comb. (a)	1.62E-01	2.33E-06	4.45E-04	2.33E-06
562		RCTO 1 Natural Gas	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (a)	1.29E-02	1.85E-07	3.53E-05	1.85E-07
563		RCTO 1 Natural Gas	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (a)	9.79E-03	1.41E-07	2.68E-05	1.41E-07
564		RCTO 1 Natural Gas	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (a)	6.70E-03	9.64E-08	1.84E-05	9.64E-08
565		RCTO 1 Natural Gas	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (a)	4.25E-02	6.11E-07	1.16E-04	6.11E-07
566		RCTO 1 Natural Gas	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (a)	5.41E-02	7.78E-07	1.48E-04	7.78E-07
567		RCTO 1 Natural Gas	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (a)	6.18E-04	8.89E-09	1.69E-06	8.89E-09
568		RCTO 1 Natural Gas	108-88-3	Toluene	N	0.00%	0.0366	lb/MMSCF	CAO NG Ext. Comb. (a)	9.43E-01	1.36E-05	2.58E-03	1.36E-05
569		RCTO 1 Natural Gas	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (a)	5.93E-02	8.52E-07	1.62E-04	8.52E-07
570		RCTO 1 Natural Gas	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0272	lb/MMSCF	CAO NG Ext. Comb. (a)	7.01E-01	1.01E-05	1.92E-03	1.01E-05
571		RCTO 1 Natural Gas	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (a)	7.47E-01	1.07E-05	2.05E-03	1.07E-05
572		RCTO 2 Natural Gas	71-43-2	Benzene	N	0.00%	0.008	lb/MMSCF	CAO NG Ext. Comb. (a)	2.06E-01	2.96E-06	5.65E-04	2.96E-06
573		RCTO 2 Natural Gas	50-00-0	Formaldehyde	N	0.00%	0.017	lb/MMSCF	CAO NG Ext. Comb. (a)	4.38E-01	6.30E-06	1.20E-03	6.30E-06
574		RCTO 2 Natural Gas	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (a)	2.58E-03	3.71E-08	7.06E-06	3.71E-08
575		RCTO 2 Natural Gas	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (a)	7.73E-03	1.11E-07	2.12E-05	1.11E-07
576		RCTO 2 Natural Gas	75-07-0	Acetaldehyde	N	0.00%	0.0043	lb/MMSCF	CAO NG Ext. Comb. (a)	1.11E-01	1.59E-06	3.04E-04	1.59E-06
577		RCTO 2 Natural Gas	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (a)	6.96E-02	1.00E-06	1.91E-04	1.00E-06
578		RCTO 2 Natural Gas	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (a)	8.24E+01	1.19E-03	2.26E-01	1.19E-03
579		RCTO 2 Natural Gas	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (a)	5.15E-03	7.41E-08	1.41E-05	7.41E-08
580		RCTO 2 Natural Gas	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (a)	1.13E-01	1.63E-06	3.11E-04	1.63E-06
581		RCTO 2 Natural Gas	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (a)	3.09E-04	4.45E-09	8.47E-07	4.45E-09
582		RCTO 2 Natural Gas	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (a)	2.83E-02	4.08E-07	7.76E-05	4.08E-07
583		RCTO 2 Natural Gas	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (a)	3.61E-02	5.19E-07	9.88E-05	5.19E-07
584		RCTO 2 Natural Gas	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (a)	2.16E-03	3.11E-08	5.93E-06	3.11E-08
585		RCTO 2 Natural Gas	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (a)	2.19E-02	3.15E-07	6.00E-05	3.15E-07
586		RCTO 2 Natural Gas	100-41-4	Ethyl benzene	N	0.00%	0.0095	lb/MMSCF	CAO NG Ext. Comb. (a)	2.45E-01	3.52E-06	6.71E-04	3.52E-06
587		RCTO 2 Natural Gas	110-54-3	Hexane	N	0.00%	0.0063	lb/MMSCF	CAO NG Ext. Comb. (a)	1.62E-01	2.33E-06	4.45E-04	2.33E-06
588		RCTO 2 Natural Gas	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (a)	1.29E-02	1.85E-07	3.53E-05	1.85E-07
589		RCTO 2 Natural Gas	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (a)	9.79E-03	1.41E-07	2.68E-05	1.41E-07
590		RCTO 2 Natural Gas	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (a)	6.70E-03	9.64E-08	1.84E-05	9.64E-08
591		RCTO 2 Natural Gas	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (a)	4.25E-02	6.11E-07	1.16E-04	6.11E-07
592		RCTO 2 Natural Gas	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (a)	5.41E-02	7.78E-07	1.48E-04	7.78E-07
593		RCTO 2 Natural Gas	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (a)	6.18E-04	8.89E-09	1.69E-06	8.89E-09
594		RCTO 2 Natural Gas	108-88-3	Toluene	N	0.00%	0.0366	lb/MMSCF	CAO NG Ext. Comb. (a)	9.43E-01	1.36E-05	2.58E-03	1.36E-05
595		RCTO 2 Natural Gas	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (a)	5.93E-02	8.52E-07	1.62E-04	8.52E-07
596		RCTO 2 Natural Gas	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0272	lb/MMSCF	CAO NG Ext. Comb. (a)	7.01E-01	1.01E-05	1.92E-03	1.01E-05
597		RCTO 2 Natural Gas	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (a)	7.47E-01	1.07E-05	2.05E-03	1.07E-05
598		RCTO 3 Natural Gas	71-43-2	Benzene	N	0.00%	0.008	lb/MMSCF	CAO NG Ext. Comb. (a)	2.06E-01	2.96E-06	5.65E-04	2.96E-06
599		RCTO 3 Natural Gas	50-00-0	Formaldehyde	N	0.00%	0.017	lb/MMSCF	CAO NG Ext. Comb. (a)	4.38E-01	6.30E-06	1.20E-03	6.30E-06
600		RCTO 3 Natural Gas	401	Polycyclic aromatic hydrocarbons (PAHs)	N	0.00%	0.0001	lb/MMSCF	CAO NG Ext. Comb. (a)	2.58E-03	3.71E-08	7.06E-06	3.71E-08

601		RCTO 3 Natural Gas	91-20-3	Naphthalene	N	0.00%	0.0003	lb/MMSCF	CAO NG Ext. Comb. (a)	7.73E-03	1.11E-07	2.12E-05	1.11E-07
602		RCTO 3 Natural Gas	75-07-0	Acetaldehyde	N	0.00%	0.0043	lb/MMSCF	CAO NG Ext. Comb. (a)	1.11E-01	1.59E-06	3.04E-04	1.59E-06
603		RCTO 3 Natural Gas	107-02-8	Acrolein	N	0.00%	0.0027	lb/MMSCF	CAO NG Ext. Comb. (a)	6.96E-02	1.00E-06	1.91E-04	1.00E-06
604		RCTO 3 Natural Gas	7664-41-7	Ammonia	N	0.00%	3.2	lb/MMSCF	CAO NG Ext. Comb. (a)	8.24E+01	1.19E-03	2.26E-01	1.19E-03
605		RCTO 3 Natural Gas	7440-38-2	Arsenic and compounds	N	0.00%	0.0002	lb/MMSCF	CAO NG Ext. Comb. (a)	5.15E-03	7.41E-08	1.41E-05	7.41E-08
606		RCTO 3 Natural Gas	7440-39-3	Barium and compounds	N	0.00%	0.0044	lb/MMSCF	CAO NG Ext. Comb. (a)	1.13E-01	1.63E-06	3.11E-04	1.63E-06
607		RCTO 3 Natural Gas	7440-41-7	Beryllium and compounds	N	0.00%	0.000012	lb/MMSCF	CAO NG Ext. Comb. (a)	3.09E-04	4.45E-09	8.47E-07	4.45E-09
608		RCTO 3 Natural Gas	7440-43-9	Cadmium and compounds	N	0.00%	0.0011	lb/MMSCF	CAO NG Ext. Comb. (a)	2.83E-02	4.08E-07	7.76E-05	4.08E-07
609		RCTO 3 Natural Gas	18540-29-9	Chromium VI, chromate and dichromate particulate	N	0.00%	0.0014	lb/MMSCF	CAO NG Ext. Comb. (a)	3.61E-02	5.19E-07	9.88E-05	5.19E-07
610		RCTO 3 Natural Gas	7440-48-4	Cobalt and compounds	N	0.00%	0.000084	lb/MMSCF	CAO NG Ext. Comb. (a)	2.16E-03	3.11E-08	5.93E-06	3.11E-08
611		RCTO 3 Natural Gas	7440-50-8	Copper and compounds	N	0.00%	0.00085	lb/MMSCF	CAO NG Ext. Comb. (a)	2.19E-02	3.15E-07	6.00E-05	3.15E-07
612		RCTO 3 Natural Gas	100-41-4	Ethyl benzene	N	0.00%	0.0095	lb/MMSCF	CAO NG Ext. Comb. (a)	2.45E-01	3.52E-06	6.71E-04	3.52E-06
613		RCTO 3 Natural Gas	110-54-3	Hexane	N	0.00%	0.0063	lb/MMSCF	CAO NG Ext. Comb. (a)	1.62E-01	2.33E-06	4.45E-04	2.33E-06
614		RCTO 3 Natural Gas	7439-92-1	Lead and compounds	N	0.00%	0.0005	lb/MMSCF	CAO NG Ext. Comb. (a)	1.29E-02	1.85E-07	3.53E-05	1.85E-07
615		RCTO 3 Natural Gas	7439-96-5	Manganese and compounds	N	0.00%	0.00038	lb/MMSCF	CAO NG Ext. Comb. (a)	9.79E-03	1.41E-07	2.68E-05	1.41E-07
616		RCTO 3 Natural Gas	7439-97-6	Mercury and compounds	N	0.00%	0.00026	lb/MMSCF	CAO NG Ext. Comb. (a)	6.70E-03	9.64E-08	1.84E-05	9.64E-08
617		RCTO 3 Natural Gas	1313-27-5	Molybdenum trioxide	N	0.00%	0.00165	lb/MMSCF	CAO NG Ext. Comb. (a)	4.25E-02	6.11E-07	1.16E-04	6.11E-07
618		RCTO 3 Natural Gas	365	Nickel compounds, insoluble	N	0.00%	0.0021	lb/MMSCF	CAO NG Ext. Comb. (a)	5.41E-02	7.78E-07	1.48E-04	7.78E-07
619		RCTO 3 Natural Gas	7782-49-2	Selenium and compounds	N	0.00%	0.000024	lb/MMSCF	CAO NG Ext. Comb. (a)	6.18E-04	8.89E-09	1.69E-06	8.89E-09
620		RCTO 3 Natural Gas	108-88-3	Toluene	N	0.00%	0.0366	lb/MMSCF	CAO NG Ext. Comb. (a)	9.43E-01	1.36E-05	2.58E-03	1.36E-05
621		RCTO 3 Natural Gas	7440-62-2	Vanadium (fume or dust)	N	0.00%	0.0023	lb/MMSCF	CAO NG Ext. Comb. (a)	5.93E-02	8.52E-07	1.62E-04	8.52E-07
622		RCTO 3 Natural Gas	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene	N	0.00%	0.0272	lb/MMSCF	CAO NG Ext. Comb. (a)	7.01E-01	1.01E-05	1.92E-03	1.01E-05
623		RCTO 3 Natural Gas	7440-66-6	Zinc and compounds	N	0.00%	0.029	lb/MMSCF	CAO NG Ext. Comb. (a)	7.47E-01	1.07E-05	2.05E-03	1.07E-05
624		50:1 BOE Use (NH3 Emissions)	7664-41-7	Ammonia	N	0.00%	0.00126	lb/lb used	Proprietary emission factor	2.70E+02	3.89E-03	7.40E-01	3.89E-03
625		7:1 BOE Use (NH3 Emissions)	7664-41-7	Ammonia	N	0.00%	0.0018392	lb/lb used	Proprietary emission factor	4.09E+01	5.88E-04	1.12E-01	5.88E-04
626		50:1 BOE Use (HF Emissions)	7664-39-3	Hydrofluoric acid	N	60.00%	0.0022593	lb/lb used	Proprietary emission factor	1.93E+02	2.78E-03	5.29E-01	2.78E-03
627		7:1 BOE Use (HF Emissions)	7664-39-3	Hydrofluoric acid	N	60.00%	0.0047108	lb/lb used	Proprietary emission factor	4.19E+01	6.02E-04	1.15E-01	6.02E-04
628		Ammonia Use	7664-41-7	Ammonia	N	0.00%	1	lb/lb used	Proprietary emission factor	1.28E+04	1.84E-01	3.50E+01	1.84E-01
629		Isopropanol - Bottles	67-63-0	Isopropyl alcohol	N	0.00%	1	lb/lb used	Assumes all evaporates	1.25E+04	1.80E-01	3.42E+01	1.80E-01
630		Isopropanol - Process	67-63-0	Isopropyl alcohol	N	90.00%	0.2	lb/lb used	Proprietary emission factor	9.00E+03	1.29E-01	2.47E+01	1.29E-01
631		Isopropanol - Wipe Cleaning	67-63-0	Isopropyl alcohol	N	0.00%	1	lb/lb used	Assumes all evaporates	2.00E+04	2.88E-01	5.48E+01	2.88E-01
632		Nitric Acid Use (Process 1)	7697-37-2	Nitric Acid	N	96.95%	0.4	lb/lb used	Proprietary emission factor	1.62E+03	2.32E-02	4.43E+00	2.32E-02
633		Nitric Acid Use (Process 2)	7697-37-2	Nitric Acid	N	40.00%	0.01	lb/lb used	Proprietary emission factor	1.19E+03	1.71E-02	3.25E+00	1.71E-02
634		Phosphoric Acid Use	7664-38-2	Phosphoric acid	N	40.00%	0.001	lb/lb used	Proprietary emission factor	1.34E+02	1.93E-03	3.67E-01	1.93E-03
635		Silver Nitrate Use	7440-22-4	Silver nitrate	N	0.00%	0.001	lb/lb used	Proprietary emission factor	6.04E-04	8.68E-09	1.65E-06	8.68E-09
636		Sodium Hydroxide Wk Sol'n Use	1310-73-2	Sodium hydroxide	N	0.00%	0.001	lb/lb used	Proprietary emission factor	2.53E-03	3.64E-08	6.93E-06	3.64E-08
637		Sulfuric Acid Use	7664-93-9	Sulfuric acid	N	40.00%	0.001	lb/lb used	Proprietary emission factor	1.38E+03	1.99E-02	3.78E+00	1.99E-02
638		Boron Trichloride Use	7429-90-5	Aluminum and compounds	N	0.00%	0.087	lb/lb used	Proprietary emission factor	1.91E+02	2.75E-03	5.23E-01	2.75E-03
639		Boron Trichloride Use	7647-01-0	Hydrochloric acid	N	96.00%	0.934	lb/lb used	Proprietary emission factor	8.20E+01	1.18E-03	2.25E-01	1.18E-03
640		Silane Use	7631-86-9	Silicon dioxide	N	50.00%	1.87	lb/lb used	Proprietary emission factor	1.75E+04	2.52E-01	4.79E+01	2.52E-01
641		Dichlorosilane	7631-86-9	Silicon dioxide	N	50.00%	0.595	lb/lb used	Proprietary emission factor	1.86E+02	2.68E-03	5.11E-01	2.68E-03
642		Dichlorosilane	7647-01-0	Hydrochloric acid	N	60.00%	0.722	lb/lb used	Proprietary emission factor	1.81E+02	2.60E-03	4.96E-01	2.60E-03
643		Phosphine Use (Process 1)	7803-51-2	Phosphine	N	0.00%	0.05	lb/lb used	Proprietary emission factor	3.35E+00	4.82E-05	9.17E-03	4.82E-05
644		Phosphine Use (Process 2)	7803-51-2	Phosphine	N	0.00%	0.2	lb/lb used	Proprietary emission factor	0.00E+00	0.00E+00	0.00E+00	0.00E+00
645		Phosphine Use (Process 2)	1314-56-3	Phosphorus Pentoxide	N	0.00%	1.67	lb/lb used	Proprietary emission factor	0.00E+00	0.00E+00	0.00E+00	0.00E+00
646		Phosphine Use (Process 3)	7803-51-2	Phosphine	N	0.00%	1	lb/lb used	Proprietary emission factor	6.13E+01	8.82E-04	1.68E-01	8.82E-04
647		HMDS Oxidation in RCTO	7631-86-9	Silicon dioxide	N	0.00%	0.744	lb/lb used	Proprietary emission factor	6.34E+03	9.11E-02	1.74E+01	9.11E-02
648		DEATS Oxidation in RCTO	7631-86-9	Silicon dioxide	N	0.00%	0.413	lb/lb used	Proprietary emission factor	1.77E+01	2.54E-04	4.84E-02	2.54E-04
649		HCl Storage Tank	7647-01-0	Hydrochloric acid	N	0.00%	0.000188	lb/gal used	Proprietary emission factor	3.92E+00	5.63E-05	1.07E-02	5.63E-05
650		Cresols Use	1319-77-3	Cresol	N	90.00%	0.2	lb/lb used	Proprietary emission factor	4.26E+00	6.13E-05	1.17E-02	6.13E-05

651		M-Cresol Use	108-39-4	M-cresol	N	90.00%	0.2	lb/lb used	Proprietary emission factor	1.63E+00	2.35E-05	4.48E-03	2.35E-05
652		1,4-Dioxane Use	123-91-1	1,4-Dioxane	N	90.00%	0.2	lb/lb used	Proprietary emission factor	6.24E+00	8.98E-05	1.71E-02	8.98E-05
653		n-Butyl Alcohol Use	71-36-3	n-Butyl alcohol	N	90.00%	0.2	lb/lb used	Proprietary emission factor	1.52E+00	2.19E-05	4.17E-03	2.19E-05
654		Ethylene Glycol Use	107-21-1	Ethylene glycol	N	0.00%	1	lb/lb used	Assumes all evaporates	1.56E+03	2.25E-02	4.28E+00	2.25E-02
655		Hydrochloric Acid Use	7647-01-0	Hydrochloric acid	N	60.00%	0.05	lb/lb used	Proprietary emission factor	1.58E+03	2.27E-02	4.33E+00	2.27E-02
656		Hydrofluoric Acid Wk Soln Use	7664-39-3	Hydrofluoric acid	N	60.00%	0.05	lb/lb used	Proprietary emission factor	1.98E+02	2.84E-03	5.41E-01	2.84E-03
657		Hydrofluoric Acid 49% Soln Use	7664-39-3	Hydrofluoric acid	N	60.00%	0.05	lb/lb used	Proprietary emission factor	2.19E+03	3.15E-02	6.00E+00	3.15E-02
658		Methanol Use	67-56-1	Methanol	N	0.00%	1	lb/lb used	Assumes all evaporates	1.83E+02	2.63E-03	5.01E-01	2.63E-03
659		Arsine Use	7784-42-1	Arsine	N	0.00%	0.05	lb/lb used	Proprietary emission factor	3.22E+00	4.64E-05	8.83E-03	4.64E-05
660		Chlorine Use	7782-50-5	Chlorine	N	66.33%	1	lb/lb used	Proprietary emission factor	1.01E+03	1.46E-02	2.77E+00	1.46E-02
661		Boron Trifluoride Use	7664-39-3	Hydrofluoric acid	N	96.00%	0.885	lb/lb used	Proprietary emission factor	2.94E+00	4.23E-05	8.05E-03	4.23E-05
662		Difluoromethane Use	7664-39-3	Hydrofluoric acid	N	60.00%	0.533	lb/lb used	Proprietary emission factor	1.96E+02	2.82E-03	5.37E-01	2.82E-03
663		Fluorine Use	7664-39-3	Hydrofluoric acid	N	60.00%	1.05	lb/lb used	Proprietary emission factor	9.22E-01	1.33E-05	2.53E-03	1.33E-05
664		Germanium Tetrafluoride Use	7664-39-3	Hydrofluoric acid	N	60.00%	0.52	lb/lb used	Proprietary emission factor	3.25E+00	4.68E-05	8.91E-03	4.68E-05
665		Hexafluoroethane Use	7664-39-3	Hydrofluoric acid	N	96.00%	0.219	lb/lb used	Proprietary emission factor	8.38E+01	1.21E-03	2.30E-01	1.21E-03
666		Hexafluoroethane Use - HF Byproduct from C2F6 combustion in POU abatement devices	7664-39-3	Hydrofluoric acid	N	96.00%	0.469	lb/lb used	Proprietary emission factor	1.79E+02	2.58E-03	4.92E-01	2.58E-03
667		Hexafluoroethane Use - HF Byproduct from CF4 combustion in POU abatement devices	7664-39-3	Hydrofluoric acid	N	96.00%	0.150	lb/lb used	Proprietary emission factor	5.75E+01	8.28E-04	1.58E-01	8.28E-04
668		Nitrogen Trifluoride Use (Process 1)	7664-39-3	Hydrofluoric acid	N	96.00%	0.566	lb/lb used	Proprietary emission factor	0.00E+00	0.00E+00	0.00E+00	0.00E+00
669		Nitrogen Trifluoride Use (Process 1)	7782-41-4	Fluorine	N	90.00%	0.658	lb/lb used	Proprietary emission factor	0.00E+00	0.00E+00	0.00E+00	0.00E+00
670		Nitrogen Trifluoride Use (Process 1) - HF Byproduct from NF3 combustion in POU abatement devices in process 1	7664-39-3	Hydrofluoric acid	N	96.00%	0.146	lb/lb used	Proprietary emission factor	0.00E+00	0.00E+00	0.00E+00	0.00E+00
671		Nitrogen Trifluoride Use (Process 1) - HF Byproduct from CF4 combustion in POU abatement devices in process 1	7664-39-3	Hydrofluoric acid	N	96.00%	0.111	lb/lb used	Proprietary emission factor	0.00E+00	0.00E+00	0.00E+00	0.00E+00
672		Nitrogen Trifluoride Use (Process 2)	7664-39-3	Hydrofluoric acid	N	95.52%	0.808	lb/lb used	Proprietary emission factor	1.18E+03	1.69E-02	3.23E+00	1.69E-02
673		Nitrogen Trifluoride Use (Process 2)	7782-41-4	Fluorine	N	90.00%	0.789	lb/lb used	Proprietary emission factor	2.57E+03	3.69E-02	7.03E+00	3.69E-02
674		Nitrogen Trifluoride Use (Process 2) - HF Byproduct from NF3 combustion in POU abatement devices in process 2	7664-39-3	Hydrofluoric acid	N	95.52%	0.023	lb/lb used	Proprietary emission factor	3.31E+01	4.77E-04	9.08E-02	4.77E-04
675		Nitrogen Trifluoride Use (Process 2) - HF Byproduct from CF4 combustion in POU abatement devices in process 2	7664-39-3	Hydrofluoric acid	N	95.52%	0.012	lb/lb used	Proprietary emission factor	1.73E+01	2.49E-04	4.74E-02	2.49E-04
676		Octafluorocyclobutane Use	7664-39-3	Hydrofluoric acid	N	60.00%	0.522	lb/lb used	Proprietary emission factor	1.24E+02	1.78E-03	3.40E-01	1.78E-03
677		Octafluorocyclopentene Use	7664-39-3	Hydrofluoric acid	N	60.00%	0.686	lb/lb used	Proprietary emission factor	7.51E+02	1.08E-02	2.06E+00	1.08E-02
678		Octafluoropropane Use	7664-39-3	Hydrofluoric acid	N	96.00%	0.329	lb/lb used	Proprietary emission factor	3.91E+02	5.63E-03	1.07E+00	5.63E-03
679		Octafluoropropane Use - HF Byproduct from C3F8 combustion in POU abatement devices	7664-39-3	Hydrofluoric acid	N	96.00%	0.334	lb/lb used	Proprietary emission factor	3.97E+02	5.71E-03	1.09E+00	5.71E-03
680		Octafluoropropane Use - HF Byproduct from CF4 combustion in POU abatement devices	7664-39-3	Hydrofluoric acid	N	96.00%	0.158	lb/lb used	Proprietary emission factor	1.88E+02	2.71E-03	5.15E-01	2.71E-03
681		Sulfur Hexafluoride Use	7664-39-3	Hydrofluoric acid	N	73.32%	0.155	lb/lb used	Proprietary emission factor	1.29E+02	1.86E-03	3.53E-01	1.86E-03
682		Tetrafluoromethane (CF4) (Process 1)	7664-39-3	Hydrofluoric acid	N	96.00%	0.073	lb/lb used	Proprietary emission factor	0.00E+00	0.00E+00	0.00E+00	0.00E+00
683		Tetrafluoromethane (CF4) (Process 1) - HF Byproduct from CF4 combustion in POU abatement devices	7664-39-3	Hydrofluoric acid	N	96.00%	0.728	lb/lb used	Proprietary emission factor	0.00E+00	0.00E+00	0.00E+00	0.00E+00
684		Tetrafluoromethane (CF4) (Process 2)	7664-39-3	Hydrofluoric acid	N	60.00%	0.132	lb/lb used	Proprietary emission factor	2.55E+03	3.67E-02	6.99E+00	3.67E-02
685		Trifluoromethane	7664-39-3	Hydrofluoric acid	N	63.24%	0.312	lb/lb used	Proprietary emission factor	1.70E+02	2.45E-03	4.67E-01	2.45E-03
686		Tungsten Hexafluoride	7664-39-3	Hydrofluoric acid	N	96.00%	0.403	lb/lb used	Proprietary emission factor	1.05E+02	1.51E-03	2.87E-01	1.51E-03
687		Hydrogen Chloride Gas Use	7647-01-0	Hydrochloric acid	N	60.00%	1	lb/lb used	Assumes all evaporates	4.28E+02	6.16E-03	1.17E+00	6.16E-03
688		Hydrogen Bromide Use	10035-10-6	Hydrogen bromide	N	50.00%	1	lb/lb used	Assumes all evaporates	2.19E+03	3.15E-02	5.99E+00	3.15E-02
689		1-Methoxy-2-propanol (PGME) Use	107-98-2	1-Methoxy-2-propanol (PGME)	N	90.00%	0.2	lb/lb used	Proprietary emission factor	8.71E+03	1.25E-01	2.39E+01	1.25E-01
690		2-(1-Methoxy)propyl acetate (PGMEA) Use	108-65-6	2-(1-Methoxy)propyl acetate (PGMEA)	N	90.00%	0.2	lb/lb used	Proprietary emission factor	4.13E+03	5.94E-02	1.13E+01	5.94E-02
691		3-Amino-1,2,4 Triazole Use	61-82-5	3-Amino-1,2,4 Triazole	N	0.00%	0.05	lb/lb used	Proprietary emission factor	4.52E+00	6.50E-05	1.24E-02	6.50E-05
692		Acetone Use	67-64-1	Acetone	N	0.00%	1	lb/lb used	Assumes all evaporates	3.38E+02	4.86E-03	9.26E-01	4.86E-03
693		Phosphorus Oxychloride Use	7782-50-5	Chlorine	N	50.00%	0.694	lb/lb used	Proprietary emission factor	1.32E+02	1.90E-03	3.62E-01	1.90E-03
694		Phosphorus Oxychloride Use	1314-56-3	Phosphorus Pentoxide	N	0.00%	0.463	lb/lb used	Proprietary emission factor	1.77E+02	2.54E-03	4.84E-01	2.54E-03
695		Pyrocatechol Use	120-80-9	Pyrocatechol	N	90.00%	0.2	lb/lb used	Proprietary emission factor	2.09E+02	3.00E-03	5.71E-01	3.00E-03
696		Silicon Dioxide Use	7631-86-9	Silicon dioxide	N	0.00%	0.001	lb/lb used	Proprietary emission factor	3.81E+02	5.48E-03	1.04E+00	5.48E-03
697		Silicon Tetrafluoride Use	7631-86-9	Silicon dioxide	N	50.00%	0.577	lb/lb used	Proprietary emission factor	1.15E+01	1.66E-04	3.16E-02	1.66E-04
698		Silicon Tetrafluoride Use	7664-39-3	Hydrofluoric acid	N	96.00%	0.769	lb/lb used	Proprietary emission factor	1.23E+00	1.77E-05	3.37E-03	1.77E-05
699		Fluorides	239	Fluorides	N	0.00%	0.583	lb/lb HF emitted	Source Test	5.36E+03	7.70E-02	1.47E+01	7.70E-02
700		Ammonium Hydroxide Use	7664-41-7	Ammonia	N	0.00%	0.5	lb/lb used	Proprietary emission factor	4.94E+04	7.11E-01	1.35E+02	7.11E-01

701		Aluminum Use Target/Anode Usage	7429-90-5	Aluminum	N	0.00%	0.001	lb/lb used	Proprietary emission factor	5.69E+00	8.19E-05	1.56E-02	8.19E-05
702		Cadmium Use Target/Anode Usage	7440-43-9	Cadmium	N	0.00%	0.001	lb/lb used	Proprietary emission factor	2.11E-05	3.04E-10	5.79E-08	3.04E-10
703		Chlorine Use Target/Anode Usage	7782-50-5	Chlorine	N	0.00%	1	lb/lb used	Proprietary emission factor	2.16E-02	3.11E-07	5.93E-05	3.11E-07
704		Copper Use Target/Anode Usage	7440-50-8	Copper	N	0.00%	0.001	lb/lb used	Proprietary emission factor	1.78E+02	2.55E-03	4.86E-01	2.55E-03
705		Manganese Use Target/Anode Usage	7439-96-5	Manganese	N	0.00%	0.001	lb/lb used	Proprietary emission factor	2.16E-05	3.11E-10	5.93E-08	3.11E-10
706		Nickel Use Target/Anode Usage	365	Nickel	N	0.00%	0.001	lb/lb used	Proprietary emission factor	1.93E-04	2.78E-09	5.30E-07	2.78E-09
707		Lead Use Target/Anode Usage	7439-92-1	Lead	N	0.00%	0.001	lb/lb used	Proprietary emission factor	1.15E-03	1.65E-08	3.15E-06	1.65E-08
708		Vanadium Use Target/Anode Usage	7440-62-2	Vanadium	N	0.00%	0.001	lb/lb used	Proprietary emission factor	4.33E-05	6.22E-10	1.19E-07	6.22E-10
709		Antimony Use Target/Anode Usage	7440-36-0	Antimony	N	0.00%	0.001	lb/lb used	Proprietary emission factor	1.98E-03	2.85E-08	5.43E-06	2.85E-08
710		Cobalt Use Target/Anode Usage	7440-48-4	Cobalt	N	0.00%	0.001	lb/lb used	Proprietary emission factor	5.66E-01	8.15E-06	1.55E-03	8.15E-06
711		Arsenic Use Target/Anode Usage	7440-38-2	Arsenic	N	0.00%	0.001	lb/lb used	Proprietary emission factor	5.56E-05	8.00E-10	1.52E-07	8.00E-10
712		Uranium Use Target/Anode Usage	7440-61-1	Uranium	N	0.00%	0.001	lb/lb used	Proprietary emission factor	1.84E-08	2.65E-13	5.04E-11	2.65E-13
713		TMPI Use	67-56-1	Methanol	N	0.00%	0.194	lb/lb used	Proprietary emission factor	6.34E+01	9.12E-04	1.74E-01	9.12E-04
714		TMPI Use	1314-56-3	Phosphorus Pentoxide	N	0.00%	0.57	lb/lb used	Proprietary emission factor	1.86E+02	2.68E-03	5.11E-01	2.68E-03
715		pH 7 Buffer solution-Yellow 4L	1310-73-2	Sodium Hydroxide	N	0.00%	0.001	lb/lb used	Proprietary emission factor	1.59E-01	2.28E-06	4.34E-04	2.28E-06
716		pH 10 Buffer solution-Blue 4L	1310-73-2	Sodium Hydroxide	N	0.00%	0.001	lb/lb used	Proprietary emission factor	1.59E-01	2.28E-06	4.34E-04	2.28E-06