A	B
1		AQ520 Form - Version 2.0
2		Revised 6/5/2025
3		AQ520 Form Instructions
4
5	Facility Information
6	Facility Name	Microchip Technology Incorporated, Gresham Fab 4
7	Facility Street Address	21015 SE Stark Street
8	City	Gresham
9	Zip Code	97030
10	Source Number	26-3240
11	Facility Contact	Oteri Oghoghomeh
12	Contact Phone Number	(609) 247-0821
13	Contact Email	Oteri.Oghoghomeh@microchip.com
14	Date of Form Submittal	12/18/205
15	Facility Notes	See attached cover letter accompanying this electronic submital.

	A	B	C	D	E	F	G	H	I	J	K	L	M	N
1	AQ520 Form - Version 2.0
2	Microchip Technology Incorporated, Gresham Fab 4
3	Source No. 26-3240
4	Submitted on 12/18/205
6	Toxics Emissions Unit (TEU) Information				Emissions Release Information		Activity Information
7	Toxics Emissions Unit (TEU) ID	Toxics Emissions Sub-Unit (TESU) ID	TEU/TESU Description	Control Device(s)	Emission Type (Point or Fugitive)	Stack or Fugitive ID	Activity Units	Description/Type	Annual [units/year]			Max Daily [units/day]
8									Actual	Requested PTE	Is Requested PTE Capacity?	Actual	Requested PTE	Is Requested PTE Capacity?
9	Emergency Generators	Emergency Generator 1	Bldg 1, 1,456 hp, 1988 install	None	Point	EGEN1	Mgal	Diesel	0.77064	1.7784	Yes	0.06422	0.47424	Yes
10	Emergency Generators	Emergency Generator 2	Bldg 1, 1,456 hp, 1988 install	None	Point	EGEN2	Mgal	Diesel	0.47424	1.7784	Yes	0.03952	0.47424	Yes
11	Emergency Generators	Emergency Generator 3	Bldg 2, 1,582 hp, 1996 install	None	Point	EGEN3	Mgal	Diesel	1.37677	2.2326	Yes	0.11473083	0.59536	Yes
12	Emergency Generators	Emergency Generator 4	Bldg 2, 1,582 hp, 1996 install	None	Point	EGEN4	Mgal	Diesel	1.160952	2.2326	Yes	0.096746	0.59536	Yes
13	Emergency Generators	Emergency Generator 5	Bldg 2, 1,582 hp, 1996 install	None	Point	EGEN5	Mgal	Diesel	1.108858	2.2326	Yes	0.09240483	0.59536	Yes
14	Fire Pump	Fire pump	Fire pump	None	Point	FIRE	Mgal	Diesel	0.18265	0.195	Yes	0.01522083	0.052	Yes
15	Boilers	Boiler 1 Fab 4-1 NG	Natural gas (primary fuel type)	None	Point	BOIL411	MMscf	Natural Gas	18.013	107.91117647	Yes	0.04935068	0.29564706	Yes
16	Boilers	Boiler 2 Fab 4-1 NG	Natural gas (primary fuel type)	None	Point	BOIL412	MMscf	Natural Gas	18.1217	107.91117647	Yes	0.04964849	0.29564706	Yes
17	Boilers	Boiler 3 Fab 4-1 NG	Natural gas (primary fuel type)	None	Point	BOIL413	MMscf	Natural Gas	15.4159	107.91117647	Yes	0.04223534	0.29564706	Yes
18	Boilers	Boiler 4 Fab 4-1 NG	Natural gas (primary fuel type)	None	Point	BOIL414	MMscf	Natural Gas	11.324748	86.22588235	Yes	0.03102671	0.23623529	Yes
19	Boilers	Boiler 5 Fab 4-1 NG	Natural gas (primary fuel type)	None	Point	BOIL415	MMscf	Natural Gas	16.263583	86.22588235	Yes	0.04455776	0.23623529	Yes
20	Boilers	Boiler 1 Fab 4-2 NG	Natural gas (primary fuel type)	None	Point	BOIL421	MMscf	Natural Gas	33.1142	251.558	Yes	0.09072384	0.6892	Yes
21	Boilers	Boiler 2 Fab 4-2 NG	Natural gas (primary fuel type)	None	Point	BOIL422	MMscf	Natural Gas	43.6664	251.558	Yes	0.11963397	0.6892	Yes
22	Boilers	Boiler 3 Fab 4-2 NG	Natural gas (primary fuel type)	None	Point	BOIL423	MMscf	Natural Gas	38.5469	251.558	Yes	0.10560795	0.6892	Yes
23	Boilers	Boiler 1 Fab 4-1 Diesel	Diesel dual fire mode	None	Point	BOIL411	Mgal	Diesel	0	2.202	Yes	0	0.734	Yes
24	Boilers	Boiler 2 Fab 4-1 Diesel	Diesel dual fire mode	None	Point	BOIL412	Mgal	Diesel	0	2.202	Yes	0	0.734	Yes
25	Boilers	Boiler 3 Fab 4-1 Diesel	Diesel dual fire mode	None	Point	BOIL413	Mgal	Diesel	0	2.202	Yes	0	0.734	Yes
26	Boilers	Boiler 1 Fab 4-2 Diesel	Diesel dual fire mode	None	Point	BOIL414	Mgal	Diesel	0	5.13048	Yes	0	1.71016	Yes
27	Boilers	Boiler 2 Fab 4-2 Diesel	Diesel dual fire mode	None	Point	BOIL415	Mgal	Diesel	0	5.13048	Yes	0	1.71016	Yes
28	Boilers	Boiler 3 Fab 4-2 Diesel	Diesel dual fire mode	None	Point	BOIL421	Mgal	Diesel	0	5.13048	Yes	0	1.71016	Yes
29	Boilers	Boiler 4 Fab 4-1 Diesel	Diesel dual fire mode	None	Point	BOIL422	Mgal	Diesel	0	1.5252	Yes	0	0.5084	Yes
30	Boilers	Boiler 5 Fab 4-1 Diesel	Diesel dual fire mode	None	Point	BOIL423	Mgal	Diesel	0	1.5252	Yes	0	0.5084	Yes
31	RCTOs	RCTO 1 Natural Gas	Natural gas	None	Point	RCTO1	MMscf	Natural Gas	20.381281	25.76470588	Yes	0.05583913	0.07058824	Yes
32	RCTOs	RCTO 2 Natural Gas	Natural gas	None	Point	RCTO2	MMscf	Natural Gas	0	25.76470588	Yes	0	0.07058824	Yes
33	RCTOs	RCTO 3 Natural Gas	Natural gas	None	Point	RCTO3	MMscf	Natural Gas	0	25.76470588	Yes	0	0.07058824	Yes
34	Semiconductor Fab	50:1 BOE Use (NH3 Emissions)	Buffered Oxide Etchant (50:1)	Wet Scrubber	Point	S-4, S-12	lbs	Material Used - Liquid Chemical	59411.72	213616.48288221	Yes	162.77183562	585.25063803	Yes
35	Semiconductor Fab	7:1 BOE Use (NH3 Emissions)	Buffered Oxide Etchant (7:1)	Wet Scrubber	Point	S-4, S-12	lbs	Material Used - Liquid Chemical	12142.32	22214.39	Yes	33.26663014	60.86134247	Yes
36	Semiconductor Fab	50:1 BOE Use (HF Emissions)	Buffered Oxide Etchant (50:1)	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	59411.72	213616.48288221	Yes	162.77183562	585.25063803	Yes
37	Semiconductor Fab	7:1 BOE Use (HF Emissions)	Buffered Oxide Etchant (7:1)	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	12142.32	22214.39	Yes	33.26663014	60.86134247	Yes
38	Semiconductor Fab	Ammonia Use	CVD / Diffusion	Wet Scrubber	Point	S-4, S-12	lbs	Material Used - Gaseous Chemical	5768.4	12777.82514888	Yes	15.80383562	35.00774013	Yes
39	Semiconductor Fab	Isopropanol - Bottles	Cleaning	None	Fugitive	Semiconductor Fab	lbs	Material Used - Liquid Chemical	2161.08	12500	Yes	5.92076712	34.24657534	Yes
40	Semiconductor Fab	Isopropanol - Process	Process Use	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	224255.16	450000	Yes	614.39769863	1232.87671233	Yes
41	Semiconductor Fab	Isopropanol - Wipe Cleaning	Wipe cleaning only	None	Fugitive	Semiconductor Fab	lbs	Material Used - Liquid Chemical	8093.78	20000	Yes	22.17473973	54.79452055	Yes
42	Semiconductor Fab	Nitric Acid Use (Process 1)	Heated wet etch	Wet Scrubber	Point	S-10	lbs	Material Used - Liquid Chemical	50401.4	132420.12467813	Yes	138.0860274	362.79486213	Yes
43	Semiconductor Fab	Nitric Acid Use (Process 2)	Un-heated wet etch	Wet Scrubber	Point	S-10	lbs	Material Used - Liquid Chemical	94517.496	197626.72007753	Yes	258.95204384	541.44306871	Yes
44	Semiconductor Fab	Phosphoric Acid Use	Wet etch baths	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	96172.9056	223309.33760738	Yes	263.4874126	611.8064044	Yes
45	Semiconductor Fab	Silver Nitrate Use	Lab reagent	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	0.5346	0.60370329	Yes	0.00146466	0.00165398	Yes
46	Semiconductor Fab	Sodium Hydroxide Wk Sol'n Use	Lab reagent	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	0.972	2.52844475	Yes	0.00266301	0.00692725	Yes
47	Semiconductor Fab	Sulfuric Acid Use	Misc processes/facilities	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Facilities	1048994.58	2302220.50483274	Yes	2873.95775342	6307.4534379	Yes
48	Semiconductor Fab	Boron Trichloride Use	Etch	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	990	2195.86417503	Yes	2.71232877	6.01606623	Yes
49	Semiconductor Fab	Silane Use	CVD	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	5530.14	18704.23860103	Yes	15.15106849	51.24448932	Yes
50	Semiconductor Fab	Dichlorosilane	CVD	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	300	626.36397375	Yes	0.82191781	1.71606568	Yes
51	Semiconductor Fab	Phosphine Use (Process 1)	Ion Implant	none	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	3.4	66.95606666	Yes	0.00931507	0.18344128	Yes

52	Semiconductor Fab	Phosphine Use (Process 2)	Atmospheric CVD	none	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	14.28	0	Yes	0.03912329	0	Yes
53	Semiconductor Fab	Phosphine Use (Process 3)	Non-atmospheric CVD	none	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	14.28	61.3203657	Yes	0.03912329	0.168001	Yes
54	Semiconductor Fab	HMDS Oxidation in RCTO	Photolithography	none	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	3510.11125	8516.80051575	Yes	9.61674315	23.33370004	Yes
55	Semiconductor Fab	DEATS Oxidation in RCTO	Photolithography	none	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	17.63875	42.79799254	Yes	0.04832534	0.11725477	Yes
56	Semiconductor Fab	HCl Storage Tank	Facilities	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	gallons	Material Used - Facilities	4946.28359819	20826.4862969	Yes	13.55146191	57.05886657	Yes
57	Semiconductor Fab	Cresols Use	Organic Liquid for Photo or Cleaning	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	97.2007	213.10814323	Yes	0.26630329	0.58385793	Yes
58	Semiconductor Fab	M-Cresol Use	Organic Liquid for Photo or Cleaning	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	43.254	81.71265442	Yes	0.11850411	0.22387029	Yes
59	Semiconductor Fab	1,4-Dioxane Use	Organic Liquid for Photo or Cleaning	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	93.75112	312.09517048	Yes	0.25685238	0.85505526	Yes
60	Semiconductor Fab	n-Butyl Alcohol Use	Organic Liquid for Photo or Cleaning	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	16.4673	76.06395033	Yes	0.04511589	0.20839438	Yes
61	Semiconductor Fab	Ethylene Glycol Use	Organic Liquid for Photo or Cleaning	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	504.01725	1563.80833333	Yes	1.38086918	4.28440639	Yes
62	Semiconductor Fab	Hydrochloric Acid Use	Wet etch baths	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	26136.4708	78976.52468412	Yes	71.60676932	216.37404023	Yes
63	Semiconductor Fab	Hydrofluoric Acid Wk Soln Use	Wet etch baths	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	4725.8748	9881.33600388	Yes	12.94760219	27.07215344	Yes
64	Semiconductor Fab	Hydrofluoric Acid 49% Soln Use	Wet etch baths	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	45603.712	109570.1838	Yes	124.94167671	300.19228438	Yes
65	Semiconductor Fab	Methanol Use	Photolithography	None	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	53.5304	182.78346349	Yes	0.14665863	0.50077661	Yes
66	Semiconductor Fab	Arsine Use	Ion Implant	none	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	3.68	64.4780818	Yes	0.01008219	0.17665228	Yes
67	Semiconductor Fab	Chlorine Use	Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	1200	3007.80303726	Yes	3.28767123	8.24055627	Yes
68	Semiconductor Fab	Boron Trifluoride Use	Ion Implant	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	16.06	82.99629474	Yes	0.044	0.22738711	Yes
69	Semiconductor Fab	Difluoromethane Use	Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	0	919.58804659	Yes	0	2.51941931	Yes
70	Semiconductor Fab	Fluorine Use	Photolithography	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	0.76	2.19623715	Yes	0.00208219	0.00601709	Yes
71	Semiconductor Fab	Germanium Tetrafluoride Use	Ion Implant	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	1.16	15.63709238	Yes	0.00317808	0.04284135	Yes
72	Semiconductor Fab	Hexafluoroethane Use	CVD/Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	4900	9566.47165462	Yes	13.42465753	26.20951138	Yes
73	Semiconductor Fab	Hexafluoroethane Use - HF Byproduct from C2F6 combustion in POU abatement devices	CVD/Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	4900	9566.47165462	Yes	13.42465753	26.20951138	Yes
74	Semiconductor Fab	Hexafluoroethane Use - HF Byproduct from CF4 combustion in POU abatement devices	CVD/Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	4900	9566.47165462	Yes	13.42465753	26.20951138	Yes
75	Semiconductor Fab	Nitrogen Trifluoride Use (Process 1)	CVD In-situ Plasma Clean	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	10601.712	0	Yes	29.0457863	0	Yes
76	Semiconductor Fab	Nitrogen Trifluoride Use (Process 1) - HF Byproduct from NF3 combustion in POU abatement devices in process 1	CVD In-situ Plasma Clean	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	10601.712	0	Yes	29.0457863	0	Yes
77	Semiconductor Fab	Nitrogen Trifluoride Use (Process 1) - HF Byproduct from CF4 combustion in POU abatement devices in process 1	CVD In-situ Plasma Clean	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	10601.712	0	Yes	29.0457863	0	Yes
78	Semiconductor Fab	Nitrogen Trifluoride Use (Process 2)	CVD Remote Plasma Clean	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	2202.288	32527.65451391	Yes	6.03366575	89.11686168	Yes
79	Semiconductor Fab	Nitrogen Trifluoride Use (Process 2) - HF Byproduct from NF3 combustion in POU abatement devices in process 2	CVD Remote Plasma Clean	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	2202.288	32527.65451391	Yes	6.03366575	89.11686168	Yes
80	Semiconductor Fab	Nitrogen Trifluoride Use (Process 2) - HF Byproduct from CF4 combustion in POU abatement devices in process 2	CVD Remote Plasma Clean	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	2202.288	32527.65451391	Yes	6.03366575	89.11686168	Yes
81	Semiconductor Fab	Octafluorocyclobutane Use	Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	308	594	Yes	0.84383562	1.62739726	Yes
82	Semiconductor Fab	Octafluorocyclopentene Use	Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	813.44	2738.6190495	Yes	2.22860274	7.50306589	Yes
83	Semiconductor Fab	Octafluoropropane Use	CVD	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	14175	29717.69634674	Yes	38.83561644	81.41834616	Yes
84	Semiconductor Fab	Octafluoropropane Use - HF Byproduct from C3F8 combustion in POU abatement devices	CVD	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	14175	29717.69634674	Yes	38.83561644	81.41834616	Yes
85	Semiconductor Fab	Octafluoropropane Use - HF Byproduct from CF4 combustion in POU abatement devices	CVD	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	14175	29717.69634674	Yes	38.83561644	81.41834616	Yes
86	Semiconductor Fab	Sulfur Hexafluoride Use	Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	1400	3119.12822967	Yes	3.83561644	8.54555679	Yes
87	Semiconductor Fab	Tetrafluoromethane (CF4) (Process 1)	CVD	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	17576.64	0	Yes	48.15517808	0	Yes
88	Semiconductor Fab	Tetrafluoromethane (CF4) (Process 1) - HF Byproduct from CF4 combustion in POU abatement devices	CVD	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	17576.64	0	Yes	48.15517808	0	Yes
89	Semiconductor Fab	Tetrafluoromethane (CF4) (Process 2)	Etch/Wafer Clean	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	6903.36	48335.54556829	Yes	18.91331507	132.42615224	Yes
90	Semiconductor Fab	Trifluoromethane	Etch/Wafer Clean	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	376	1486.30504205	Yes	1.03013699	4.07206861	Yes
91	Semiconductor Fab	Tungsten Hexafluoride	CVD	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	4247.04	6504.069924	Yes	11.63572603	17.81936965	Yes
92	Semiconductor Fab	Hydrogen Chloride Gas Use	Diffusion	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	600	1070.91589962	Yes	1.64383562	2.93401616	Yes
93	Semiconductor Fab	Hydrogen Bromide Use	Etch gas	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	1560	4376.32667644	Yes	4.2739726	11.9899361	Yes
94	Semiconductor Fab	1-Methoxy-2-propanol (PGME) Use	Photolithography	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	264143.23	435576.65578558	Yes	723.68008219	1193.36070078	Yes
95	Semiconductor Fab	2-(1-Methoxy)propyl acetate (PGMEA) Use	Photolithography	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	124793.3895	206316.52479251	Yes	341.89969726	565.25075286	Yes
96	Semiconductor Fab	3-Amino-1,2,4 Triazole Use	CMP	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	21.34484	90.36022409	Yes	0.05847901	0.24756226	Yes
97	Semiconductor Fab	Acetone Use	Photolithography	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	171.34	338.00791925	Yes	0.46942466	0.92604909	Yes
98	Semiconductor Fab	Phosphorus Oxychloride Use	Etch	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	0	381.2114558	Yes	0	1.04441495	Yes
99	Semiconductor Fab	Pyrocatechol Use	Photolithography	RCTO	Point	RCTO 1, 2, 3	lbs	Material Used - Liquid Chemical	9243	10428	Yes	25.32328767	28.56986301	Yes
100	Semiconductor Fab	Silicon Dioxide Use	Acid/Base Chemical Use	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	146746.918305	381232.12806171	Yes	402.04635152	1044.47158373	Yes
101	Semiconductor Fab	Silicon Tetrafluoride Use	Acid/Base Chemical Use	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Gaseous Chemical	0	40	Yes	0	0.10958904	Yes

102	Semiconductor Fab	Fluorides	HF Emissions	Wet Scrubber	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	HF lbs Emitted	3507.19984305	9185.48335744	Yes	9.60876669	25.16570783	Yes
103	Semiconductor Fab	Ammonium Hydroxide Use	Acid/Base Chemical Use	Wet Scrubber	Point	S-4, S-12	lbs	Material Used - Liquid Chemical	44999.4528	98826.24781888	Yes	123.28617205	270.75684334	Yes
104	Semiconductor Fab	Aluminum Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	948.52630587	5694.72057783	Yes	2.59870221	15.60197419	Yes
105	Semiconductor Fab	Cadmium Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.00191385	0.02112864	Yes	0.00000524	0.00005789	Yes
106	Semiconductor Fab	Chlorine Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.00192147	0.02163843	Yes	0.00000526	0.00005928	Yes
107	Semiconductor Fab	Copper Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	5971.55033294	177556.13211486	Yes	16.36041187	486.45515648	Yes
108	Semiconductor Fab	Manganese Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.00192147	0.02163843	Yes	0.00000526	0.00005928	Yes
109	Semiconductor Fab	Nickel Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.01117421	0.19342998	Yes	0.00003061	0.00052995	Yes
110	Semiconductor Fab	Lead Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.00019215	1.14977184	Yes	0.00000053	0.00315006	Yes
111	Semiconductor Fab	Vanadium Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.00384294	0.04327686	Yes	0.00001053	0.00011857	Yes
112	Semiconductor Fab	Antimony Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.00011368	1.98347508	Yes	0.00000031	0.00543418	Yes
113	Semiconductor Fab	Cobalt Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	8.46950615	566.35471769	Yes	0.02320413	1.55165676	Yes
114	Semiconductor Fab	Arsenic Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.00011368	0.05563908	Yes	0.00000031	0.00015244	Yes
115	Semiconductor Fab	Uranium Use Target/Anode Usage	Target/Anode Usage	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Solid Materials	0.00000578	0.00001839	Yes	0.00000002	0.00000005	Yes
116	Semiconductor Fab	TMPI Use	CVD	None	Point	S-2, S-5, S-6, S-13, S-15, S-16, S-9, S-11, S-14	lbs	Material Used - Liquid Chemical	20.09	327	Yes	0.0550411	0.89589041	Yes
117	Semiconductor Fab	pH 7 Buffer solution-Yellow 4L	Buffer Solution	None	Fugitive	Semiconductor Fab	lbs	Material Used - Facilities	91.795	158.555	Yes	0.25149315	0.43439726	Yes
118	Semiconductor Fab	pH 10 Buffer solution-Blue 4L	Buffer Solution	None	Fugitive	Semiconductor Fab	lbs	Material Used - Facilities	41.725	158.555	Yes	0.11431507	0.43439726	Yes
119	Semiconductor Fab	SMAW E6010 Welding	Exempt TEU – with DEQ Approval	None	Fugitive	Semiconductor Fab	lbs	Material Used - Facilities	40	40	Yes	40	40	Yes
120	Semiconductor Fab	SMAW E7018 Welding	Exempt TEU – with DEQ Approval	None	Fugitive	Semiconductor Fab	lbs	Material Used - Facilities	40	40	Yes	40	40	Yes

	A	B	C	D	E	F	G	H	I	J	K	L	M	N
1	AQ520 Form - Version 2.0
2	Microchip Technology Incorporated, Gresham Fab 4
3	Source No. 26-3240
4	Submitted on 12/18/205
6	Toxics Emissions Unit (TEU) Information		Toxic Air Contaminant (TAC) Information		Emission Factor (EF) Information								Calculated Emissions - Requested PTE
7					Capture Efficiency (CE)	Destruction/Removal Efficiency (DRE)	EF Includes		EF Value			Reference/Notes	Annual [lb/year]	Max Daily [lb/day]
8	Toxics Emissions Unit (TEU) ID	Toxics Emissions Sub-Unit (TESU) ID	CASRN or DEQ ID	Toxic Air Contaminant (TAC) Name			CE?	DRE?	Annual	Max Daily	Units
9	Emergency Generators	Emergency Generator 1	71-43-2	Benzene			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.33913252	0.08895219
10	Emergency Generators	Emergency Generator 1	106-99-0	1,3-Butadiene			No	No	0.22252903	0.21887953	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.39574563	0.10380143
11	Emergency Generators	Emergency Generator 1	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0026676	0.00071136
12	Emergency Generators	Emergency Generator 1	50-00-0	Formaldehyde			No	No	1.76682317	1.73784707	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.14211833	0.82415659
13	Emergency Generators	Emergency Generator 1	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00017784	0.00004742
14	Emergency Generators	Emergency Generator 1	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00284544	0.00075878
15	Emergency Generators	Emergency Generator 1	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.01476072	0.00393619
16	Emergency Generators	Emergency Generator 1	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00693576	0.00184954
17	Emergency Generators	Emergency Generator 1	91-20-3	Naphthalene			No	No	0.02016477	0.01983407	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.03586103	0.00940611
18	Emergency Generators	Emergency Generator 1	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.03705405	0.03644636	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.06589693	0.01728432
19	Emergency Generators	Emergency Generator 1	75-07-0	Acetaldehyde			No	No	0.80178008	0.78863079	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.42588569	0.37400027
20	Emergency Generators	Emergency Generator 1	107-02-8	Acrolein			No	No	0.03469979	0.03413071	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0617101	0.01618615
21	Emergency Generators	Emergency Generator 1	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.42272	0.379392
22	Emergency Generators	Emergency Generator 1	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00729144	0.00194438
23	Emergency Generators	Emergency Generator 1	100-41-4	Ethyl benzene			No	No	0.01115716	0.01097418	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.01984189	0.0052044
24	Emergency Generators	Emergency Generator 1	110-54-3	Hexane			No	No	0.02753464	0.02708307	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.04896761	0.01284387
25	Emergency Generators	Emergency Generator 1	7647-01-0	Hydrochloric acid			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.33913252	0.08895219
26	Emergency Generators	Emergency Generator 1	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00551304	0.00147014
27	Emergency Generators	Emergency Generator 1	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0035568	0.00094848
28	Emergency Generators	Emergency Generator 1	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00391248	0.00104333
29	Emergency Generators	Emergency Generator 1	108-88-3	Toluene			No	No	0.10788666	0.10611731	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.19186563	0.05032507
30	Emergency Generators	Emergency Generator 1	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.04340033	0.04268856	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.07718314	0.02024462
31	Emergency Generators	Emergency Generator 1	200	Diesel particulate matter			No	No	34.29035185	33.72798611	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	60.98196173	15.99516013
32	Emergency Generators	Emergency Generator 2	71-43-2	Benzene			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.33913252	0.08895219
33	Emergency Generators	Emergency Generator 2	106-99-0	1,3-Butadiene			No	No	0.22252903	0.21887953	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.39574563	0.10380143
34	Emergency Generators	Emergency Generator 2	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0026676	0.00071136
35	Emergency Generators	Emergency Generator 2	50-00-0	Formaldehyde			No	No	1.76682317	1.73784707	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.14211833	0.82415659
36	Emergency Generators	Emergency Generator 2	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00017784	0.00004742
37	Emergency Generators	Emergency Generator 2	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00284544	0.00075878
38	Emergency Generators	Emergency Generator 2	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.01476072	0.00393619
39	Emergency Generators	Emergency Generator 2	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00693576	0.00184954
40	Emergency Generators	Emergency Generator 2	91-20-3	Naphthalene			No	No	0.02016477	0.01983407	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.03586103	0.00940611
41	Emergency Generators	Emergency Generator 2	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.03705405	0.03644636	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.06589693	0.01728432
42	Emergency Generators	Emergency Generator 2	75-07-0	Acetaldehyde			No	No	0.80178008	0.78863079	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.42588569	0.37400027
43	Emergency Generators	Emergency Generator 2	107-02-8	Acrolein			No	No	0.03469979	0.03413071	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0617101	0.01618615
44	Emergency Generators	Emergency Generator 2	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.42272	0.379392
45	Emergency Generators	Emergency Generator 2	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00729144	0.00194438
46	Emergency Generators	Emergency Generator 2	100-41-4	Ethyl benzene			No	No	0.01115716	0.01097418	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.01984189	0.0052044
47	Emergency Generators	Emergency Generator 2	110-54-3	Hexane			No	No	0.02753464	0.02708307	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.04896761	0.01284387
48	Emergency Generators	Emergency Generator 2	7647-01-0	Hydrochloric acid			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.33913252	0.08895219
49	Emergency Generators	Emergency Generator 2	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00551304	0.00147014
50	Emergency Generators	Emergency Generator 2	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0035568	0.00094848
51	Emergency Generators	Emergency Generator 2	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00391248	0.00104333

52	Emergency Generators	Emergency Generator 2	108-88-3	Toluene			No	No	0.10788666	0.10611731	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.19186563	0.05032507
53	Emergency Generators	Emergency Generator 2	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.04340033	0.04268856	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.07718314	0.02024462
54	Emergency Generators	Emergency Generator 2	200	Diesel particulate matter			No	No	34.29035185	33.72798611	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	60.98196173	15.99516013
55	Emergency Generators	Emergency Generator 3	71-43-2	Benzene			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.42574633	0.11167041
56	Emergency Generators	Emergency Generator 3	106-99-0	1,3-Butadiene			No	No	0.22252903	0.21887953	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.49681831	0.13031212
57	Emergency Generators	Emergency Generator 3	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0033489	0.00089304
58	Emergency Generators	Emergency Generator 3	50-00-0	Formaldehyde			No	No	1.76682317	1.73784707	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.94460942	1.03464463
59	Emergency Generators	Emergency Generator 3	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00022326	0.00005954
60	Emergency Generators	Emergency Generator 3	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00357216	0.00095258
61	Emergency Generators	Emergency Generator 3	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.01853058	0.00494149
62	Emergency Generators	Emergency Generator 3	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00870714	0.0023219
63	Emergency Generators	Emergency Generator 3	91-20-3	Naphthalene			No	No	0.02016477	0.01983407	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.04501987	0.01180841
64	Emergency Generators	Emergency Generator 3	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.03705405	0.03644636	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.08272688	0.02169871
65	Emergency Generators	Emergency Generator 3	75-07-0	Acetaldehyde			No	No	0.80178008	0.78863079	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.7900542	0.46951923
66	Emergency Generators	Emergency Generator 3	107-02-8	Acrolein			No	No	0.03469979	0.03413071	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.07747075	0.02032006
67	Emergency Generators	Emergency Generator 3	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.78608	0.476288
68	Emergency Generators	Emergency Generator 3	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00915366	0.00244098
69	Emergency Generators	Emergency Generator 3	100-41-4	Ethyl benzene			No	No	0.01115716	0.01097418	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.02490947	0.00653359
70	Emergency Generators	Emergency Generator 3	110-54-3	Hexane			No	No	0.02753464	0.02708307	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.06147384	0.01612418
71	Emergency Generators	Emergency Generator 3	7647-01-0	Hydrochloric acid			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.42574633	0.11167041
72	Emergency Generators	Emergency Generator 3	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00692106	0.00184562
73	Emergency Generators	Emergency Generator 3	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0044652	0.00119072
74	Emergency Generators	Emergency Generator 3	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00491172	0.00130979
75	Emergency Generators	Emergency Generator 3	108-88-3	Toluene			No	No	0.10788666	0.10611731	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.24086776	0.063178
76	Emergency Generators	Emergency Generator 3	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.04340033	0.04268856	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.09689557	0.02541506
77	Emergency Generators	Emergency Generator 3	200	Diesel particulate matter			No	No	34.29035185	33.72798611	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	76.55663954	20.08029381
78	Emergency Generators	Emergency Generator 4	71-43-2	Benzene			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.42574633	0.11167041
79	Emergency Generators	Emergency Generator 4	106-99-0	1,3-Butadiene			No	No	0.22252903	0.21887953	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.49681831	0.13031212
80	Emergency Generators	Emergency Generator 4	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0033489	0.00089304
81	Emergency Generators	Emergency Generator 4	50-00-0	Formaldehyde			No	No	1.76682317	1.73784707	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.94460942	1.03464463
82	Emergency Generators	Emergency Generator 4	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00022326	0.00005954
83	Emergency Generators	Emergency Generator 4	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00357216	0.00095258
84	Emergency Generators	Emergency Generator 4	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.01853058	0.00494149
85	Emergency Generators	Emergency Generator 4	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00870714	0.0023219
86	Emergency Generators	Emergency Generator 4	91-20-3	Naphthalene			No	No	0.02016477	0.01983407	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.04501987	0.01180841
87	Emergency Generators	Emergency Generator 4	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.03705405	0.03644636	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.08272688	0.02169871
88	Emergency Generators	Emergency Generator 4	75-07-0	Acetaldehyde			No	No	0.80178008	0.78863079	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.7900542	0.46951923
89	Emergency Generators	Emergency Generator 4	107-02-8	Acrolein			No	No	0.03469979	0.03413071	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.07747075	0.02032006
90	Emergency Generators	Emergency Generator 4	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.78608	0.476288
91	Emergency Generators	Emergency Generator 4	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00915366	0.00244098
92	Emergency Generators	Emergency Generator 4	100-41-4	Ethyl benzene			No	No	0.01115716	0.01097418	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.02490947	0.00653359
93	Emergency Generators	Emergency Generator 4	110-54-3	Hexane			No	No	0.02753464	0.02708307	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.06147384	0.01612418
94	Emergency Generators	Emergency Generator 4	7647-01-0	Hydrochloric acid			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.42574633	0.11167041
95	Emergency Generators	Emergency Generator 4	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00692106	0.00184562
96	Emergency Generators	Emergency Generator 4	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0044652	0.00119072
97	Emergency Generators	Emergency Generator 4	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00491172	0.00130979
98	Emergency Generators	Emergency Generator 4	108-88-3	Toluene			No	No	0.10788666	0.10611731	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.24086776	0.063178
99	Emergency Generators	Emergency Generator 4	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.04340033	0.04268856	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.09689557	0.02541506
100	Emergency Generators	Emergency Generator 4	200	Diesel particulate matter			No	No	34.29035185	33.72798611	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	76.55663954	20.08029381
101	Emergency Generators	Emergency Generator 5	71-43-2	Benzene			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.42574633	0.11167041

102	Emergency Generators	Emergency Generator 5	106-99-0	1,3-Butadiene			No	No	0.22252903	0.21887953	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.49681831	0.13031212
103	Emergency Generators	Emergency Generator 5	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0033489	0.00089304
104	Emergency Generators	Emergency Generator 5	50-00-0	Formaldehyde			No	No	1.76682317	1.73784707	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	3.94460942	1.03464463
105	Emergency Generators	Emergency Generator 5	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00022326	0.00005954
106	Emergency Generators	Emergency Generator 5	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00357216	0.00095258
107	Emergency Generators	Emergency Generator 5	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.01853058	0.00494149
108	Emergency Generators	Emergency Generator 5	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00870714	0.0023219
109	Emergency Generators	Emergency Generator 5	91-20-3	Naphthalene			No	No	0.02016477	0.01983407	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.04501987	0.01180841
110	Emergency Generators	Emergency Generator 5	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.03705405	0.03644636	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.08272688	0.02169871
111	Emergency Generators	Emergency Generator 5	75-07-0	Acetaldehyde			No	No	0.80178008	0.78863079	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.7900542	0.46951923
112	Emergency Generators	Emergency Generator 5	107-02-8	Acrolein			No	No	0.03469979	0.03413071	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.07747075	0.02032006
113	Emergency Generators	Emergency Generator 5	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	1.78608	0.476288
114	Emergency Generators	Emergency Generator 5	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00915366	0.00244098
115	Emergency Generators	Emergency Generator 5	100-41-4	Ethyl benzene			No	No	0.01115716	0.01097418	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.02490947	0.00653359
116	Emergency Generators	Emergency Generator 5	110-54-3	Hexane			No	No	0.02753464	0.02708307	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.06147384	0.01612418
117	Emergency Generators	Emergency Generator 5	7647-01-0	Hydrochloric acid			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.42574633	0.11167041
118	Emergency Generators	Emergency Generator 5	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00692106	0.00184562
119	Emergency Generators	Emergency Generator 5	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0044652	0.00119072
120	Emergency Generators	Emergency Generator 5	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00491172	0.00130979
121	Emergency Generators	Emergency Generator 5	108-88-3	Toluene			No	No	0.10788666	0.10611731	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.24086776	0.063178
122	Emergency Generators	Emergency Generator 5	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.04340033	0.04268856	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.09689557	0.02541506
123	Emergency Generators	Emergency Generator 5	200	Diesel particulate matter			No	No	34.29035185	33.72798611	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	76.55663954	20.08029381
124	Fire Pump	Fire Pump	71-43-2	Benzene			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.03718558	0.00975353
125	Fire Pump	Fire Pump	106-99-0	1,3-Butadiene			No	No	0.22252903	0.21887953	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.04339316	0.01138174
126	Fire Pump	Fire Pump	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0002925	0.000078
127	Fire Pump	Fire Pump	50-00-0	Formaldehyde			No	No	1.7738874	1.73988483	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.34590804	0.09047401
128	Fire Pump	Fire Pump	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0000195	0.0000052
129	Fire Pump	Fire Pump	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.000312	0.0000832
130	Fire Pump	Fire Pump	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0016185	0.0004316
131	Fire Pump	Fire Pump	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0007605	0.0002028
132	Fire Pump	Fire Pump	91-20-3	Naphthalene			No	No	0.02016477	0.01983407	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00393213	0.00103137
133	Fire Pump	Fire Pump	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.03705405	0.03644636	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00722554	0.00189521
134	Fire Pump	Fire Pump	75-07-0	Acetaldehyde			No	No	0.80178008	0.78863079	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.15634712	0.0410088
135	Fire Pump	Fire Pump	107-02-8	Acrolein			No	No	0.03469979	0.03413071	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00676646	0.0017748
136	Fire Pump	Fire Pump	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.156	0.0416
137	Fire Pump	Fire Pump	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0007995	0.0002132
138	Fire Pump	Fire Pump	100-41-4	Ethyl benzene			No	No	0.01115716	0.01097418	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00217565	0.00057066
139	Fire Pump	Fire Pump	110-54-3	Hexane			No	No	0.02753464	0.02708307	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00536925	0.00140832
140	Fire Pump	Fire Pump	7647-01-0	Hydrochloric acid			No	No	0.1906953	0.18756788	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.03718558	0.00975353
141	Fire Pump	Fire Pump	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0006045	0.0001612
142	Fire Pump	Fire Pump	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00039	0.000104
143	Fire Pump	Fire Pump	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.000429	0.0001144
144	Fire Pump	Fire Pump	108-88-3	Toluene			No	No	0.10788666	0.10611731	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.0210379	0.0055181
145	Fire Pump	Fire Pump	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.04340033	0.04268856	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	0.00846306	0.0022198
146	Fire Pump	Fire Pump	200	Diesel particulate matter			No	No	34.29035185	33.72798611	lb/M gal	CAO Diesel RICE (a) adjusted for 13 cold starts annually and 1 cold start per day	6.68661861	1.75385528
147	Boilers	Boiler 1 Fab 4-1 NG	71-43-2	Benzene			No	No	0.0058	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	0.62588482	0.00171475
148	Boilers	Boiler 1 Fab 4-1 NG	50-00-0	Formaldehyde			No	No	0.0123	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.32730747	0.00363646
149	Boilers	Boiler 1 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	0.01079112	0.00002956
150	Boilers	Boiler 1 Fab 4-1 NG	50-32-8	Benzo[a]pyrene			No	No	0.0000012	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00012949	0.00000035
151	Boilers	Boiler 1 Fab 4-1 NG	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	0.03237335	0.00008869

152	Boilers	Boiler 1 Fab 4-1 NG	75-07-0	Acetaldehyde			No	No	0.0031	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	0.33452465	0.00091651
153	Boilers	Boiler 1 Fab 4-1 NG	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	0.29136018	0.00079825
154	Boilers	Boiler 1 Fab 4-1 NG	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	345.31576471	0.94607059
155	Boilers	Boiler 1 Fab 4-1 NG	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02158224	0.00005913
156	Boilers	Boiler 1 Fab 4-1 NG	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	0.47480918	0.00130085
157	Boilers	Boiler 1 Fab 4-1 NG	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00129493	0.00000355
158	Boilers	Boiler 1 Fab 4-1 NG	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	0.11870229	0.00032521
159	Boilers	Boiler 1 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	0.15107565	0.00041391
160	Boilers	Boiler 1 Fab 4-1 NG	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00906454	0.00002483
161	Boilers	Boiler 1 Fab 4-1 NG	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0917245	0.0002513
162	Boilers	Boiler 1 Fab 4-1 NG	100-41-4	Ethyl benzene			No	No	0.0069	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	0.74458712	0.00203996
163	Boilers	Boiler 1 Fab 4-1 NG	110-54-3	Hexane			No	No	0.0046	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	0.49639141	0.00135998
164	Boilers	Boiler 1 Fab 4-1 NG	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	0.05395559	0.00014782
165	Boilers	Boiler 1 Fab 4-1 NG	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	0.04100625	0.00011235
166	Boilers	Boiler 1 Fab 4-1 NG	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02805691	0.00007687
167	Boilers	Boiler 1 Fab 4-1 NG	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	0.17805344	0.00048782
168	Boilers	Boiler 1 Fab 4-1 NG	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	0.22661347	0.00062086
169	Boilers	Boiler 1 Fab 4-1 NG	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00258987	0.0000071
170	Boilers	Boiler 1 Fab 4-1 NG	108-88-3	Toluene			No	No	0.0265	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.85964618	0.00783465
171	Boilers	Boiler 1 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	0.24819571	0.00067999
172	Boilers	Boiler 1 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0197	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	2.12585018	0.00582425
173	Boilers	Boiler 1 Fab 4-1 NG	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	3.12942412	0.00857376
174	Boilers	Boiler 2 Fab 4-1 NG	71-43-2	Benzene			No	No	0.0058	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	0.62588482	0.00171475
175	Boilers	Boiler 2 Fab 4-1 NG	50-00-0	Formaldehyde			No	No	0.0123	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.32730747	0.00363646
176	Boilers	Boiler 2 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	0.01079112	0.00002956
177	Boilers	Boiler 2 Fab 4-1 NG	50-32-8	Benzo[a]pyrene			No	No	0.0000012	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00012949	0.00000035
178	Boilers	Boiler 2 Fab 4-1 NG	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	0.03237335	0.00008869
179	Boilers	Boiler 2 Fab 4-1 NG	75-07-0	Acetaldehyde			No	No	0.0031	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	0.33452465	0.00091651
180	Boilers	Boiler 2 Fab 4-1 NG	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	0.29136018	0.00079825
181	Boilers	Boiler 2 Fab 4-1 NG	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	345.31576471	0.94607059
182	Boilers	Boiler 2 Fab 4-1 NG	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02158224	0.00005913
183	Boilers	Boiler 2 Fab 4-1 NG	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	0.47480918	0.00130085
184	Boilers	Boiler 2 Fab 4-1 NG	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00129493	0.00000355
185	Boilers	Boiler 2 Fab 4-1 NG	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	0.11870229	0.00032521
186	Boilers	Boiler 2 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	0.15107565	0.00041391
187	Boilers	Boiler 2 Fab 4-1 NG	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00906454	0.00002483
188	Boilers	Boiler 2 Fab 4-1 NG	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0917245	0.0002513
189	Boilers	Boiler 2 Fab 4-1 NG	100-41-4	Ethyl benzene			No	No	0.0069	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	0.74458712	0.00203996
190	Boilers	Boiler 2 Fab 4-1 NG	110-54-3	Hexane			No	No	0.0046	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	0.49639141	0.00135998
191	Boilers	Boiler 2 Fab 4-1 NG	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	0.05395559	0.00014782
192	Boilers	Boiler 2 Fab 4-1 NG	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	0.04100625	0.00011235
193	Boilers	Boiler 2 Fab 4-1 NG	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02805691	0.00007687
194	Boilers	Boiler 2 Fab 4-1 NG	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	0.17805344	0.00048782
195	Boilers	Boiler 2 Fab 4-1 NG	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	0.22661347	0.00062086
196	Boilers	Boiler 2 Fab 4-1 NG	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00258987	0.0000071
197	Boilers	Boiler 2 Fab 4-1 NG	108-88-3	Toluene			No	No	0.0265	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.85964618	0.00783465
198	Boilers	Boiler 2 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	0.24819571	0.00067999
199	Boilers	Boiler 2 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0197	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	2.12585018	0.00582425
200	Boilers	Boiler 2 Fab 4-1 NG	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	3.12942412	0.00857376
201	Boilers	Boiler 3 Fab 4-1 NG	71-43-2	Benzene			No	No	0.0058	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	0.62588482	0.00171475

202	Boilers	Boiler 3 Fab 4-1 NG	50-00-0	Formaldehyde			No	No	0.0123	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.32730747	0.00363646
203	Boilers	Boiler 3 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	0.01079112	0.00002956
204	Boilers	Boiler 3 Fab 4-1 NG	50-32-8	Benzo[a]pyrene			No	No	0.0000012	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00012949	0.00000035
205	Boilers	Boiler 3 Fab 4-1 NG	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	0.03237335	0.00008869
206	Boilers	Boiler 3 Fab 4-1 NG	75-07-0	Acetaldehyde			No	No	0.0031	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	0.33452465	0.00091651
207	Boilers	Boiler 3 Fab 4-1 NG	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	0.29136018	0.00079825
208	Boilers	Boiler 3 Fab 4-1 NG	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	345.31576471	0.94607059
209	Boilers	Boiler 3 Fab 4-1 NG	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02158224	0.00005913
210	Boilers	Boiler 3 Fab 4-1 NG	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	0.47480918	0.00130085
211	Boilers	Boiler 3 Fab 4-1 NG	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00129493	0.00000355
212	Boilers	Boiler 3 Fab 4-1 NG	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	0.11870229	0.00032521
213	Boilers	Boiler 3 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	0.15107565	0.00041391
214	Boilers	Boiler 3 Fab 4-1 NG	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00906454	0.00002483
215	Boilers	Boiler 3 Fab 4-1 NG	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0917245	0.0002513
216	Boilers	Boiler 3 Fab 4-1 NG	100-41-4	Ethyl benzene			No	No	0.0069	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	0.74458712	0.00203996
217	Boilers	Boiler 3 Fab 4-1 NG	110-54-3	Hexane			No	No	0.0046	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	0.49639141	0.00135998
218	Boilers	Boiler 3 Fab 4-1 NG	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	0.05395559	0.00014782
219	Boilers	Boiler 3 Fab 4-1 NG	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	0.04100625	0.00011235
220	Boilers	Boiler 3 Fab 4-1 NG	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02805691	0.00007687
221	Boilers	Boiler 3 Fab 4-1 NG	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	0.17805344	0.00048782
222	Boilers	Boiler 3 Fab 4-1 NG	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	0.22661347	0.00062086
223	Boilers	Boiler 3 Fab 4-1 NG	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00258987	0.0000071
224	Boilers	Boiler 3 Fab 4-1 NG	108-88-3	Toluene			No	No	0.0265	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.85964618	0.00783465
225	Boilers	Boiler 3 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	0.24819571	0.00067999
226	Boilers	Boiler 3 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0197	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	2.12585018	0.00582425
227	Boilers	Boiler 3 Fab 4-1 NG	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	3.12942412	0.00857376
228	Boilers	Boiler 4 Fab 4-1 NG	71-43-2	Benzene			No	No	0.0058	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	0.50011012	0.00137016
229	Boilers	Boiler 4 Fab 4-1 NG	50-00-0	Formaldehyde			No	No	0.0123	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.06057835	0.00290569
230	Boilers	Boiler 4 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00862259	0.00002362
231	Boilers	Boiler 4 Fab 4-1 NG	50-32-8	Benzo[a]pyrene			No	No	0.0000012	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00010347	0.00000028
232	Boilers	Boiler 4 Fab 4-1 NG	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02586776	0.00007087
233	Boilers	Boiler 4 Fab 4-1 NG	75-07-0	Acetaldehyde			No	No	0.0031	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	0.26730024	0.00073233
234	Boilers	Boiler 4 Fab 4-1 NG	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	0.23280988	0.00063784
235	Boilers	Boiler 4 Fab 4-1 NG	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	275.92282353	0.75595294
236	Boilers	Boiler 4 Fab 4-1 NG	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	0.01724518	0.00004725
237	Boilers	Boiler 4 Fab 4-1 NG	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	0.37939388	0.00103944
238	Boilers	Boiler 4 Fab 4-1 NG	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00103471	0.00000283
239	Boilers	Boiler 4 Fab 4-1 NG	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	0.09484847	0.00025986
240	Boilers	Boiler 4 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	0.12071624	0.00033073
241	Boilers	Boiler 4 Fab 4-1 NG	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00724297	0.00001984
242	Boilers	Boiler 4 Fab 4-1 NG	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	0.073292	0.0002008
243	Boilers	Boiler 4 Fab 4-1 NG	100-41-4	Ethyl benzene			No	No	0.0069	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	0.59495859	0.00163002
244	Boilers	Boiler 4 Fab 4-1 NG	110-54-3	Hexane			No	No	0.0046	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	0.39663906	0.00108668
245	Boilers	Boiler 4 Fab 4-1 NG	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	0.04311294	0.00011812
246	Boilers	Boiler 4 Fab 4-1 NG	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	0.03276584	0.00008977
247	Boilers	Boiler 4 Fab 4-1 NG	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02241873	0.00006142
248	Boilers	Boiler 4 Fab 4-1 NG	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	0.14227271	0.00038979
249	Boilers	Boiler 4 Fab 4-1 NG	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	0.18107435	0.00049609
250	Boilers	Boiler 4 Fab 4-1 NG	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00206942	0.00000567
251	Boilers	Boiler 4 Fab 4-1 NG	108-88-3	Toluene			No	No	0.0265	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.28498588	0.00626024

252	Boilers	Boiler 4 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	0.19831953	0.00054334
253	Boilers	Boiler 4 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0197	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	1.69864988	0.00465384
254	Boilers	Boiler 4 Fab 4-1 NG	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	2.50055059	0.00685082
255	Boilers	Boiler 5 Fab 4-1 NG	71-43-2	Benzene			No	No	0.0058	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	0.50011012	0.00137016
256	Boilers	Boiler 5 Fab 4-1 NG	50-00-0	Formaldehyde			No	No	0.0123	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	1.06057835	0.00290569
257	Boilers	Boiler 5 Fab 4-1 NG	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00862259	0.00002362
258	Boilers	Boiler 5 Fab 4-1 NG	50-32-8	Benzo[a]pyrene			No	No	0.0000012	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00010347	0.00000028
259	Boilers	Boiler 5 Fab 4-1 NG	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02586776	0.00007087
260	Boilers	Boiler 5 Fab 4-1 NG	75-07-0	Acetaldehyde			No	No	0.0031	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	0.26730024	0.00073233
261	Boilers	Boiler 5 Fab 4-1 NG	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	0.23280988	0.00063784
262	Boilers	Boiler 5 Fab 4-1 NG	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	275.92282353	0.75595294
263	Boilers	Boiler 5 Fab 4-1 NG	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	0.01724518	0.00004725
264	Boilers	Boiler 5 Fab 4-1 NG	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	0.37939388	0.00103944
265	Boilers	Boiler 5 Fab 4-1 NG	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00103471	0.00000283
266	Boilers	Boiler 5 Fab 4-1 NG	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	0.09484847	0.00025986
267	Boilers	Boiler 5 Fab 4-1 NG	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	0.12071624	0.00033073
268	Boilers	Boiler 5 Fab 4-1 NG	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00724297	0.00001984
269	Boilers	Boiler 5 Fab 4-1 NG	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	0.073292	0.0002008
270	Boilers	Boiler 5 Fab 4-1 NG	100-41-4	Ethyl benzene			No	No	0.0069	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	0.59495859	0.00163002
271	Boilers	Boiler 5 Fab 4-1 NG	110-54-3	Hexane			No	No	0.0046	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	0.39663906	0.00108668
272	Boilers	Boiler 5 Fab 4-1 NG	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	0.04311294	0.00011812
273	Boilers	Boiler 5 Fab 4-1 NG	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	0.03276584	0.00008977
274	Boilers	Boiler 5 Fab 4-1 NG	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02241873	0.00006142
275	Boilers	Boiler 5 Fab 4-1 NG	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	0.14227271	0.00038979
276	Boilers	Boiler 5 Fab 4-1 NG	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	0.18107435	0.00049609
277	Boilers	Boiler 5 Fab 4-1 NG	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00206942	0.00000567
278	Boilers	Boiler 5 Fab 4-1 NG	108-88-3	Toluene			No	No	0.0265	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	2.28498588	0.00626024
279	Boilers	Boiler 5 Fab 4-1 NG	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	0.19831953	0.00054334
280	Boilers	Boiler 5 Fab 4-1 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0197	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	1.69864988	0.00465384
281	Boilers	Boiler 5 Fab 4-1 NG	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	2.50055059	0.00685082
282	Boilers	Boiler 1 Fab 4-2 NG	71-43-2	Benzene			No	No	0.0058	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	1.4590364	0.00399736
283	Boilers	Boiler 1 Fab 4-2 NG	50-00-0	Formaldehyde			No	No	0.0123	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	3.0941634	0.00847716
284	Boilers	Boiler 1 Fab 4-2 NG	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0251558	0.00006892
285	Boilers	Boiler 1 Fab 4-2 NG	50-32-8	Benzo[a]pyrene			No	No	0.0000012	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00030187	0.00000083
286	Boilers	Boiler 1 Fab 4-2 NG	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0754674	0.00020676
287	Boilers	Boiler 1 Fab 4-2 NG	75-07-0	Acetaldehyde			No	No	0.0031	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	0.7798298	0.00213652
288	Boilers	Boiler 1 Fab 4-2 NG	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	0.6792066	0.00186084
289	Boilers	Boiler 1 Fab 4-2 NG	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	804.9856	2.20544
290	Boilers	Boiler 1 Fab 4-2 NG	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0503116	0.00013784
291	Boilers	Boiler 1 Fab 4-2 NG	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	1.1068552	0.00303248
292	Boilers	Boiler 1 Fab 4-2 NG	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0030187	0.00000827
293	Boilers	Boiler 1 Fab 4-2 NG	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	0.2767138	0.00075812
294	Boilers	Boiler 1 Fab 4-2 NG	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	0.3521812	0.00096488
295	Boilers	Boiler 1 Fab 4-2 NG	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02113087	0.00005789
296	Boilers	Boiler 1 Fab 4-2 NG	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	0.2138243	0.00058582
297	Boilers	Boiler 1 Fab 4-2 NG	100-41-4	Ethyl benzene			No	No	0.0069	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	1.7357502	0.00475548
298	Boilers	Boiler 1 Fab 4-2 NG	110-54-3	Hexane			No	No	0.0046	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	1.1571668	0.00317032
299	Boilers	Boiler 1 Fab 4-2 NG	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	0.125779	0.0003446
300	Boilers	Boiler 1 Fab 4-2 NG	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	0.09559204	0.0002619
301	Boilers	Boiler 1 Fab 4-2 NG	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	0.06540508	0.00017919

302	Boilers	Boiler 1 Fab 4-2 NG	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	0.4150707	0.00113718
303	Boilers	Boiler 1 Fab 4-2 NG	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	0.5282718	0.00144732
304	Boilers	Boiler 1 Fab 4-2 NG	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00603739	0.00001654
305	Boilers	Boiler 1 Fab 4-2 NG	108-88-3	Toluene			No	No	0.0265	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	6.666287	0.0182638
306	Boilers	Boiler 1 Fab 4-2 NG	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	0.5785834	0.00158516
307	Boilers	Boiler 1 Fab 4-2 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0197	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	4.9556926	0.01357724
308	Boilers	Boiler 1 Fab 4-2 NG	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	7.295182	0.0199868
309	Boilers	Boiler 2 Fab 4-2 NG	71-43-2	Benzene			No	No	0.0058	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	1.4590364	0.00399736
310	Boilers	Boiler 2 Fab 4-2 NG	50-00-0	Formaldehyde			No	No	0.0123	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	3.0941634	0.00847716
311	Boilers	Boiler 2 Fab 4-2 NG	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0251558	0.00006892
312	Boilers	Boiler 2 Fab 4-2 NG	50-32-8	Benzo[a]pyrene			No	No	0.0000012	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00030187	0.00000083
313	Boilers	Boiler 2 Fab 4-2 NG	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0754674	0.00020676
314	Boilers	Boiler 2 Fab 4-2 NG	75-07-0	Acetaldehyde			No	No	0.0031	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	0.7798298	0.00213652
315	Boilers	Boiler 2 Fab 4-2 NG	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	0.6792066	0.00186084
316	Boilers	Boiler 2 Fab 4-2 NG	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	804.9856	2.20544
317	Boilers	Boiler 2 Fab 4-2 NG	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0503116	0.00013784
318	Boilers	Boiler 2 Fab 4-2 NG	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	1.1068552	0.00303248
319	Boilers	Boiler 2 Fab 4-2 NG	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0030187	0.00000827
320	Boilers	Boiler 2 Fab 4-2 NG	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	0.2767138	0.00075812
321	Boilers	Boiler 2 Fab 4-2 NG	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	0.3521812	0.00096488
322	Boilers	Boiler 2 Fab 4-2 NG	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02113087	0.00005789
323	Boilers	Boiler 2 Fab 4-2 NG	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	0.2138243	0.00058582
324	Boilers	Boiler 2 Fab 4-2 NG	100-41-4	Ethyl benzene			No	No	0.0069	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	1.7357502	0.00475548
325	Boilers	Boiler 2 Fab 4-2 NG	110-54-3	Hexane			No	No	0.0046	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	1.1571668	0.00317032
326	Boilers	Boiler 2 Fab 4-2 NG	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	0.125779	0.0003446
327	Boilers	Boiler 2 Fab 4-2 NG	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	0.09559204	0.0002619
328	Boilers	Boiler 2 Fab 4-2 NG	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	0.06540508	0.00017919
329	Boilers	Boiler 2 Fab 4-2 NG	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	0.4150707	0.00113718
330	Boilers	Boiler 2 Fab 4-2 NG	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	0.5282718	0.00144732
331	Boilers	Boiler 2 Fab 4-2 NG	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00603739	0.00001654
332	Boilers	Boiler 2 Fab 4-2 NG	108-88-3	Toluene			No	No	0.0265	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	6.666287	0.0182638
333	Boilers	Boiler 2 Fab 4-2 NG	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	0.5785834	0.00158516
334	Boilers	Boiler 2 Fab 4-2 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0197	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	4.9556926	0.01357724
335	Boilers	Boiler 2 Fab 4-2 NG	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	7.295182	0.0199868
336	Boilers	Boiler 3 Fab 4-2 NG	71-43-2	Benzene			No	No	0.0058	0.0058	lb/MMSCF	CAO NG Ext. Comb. (b)	1.4590364	0.00399736
337	Boilers	Boiler 3 Fab 4-2 NG	50-00-0	Formaldehyde			No	No	0.0123	0.0123	lb/MMSCF	CAO NG Ext. Comb. (b)	3.0941634	0.00847716
338	Boilers	Boiler 3 Fab 4-2 NG	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0251558	0.00006892
339	Boilers	Boiler 3 Fab 4-2 NG	50-32-8	Benzo[a]pyrene			No	No	0.0000012	0.0000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00030187	0.00000083
340	Boilers	Boiler 3 Fab 4-2 NG	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0754674	0.00020676
341	Boilers	Boiler 3 Fab 4-2 NG	75-07-0	Acetaldehyde			No	No	0.0031	0.0031	lb/MMSCF	CAO NG Ext. Comb. (b)	0.7798298	0.00213652
342	Boilers	Boiler 3 Fab 4-2 NG	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (b)	0.6792066	0.00186084
343	Boilers	Boiler 3 Fab 4-2 NG	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (b)	804.9856	2.20544
344	Boilers	Boiler 3 Fab 4-2 NG	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0503116	0.00013784
345	Boilers	Boiler 3 Fab 4-2 NG	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (b)	1.1068552	0.00303248
346	Boilers	Boiler 3 Fab 4-2 NG	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (b)	0.0030187	0.00000827
347	Boilers	Boiler 3 Fab 4-2 NG	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (b)	0.2767138	0.00075812
348	Boilers	Boiler 3 Fab 4-2 NG	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (b)	0.3521812	0.00096488
349	Boilers	Boiler 3 Fab 4-2 NG	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (b)	0.02113087	0.00005789
350	Boilers	Boiler 3 Fab 4-2 NG	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (b)	0.2138243	0.00058582
351	Boilers	Boiler 3 Fab 4-2 NG	100-41-4	Ethyl benzene			No	No	0.0069	0.0069	lb/MMSCF	CAO NG Ext. Comb. (b)	1.7357502	0.00475548

352	Boilers	Boiler 3 Fab 4-2 NG	110-54-3	Hexane			No	No	0.0046	0.0046	lb/MMSCF	CAO NG Ext. Comb. (b)	1.1571668	0.00317032
353	Boilers	Boiler 3 Fab 4-2 NG	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (b)	0.125779	0.0003446
354	Boilers	Boiler 3 Fab 4-2 NG	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (b)	0.09559204	0.0002619
355	Boilers	Boiler 3 Fab 4-2 NG	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (b)	0.06540508	0.00017919
356	Boilers	Boiler 3 Fab 4-2 NG	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (b)	0.4150707	0.00113718
357	Boilers	Boiler 3 Fab 4-2 NG	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (b)	0.5282718	0.00144732
358	Boilers	Boiler 3 Fab 4-2 NG	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (b)	0.00603739	0.00001654
359	Boilers	Boiler 3 Fab 4-2 NG	108-88-3	Toluene			No	No	0.0265	0.0265	lb/MMSCF	CAO NG Ext. Comb. (b)	6.666287	0.0182638
360	Boilers	Boiler 3 Fab 4-2 NG	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (b)	0.5785834	0.00158516
361	Boilers	Boiler 3 Fab 4-2 NG	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0197	0.0197	lb/MMSCF	CAO NG Ext. Comb. (b)	4.9556926	0.01357724
362	Boilers	Boiler 3 Fab 4-2 NG	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (b)	7.295182	0.0199868
363	Boilers	Boiler 1 Fab 4-1 Diesel	106-99-0	1,3-Butadiene			No	No	0.0148	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	0.0325896	0.0108632
364	Boilers	Boiler 1 Fab 4-1 Diesel	75-07-0	Acetaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
365	Boilers	Boiler 1 Fab 4-1 Diesel	107-02-8	Acrolein			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
366	Boilers	Boiler 1 Fab 4-1 Diesel	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.7616	0.5872
367	Boilers	Boiler 1 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.0035232	0.0011744
368	Boilers	Boiler 1 Fab 4-1 Diesel	71-43-2	Benzene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.0096888	0.0032296
369	Boilers	Boiler 1 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene			No	No	0.0000352	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	0.00007751	0.00002584
370	Boilers	Boiler 1 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	0.003303	0.001101
371	Boilers	Boiler 1 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	0.0002202	0.0000734
372	Boilers	Boiler 1 Fab 4-1 Diesel	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	0.0090282	0.0030094
373	Boilers	Boiler 1 Fab 4-1 Diesel	100-41-4	Ethyl benzene			No	No	0.0002	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	0.0004404	0.0001468
374	Boilers	Boiler 1 Fab 4-1 Diesel	50-00-0	Formaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
375	Boilers	Boiler 1 Fab 4-1 Diesel	110-54-3	Hexane			No	No	0.0035	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	0.007707	0.002569
376	Boilers	Boiler 1 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid			No	No	0.1863	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	0.4102326	0.1367442
377	Boilers	Boiler 1 Fab 4-1 Diesel	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	0.0182766	0.0060922
378	Boilers	Boiler 1 Fab 4-1 Diesel	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	0.0068262	0.0022754
379	Boilers	Boiler 1 Fab 4-1 Diesel	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	SCAQMD AB2588 B-2 External	0.004404	0.001468
380	Boilers	Boiler 1 Fab 4-1 Diesel	91-20-3	Naphthalene			No	No	0.0053	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	0.0116706	0.0038902
381	Boilers	Boiler 1 Fab 4-1 Diesel	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	0.0085878	0.0028626
382	Boilers	Boiler 1 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0445	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	0.097989	0.032663
383	Boilers	Boiler 1 Fab 4-1 Diesel	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	0.0048444	0.0016148
384	Boilers	Boiler 1 Fab 4-1 Diesel	108-88-3	Toluene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.0096888	0.0032296
385	Boilers	Boiler 1 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.0035232	0.0011744
386	Boilers	Boiler 2 Fab 4-1 Diesel	106-99-0	1,3-Butadiene			No	No	0.0148	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	0.0325896	0.0108632
387	Boilers	Boiler 2 Fab 4-1 Diesel	75-07-0	Acetaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
388	Boilers	Boiler 2 Fab 4-1 Diesel	107-02-8	Acrolein			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
389	Boilers	Boiler 2 Fab 4-1 Diesel	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.7616	0.5872
390	Boilers	Boiler 2 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.0035232	0.0011744
391	Boilers	Boiler 2 Fab 4-1 Diesel	71-43-2	Benzene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.0096888	0.0032296
392	Boilers	Boiler 2 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene			No	No	0.0000352	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	0.00007751	0.00002584
393	Boilers	Boiler 2 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	0.003303	0.001101
394	Boilers	Boiler 2 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	0.0002202	0.0000734
395	Boilers	Boiler 2 Fab 4-1 Diesel	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	0.0090282	0.0030094
396	Boilers	Boiler 2 Fab 4-1 Diesel	100-41-4	Ethyl benzene			No	No	0.0002	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	0.0004404	0.0001468
397	Boilers	Boiler 2 Fab 4-1 Diesel	50-00-0	Formaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
398	Boilers	Boiler 2 Fab 4-1 Diesel	110-54-3	Hexane			No	No	0.0035	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	0.007707	0.002569
399	Boilers	Boiler 2 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid			No	No	0.1863	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	0.4102326	0.1367442
400	Boilers	Boiler 2 Fab 4-1 Diesel	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	0.0182766	0.0060922
401	Boilers	Boiler 2 Fab 4-1 Diesel	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	0.0068262	0.0022754

402	Boilers	Boiler 2 Fab 4-1 Diesel	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	SCAQMD AB2588 B-2 External	0.004404	0.001468
403	Boilers	Boiler 2 Fab 4-1 Diesel	91-20-3	Naphthalene			No	No	0.0053	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	0.0116706	0.0038902
404	Boilers	Boiler 2 Fab 4-1 Diesel	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	0.0085878	0.0028626
405	Boilers	Boiler 2 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0445	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	0.097989	0.032663
406	Boilers	Boiler 2 Fab 4-1 Diesel	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	0.0048444	0.0016148
407	Boilers	Boiler 2 Fab 4-1 Diesel	108-88-3	Toluene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.0096888	0.0032296
408	Boilers	Boiler 2 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.0035232	0.0011744
409	Boilers	Boiler 3 Fab 4-1 Diesel	106-99-0	1,3-Butadiene			No	No	0.0148	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	0.0325896	0.0108632
410	Boilers	Boiler 3 Fab 4-1 Diesel	75-07-0	Acetaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
411	Boilers	Boiler 3 Fab 4-1 Diesel	107-02-8	Acrolein			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
412	Boilers	Boiler 3 Fab 4-1 Diesel	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.7616	0.5872
413	Boilers	Boiler 3 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.0035232	0.0011744
414	Boilers	Boiler 3 Fab 4-1 Diesel	71-43-2	Benzene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.0096888	0.0032296
415	Boilers	Boiler 3 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene			No	No	0.0000352	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	0.00007751	0.00002584
416	Boilers	Boiler 3 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	0.003303	0.001101
417	Boilers	Boiler 3 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	0.0002202	0.0000734
418	Boilers	Boiler 3 Fab 4-1 Diesel	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	0.0090282	0.0030094
419	Boilers	Boiler 3 Fab 4-1 Diesel	100-41-4	Ethyl benzene			No	No	0.0002	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	0.0004404	0.0001468
420	Boilers	Boiler 3 Fab 4-1 Diesel	50-00-0	Formaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.7720212	0.2573404
421	Boilers	Boiler 3 Fab 4-1 Diesel	110-54-3	Hexane			No	No	0.0035	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	0.007707	0.002569
422	Boilers	Boiler 3 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid			No	No	0.1863	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	0.4102326	0.1367442
423	Boilers	Boiler 3 Fab 4-1 Diesel	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	0.0182766	0.0060922
424	Boilers	Boiler 3 Fab 4-1 Diesel	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	0.0068262	0.0022754
425	Boilers	Boiler 3 Fab 4-1 Diesel	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	SCAQMD AB2588 B-2 External	0.004404	0.001468
426	Boilers	Boiler 3 Fab 4-1 Diesel	91-20-3	Naphthalene			No	No	0.0053	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	0.0116706	0.0038902
427	Boilers	Boiler 3 Fab 4-1 Diesel	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	0.0085878	0.0028626
428	Boilers	Boiler 3 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0445	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	0.097989	0.032663
429	Boilers	Boiler 3 Fab 4-1 Diesel	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	0.0048444	0.0016148
430	Boilers	Boiler 3 Fab 4-1 Diesel	108-88-3	Toluene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.0096888	0.0032296
431	Boilers	Boiler 3 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.0035232	0.0011744
432	Boilers	Boiler 4 Fab 4-1 Diesel	106-99-0	1,3-Butadiene			No	No	0.0148	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	0.02257296	0.00752432
433	Boilers	Boiler 4 Fab 4-1 Diesel	75-07-0	Acetaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.53473512	0.17824504
434	Boilers	Boiler 4 Fab 4-1 Diesel	107-02-8	Acrolein			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.53473512	0.17824504
435	Boilers	Boiler 4 Fab 4-1 Diesel	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.22016	0.40672
436	Boilers	Boiler 4 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00244032	0.00081344
437	Boilers	Boiler 4 Fab 4-1 Diesel	71-43-2	Benzene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.00671088	0.00223696
438	Boilers	Boiler 4 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene			No	No	0.0000352	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	0.00005369	0.0000179
439	Boilers	Boiler 4 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	0.0022878	0.0007626
440	Boilers	Boiler 4 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	0.00015252	0.00005084
441	Boilers	Boiler 4 Fab 4-1 Diesel	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	0.00625332	0.00208444
442	Boilers	Boiler 4 Fab 4-1 Diesel	100-41-4	Ethyl benzene			No	No	0.0002	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	0.00030504	0.00010168
443	Boilers	Boiler 4 Fab 4-1 Diesel	50-00-0	Formaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.53473512	0.17824504
444	Boilers	Boiler 4 Fab 4-1 Diesel	110-54-3	Hexane			No	No	0.0035	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	0.0053382	0.0017794
445	Boilers	Boiler 4 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid			No	No	0.1863	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	0.28414476	0.09471492
446	Boilers	Boiler 4 Fab 4-1 Diesel	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	0.01265916	0.00421972
447	Boilers	Boiler 4 Fab 4-1 Diesel	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	0.00472812	0.00157604
448	Boilers	Boiler 4 Fab 4-1 Diesel	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	SCAQMD AB2588 B-2 External	0.0030504	0.0010168
449	Boilers	Boiler 4 Fab 4-1 Diesel	91-20-3	Naphthalene			No	No	0.0053	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	0.00808356	0.00269452
450	Boilers	Boiler 4 Fab 4-1 Diesel	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	0.00594828	0.00198276
451	Boilers	Boiler 4 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0445	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	0.0678714	0.0226238

452	Boilers	Boiler 4 Fab 4-1 Diesel	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	0.00335544	0.00111848
453	Boilers	Boiler 4 Fab 4-1 Diesel	108-88-3	Toluene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.00671088	0.00223696
454	Boilers	Boiler 4 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00244032	0.00081344
455	Boilers	Boiler 5 Fab 4-1 Diesel	106-99-0	1,3-Butadiene			No	No	0.0148	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	0.02257296	0.00752432
456	Boilers	Boiler 5 Fab 4-1 Diesel	75-07-0	Acetaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.53473512	0.17824504
457	Boilers	Boiler 5 Fab 4-1 Diesel	107-02-8	Acrolein			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.53473512	0.17824504
458	Boilers	Boiler 5 Fab 4-1 Diesel	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	SCAQMD AB2588 B-2 External	1.22016	0.40672
459	Boilers	Boiler 5 Fab 4-1 Diesel	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00244032	0.00081344
460	Boilers	Boiler 5 Fab 4-1 Diesel	71-43-2	Benzene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.00671088	0.00223696
461	Boilers	Boiler 5 Fab 4-1 Diesel	50-32-8	Benzo[a]pyrene			No	No	0.0000352	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	0.00005369	0.0000179
462	Boilers	Boiler 5 Fab 4-1 Diesel	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	0.0022878	0.0007626
463	Boilers	Boiler 5 Fab 4-1 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	0.00015252	0.00005084
464	Boilers	Boiler 5 Fab 4-1 Diesel	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	0.00625332	0.00208444
465	Boilers	Boiler 5 Fab 4-1 Diesel	100-41-4	Ethyl benzene			No	No	0.0002	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	0.00030504	0.00010168
466	Boilers	Boiler 5 Fab 4-1 Diesel	50-00-0	Formaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	0.53473512	0.17824504
467	Boilers	Boiler 5 Fab 4-1 Diesel	110-54-3	Hexane			No	No	0.0035	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	0.0053382	0.0017794
468	Boilers	Boiler 5 Fab 4-1 Diesel	7647-01-0	Hydrochloric acid			No	No	0.1863	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	0.28414476	0.09471492
469	Boilers	Boiler 5 Fab 4-1 Diesel	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	0.01265916	0.00421972
470	Boilers	Boiler 5 Fab 4-1 Diesel	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	0.00472812	0.00157604
471	Boilers	Boiler 5 Fab 4-1 Diesel	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	SCAQMD AB2588 B-2 External	0.0030504	0.0010168
472	Boilers	Boiler 5 Fab 4-1 Diesel	91-20-3	Naphthalene			No	No	0.0053	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	0.00808356	0.00269452
473	Boilers	Boiler 5 Fab 4-1 Diesel	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	0.00594828	0.00198276
474	Boilers	Boiler 5 Fab 4-1 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0445	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	0.0678714	0.0226238
475	Boilers	Boiler 5 Fab 4-1 Diesel	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	0.00335544	0.00111848
476	Boilers	Boiler 5 Fab 4-1 Diesel	108-88-3	Toluene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.00671088	0.00223696
477	Boilers	Boiler 5 Fab 4-1 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00244032	0.00081344
478	Boilers	Boiler 1 Fab 4-2 Diesel	106-99-0	1,3-Butadiene			No	No	0.0148	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	0.0759311	0.02531037
479	Boilers	Boiler 1 Fab 4-2 Diesel	75-07-0	Acetaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
480	Boilers	Boiler 1 Fab 4-2 Diesel	107-02-8	Acrolein			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
481	Boilers	Boiler 1 Fab 4-2 Diesel	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	SCAQMD AB2588 B-2 External	4.104384	1.368128
482	Boilers	Boiler 1 Fab 4-2 Diesel	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00820877	0.00273626
483	Boilers	Boiler 1 Fab 4-2 Diesel	71-43-2	Benzene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.02257411	0.0075247
484	Boilers	Boiler 1 Fab 4-2 Diesel	50-32-8	Benzo[a]pyrene			No	No	0.0000352	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	0.00018059	0.0000602
485	Boilers	Boiler 1 Fab 4-2 Diesel	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	0.00769572	0.00256524
486	Boilers	Boiler 1 Fab 4-2 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	0.00051305	0.00017102
487	Boilers	Boiler 1 Fab 4-2 Diesel	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	0.02103497	0.00701166
488	Boilers	Boiler 1 Fab 4-2 Diesel	100-41-4	Ethyl benzene			No	No	0.0002	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	0.0010261	0.00034203
489	Boilers	Boiler 1 Fab 4-2 Diesel	50-00-0	Formaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
490	Boilers	Boiler 1 Fab 4-2 Diesel	110-54-3	Hexane			No	No	0.0035	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	0.01795668	0.00598556
491	Boilers	Boiler 1 Fab 4-2 Diesel	7647-01-0	Hydrochloric acid			No	No	0.1863	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	0.95580842	0.31860281
492	Boilers	Boiler 1 Fab 4-2 Diesel	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	0.04258298	0.01419433
493	Boilers	Boiler 1 Fab 4-2 Diesel	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	0.01590449	0.0053015
494	Boilers	Boiler 1 Fab 4-2 Diesel	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	SCAQMD AB2588 B-2 External	0.01026096	0.00342032
495	Boilers	Boiler 1 Fab 4-2 Diesel	91-20-3	Naphthalene			No	No	0.0053	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	0.02719154	0.00906385
496	Boilers	Boiler 1 Fab 4-2 Diesel	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	0.02000887	0.00666962
497	Boilers	Boiler 1 Fab 4-2 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0445	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	0.22830636	0.07610212
498	Boilers	Boiler 1 Fab 4-2 Diesel	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	0.01128706	0.00376235
499	Boilers	Boiler 1 Fab 4-2 Diesel	108-88-3	Toluene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.02257411	0.0075247
500	Boilers	Boiler 1 Fab 4-2 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00820877	0.00273626
501	Boilers	Boiler 2 Fab 4-2 Diesel	106-99-0	1,3-Butadiene			No	No	0.0148	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	0.0759311	0.02531037

502	Boilers	Boiler 2 Fab 4-2 Diesel	75-07-0	Acetaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
503	Boilers	Boiler 2 Fab 4-2 Diesel	107-02-8	Acrolein			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
504	Boilers	Boiler 2 Fab 4-2 Diesel	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	SCAQMD AB2588 B-2 External	4.104384	1.368128
505	Boilers	Boiler 2 Fab 4-2 Diesel	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00820877	0.00273626
506	Boilers	Boiler 2 Fab 4-2 Diesel	71-43-2	Benzene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.02257411	0.0075247
507	Boilers	Boiler 2 Fab 4-2 Diesel	50-32-8	Benzo[a]pyrene			No	No	0.0000352	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	0.00018059	0.0000602
508	Boilers	Boiler 2 Fab 4-2 Diesel	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	0.00769572	0.00256524
509	Boilers	Boiler 2 Fab 4-2 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	0.00051305	0.00017102
510	Boilers	Boiler 2 Fab 4-2 Diesel	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	0.02103497	0.00701166
511	Boilers	Boiler 2 Fab 4-2 Diesel	100-41-4	Ethyl benzene			No	No	0.0002	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	0.0010261	0.00034203
512	Boilers	Boiler 2 Fab 4-2 Diesel	50-00-0	Formaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
513	Boilers	Boiler 2 Fab 4-2 Diesel	110-54-3	Hexane			No	No	0.0035	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	0.01795668	0.00598556
514	Boilers	Boiler 2 Fab 4-2 Diesel	7647-01-0	Hydrochloric acid			No	No	0.1863	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	0.95580842	0.31860281
515	Boilers	Boiler 2 Fab 4-2 Diesel	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	0.04258298	0.01419433
516	Boilers	Boiler 2 Fab 4-2 Diesel	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	0.01590449	0.0053015
517	Boilers	Boiler 2 Fab 4-2 Diesel	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	SCAQMD AB2588 B-2 External	0.01026096	0.00342032
518	Boilers	Boiler 2 Fab 4-2 Diesel	91-20-3	Naphthalene			No	No	0.0053	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	0.02719154	0.00906385
519	Boilers	Boiler 2 Fab 4-2 Diesel	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	0.02000887	0.00666962
520	Boilers	Boiler 2 Fab 4-2 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0445	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	0.22830636	0.07610212
521	Boilers	Boiler 2 Fab 4-2 Diesel	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	0.01128706	0.00376235
522	Boilers	Boiler 2 Fab 4-2 Diesel	108-88-3	Toluene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.02257411	0.0075247
523	Boilers	Boiler 2 Fab 4-2 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00820877	0.00273626
524	Boilers	Boiler 3 Fab 4-2 Diesel	106-99-0	1,3-Butadiene			No	No	0.0148	0.0148	lb/M gal	SCAQMD AB2588 B-2 External	0.0759311	0.02531037
525	Boilers	Boiler 3 Fab 4-2 Diesel	75-07-0	Acetaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
526	Boilers	Boiler 3 Fab 4-2 Diesel	107-02-8	Acrolein			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
527	Boilers	Boiler 3 Fab 4-2 Diesel	7664-41-7	Ammonia			No	No	0.8	0.8	lb/M gal	SCAQMD AB2588 B-2 External	4.104384	1.368128
528	Boilers	Boiler 3 Fab 4-2 Diesel	7440-38-2	Arsenic and compounds			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00820877	0.00273626
529	Boilers	Boiler 3 Fab 4-2 Diesel	71-43-2	Benzene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.02257411	0.0075247
530	Boilers	Boiler 3 Fab 4-2 Diesel	50-32-8	Benzo[a]pyrene			No	No	0.0000352	0.0000352	lb/M gal	SCAQMD AB2588 B-2 External	0.00018059	0.0000602
531	Boilers	Boiler 3 Fab 4-2 Diesel	7440-43-9	Cadmium and compounds			No	No	0.0015	0.0015	lb/M gal	SCAQMD AB2588 B-2 External	0.00769572	0.00256524
532	Boilers	Boiler 3 Fab 4-2 Diesel	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0001	0.0001	lb/M gal	SCAQMD AB2588 B-2 External	0.00051305	0.00017102
533	Boilers	Boiler 3 Fab 4-2 Diesel	7440-50-8	Copper and compounds			No	No	0.0041	0.0041	lb/M gal	SCAQMD AB2588 B-2 External	0.02103497	0.00701166
534	Boilers	Boiler 3 Fab 4-2 Diesel	100-41-4	Ethyl benzene			No	No	0.0002	0.0002	lb/M gal	SCAQMD AB2588 B-2 External	0.0010261	0.00034203
535	Boilers	Boiler 3 Fab 4-2 Diesel	50-00-0	Formaldehyde			No	No	0.3506	0.3506	lb/M gal	SCAQMD AB2588 B-2 External	1.79874629	0.5995821
536	Boilers	Boiler 3 Fab 4-2 Diesel	110-54-3	Hexane			No	No	0.0035	0.0035	lb/M gal	SCAQMD AB2588 B-2 External	0.01795668	0.00598556
537	Boilers	Boiler 3 Fab 4-2 Diesel	7647-01-0	Hydrochloric acid			No	No	0.1863	0.1863	lb/M gal	SCAQMD AB2588 B-2 External	0.95580842	0.31860281
538	Boilers	Boiler 3 Fab 4-2 Diesel	7439-92-1	Lead and compounds			No	No	0.0083	0.0083	lb/M gal	SCAQMD AB2588 B-2 External	0.04258298	0.01419433
539	Boilers	Boiler 3 Fab 4-2 Diesel	7439-96-5	Manganese and compounds			No	No	0.0031	0.0031	lb/M gal	SCAQMD AB2588 B-2 External	0.01590449	0.0053015
540	Boilers	Boiler 3 Fab 4-2 Diesel	7439-97-6	Mercury and compounds			No	No	0.002	0.002	lb/M gal	SCAQMD AB2588 B-2 External	0.01026096	0.00342032
541	Boilers	Boiler 3 Fab 4-2 Diesel	91-20-3	Naphthalene			No	No	0.0053	0.0053	lb/M gal	SCAQMD AB2588 B-2 External	0.02719154	0.00906385
542	Boilers	Boiler 3 Fab 4-2 Diesel	365	Nickel compounds, insoluble			No	No	0.0039	0.0039	lb/M gal	SCAQMD AB2588 B-2 External	0.02000887	0.00666962
543	Boilers	Boiler 3 Fab 4-2 Diesel	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0445	0.0445	lb/M gal	SCAQMD AB2588 B-2 External	0.22830636	0.07610212
544	Boilers	Boiler 3 Fab 4-2 Diesel	7782-49-2	Selenium and compounds			No	No	0.0022	0.0022	lb/M gal	SCAQMD AB2588 B-2 External	0.01128706	0.00376235
545	Boilers	Boiler 3 Fab 4-2 Diesel	108-88-3	Toluene			No	No	0.0044	0.0044	lb/M gal	SCAQMD AB2588 B-2 External	0.02257411	0.0075247
546	Boilers	Boiler 3 Fab 4-2 Diesel	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0016	0.0016	lb/M gal	SCAQMD AB2588 B-2 External	0.00820877	0.00273626
547	RCTOs	RCTO 1 Natural Gas	71-43-2	Benzene			No	No	0.008	0.008	lb/MMSCF	CAO NG Ext. Comb. (a)	0.20611765	0.00056471
548	RCTOs	RCTO 1 Natural Gas	50-00-0	Formaldehyde			No	No	0.017	0.017	lb/MMSCF	CAO NG Ext. Comb. (a)	0.438	0.0012
549	RCTOs	RCTO 1 Natural Gas	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00257647	0.00000706
550	RCTOs	RCTO 1 Natural Gas	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00772941	0.00002118
551	RCTOs	RCTO 1 Natural Gas	75-07-0	Acetaldehyde			No	No	0.0043	0.0043	lb/MMSCF	CAO NG Ext. Comb. (a)	0.11078824	0.00030353

552	RCTOs	RCTO 1 Natural Gas	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (a)	0.06956471	0.00019059
553	RCTOs	RCTO 1 Natural Gas	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (a)	82.44705882	0.22588235
554	RCTOs	RCTO 1 Natural Gas	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00515294	0.00001412
555	RCTOs	RCTO 1 Natural Gas	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (a)	0.11336471	0.00031059
556	RCTOs	RCTO 1 Natural Gas	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00030918	0.00000085
557	RCTOs	RCTO 1 Natural Gas	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (a)	0.02834118	0.00007765
558	RCTOs	RCTO 1 Natural Gas	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (a)	0.03607059	0.00009882
559	RCTOs	RCTO 1 Natural Gas	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00216424	0.00000593
560	RCTOs	RCTO 1 Natural Gas	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (a)	0.0219	0.00006
561	RCTOs	RCTO 1 Natural Gas	100-41-4	Ethyl benzene			No	No	0.0095	0.0095	lb/MMSCF	CAO NG Ext. Comb. (a)	0.24476471	0.00067059
562	RCTOs	RCTO 1 Natural Gas	110-54-3	Hexane			No	No	0.0063	0.0063	lb/MMSCF	CAO NG Ext. Comb. (a)	0.16231765	0.00044471
563	RCTOs	RCTO 1 Natural Gas	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (a)	0.01288235	0.00003529
564	RCTOs	RCTO 1 Natural Gas	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00979059	0.00002682
565	RCTOs	RCTO 1 Natural Gas	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00669882	0.00001835
566	RCTOs	RCTO 1 Natural Gas	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (a)	0.04251176	0.00011647
567	RCTOs	RCTO 1 Natural Gas	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (a)	0.05410588	0.00014824
568	RCTOs	RCTO 1 Natural Gas	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00061835	0.00000169
569	RCTOs	RCTO 1 Natural Gas	108-88-3	Toluene			No	No	0.0366	0.0366	lb/MMSCF	CAO NG Ext. Comb. (a)	0.94298824	0.00258353
570	RCTOs	RCTO 1 Natural Gas	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (a)	0.05925882	0.00016235
571	RCTOs	RCTO 1 Natural Gas	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0272	0.0272	lb/MMSCF	CAO NG Ext. Comb. (a)	0.7008	0.00192
572	RCTOs	RCTO 1 Natural Gas	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (a)	0.74717647	0.00204706
573	RCTOs	RCTO 2 Natural Gas	71-43-2	Benzene			No	No	0.008	0.008	lb/MMSCF	CAO NG Ext. Comb. (a)	0.20611765	0.00056471
574	RCTOs	RCTO 2 Natural Gas	50-00-0	Formaldehyde			No	No	0.017	0.017	lb/MMSCF	CAO NG Ext. Comb. (a)	0.438	0.0012
575	RCTOs	RCTO 2 Natural Gas	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00257647	0.00000706
576	RCTOs	RCTO 2 Natural Gas	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00772941	0.00002118
577	RCTOs	RCTO 2 Natural Gas	75-07-0	Acetaldehyde			No	No	0.0043	0.0043	lb/MMSCF	CAO NG Ext. Comb. (a)	0.11078824	0.00030353
578	RCTOs	RCTO 2 Natural Gas	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (a)	0.06956471	0.00019059
579	RCTOs	RCTO 2 Natural Gas	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (a)	82.44705882	0.22588235
580	RCTOs	RCTO 2 Natural Gas	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00515294	0.00001412
581	RCTOs	RCTO 2 Natural Gas	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (a)	0.11336471	0.00031059
582	RCTOs	RCTO 2 Natural Gas	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00030918	0.00000085
583	RCTOs	RCTO 2 Natural Gas	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (a)	0.02834118	0.00007765
584	RCTOs	RCTO 2 Natural Gas	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (a)	0.03607059	0.00009882
585	RCTOs	RCTO 2 Natural Gas	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00216424	0.00000593
586	RCTOs	RCTO 2 Natural Gas	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (a)	0.0219	0.00006
587	RCTOs	RCTO 2 Natural Gas	100-41-4	Ethyl benzene			No	No	0.0095	0.0095	lb/MMSCF	CAO NG Ext. Comb. (a)	0.24476471	0.00067059
588	RCTOs	RCTO 2 Natural Gas	110-54-3	Hexane			No	No	0.0063	0.0063	lb/MMSCF	CAO NG Ext. Comb. (a)	0.16231765	0.00044471
589	RCTOs	RCTO 2 Natural Gas	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (a)	0.01288235	0.00003529
590	RCTOs	RCTO 2 Natural Gas	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00979059	0.00002682
591	RCTOs	RCTO 2 Natural Gas	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00669882	0.00001835
592	RCTOs	RCTO 2 Natural Gas	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (a)	0.04251176	0.00011647
593	RCTOs	RCTO 2 Natural Gas	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (a)	0.05410588	0.00014824
594	RCTOs	RCTO 2 Natural Gas	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00061835	0.00000169
595	RCTOs	RCTO 2 Natural Gas	108-88-3	Toluene			No	No	0.0366	0.0366	lb/MMSCF	CAO NG Ext. Comb. (a)	0.94298824	0.00258353
596	RCTOs	RCTO 2 Natural Gas	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (a)	0.05925882	0.00016235
597	RCTOs	RCTO 2 Natural Gas	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0272	0.0272	lb/MMSCF	CAO NG Ext. Comb. (a)	0.7008	0.00192
598	RCTOs	RCTO 2 Natural Gas	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (a)	0.74717647	0.00204706
599	RCTOs	RCTO 3 Natural Gas	71-43-2	Benzene			No	No	0.008	0.008	lb/MMSCF	CAO NG Ext. Comb. (a)	0.20611765	0.00056471
600	RCTOs	RCTO 3 Natural Gas	50-00-0	Formaldehyde			No	No	0.017	0.017	lb/MMSCF	CAO NG Ext. Comb. (a)	0.438	0.0012
601	RCTOs	RCTO 3 Natural Gas	401	Polycyclic aromatic hydrocarbons (PAHs)			No	No	0.0001	0.0001	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00257647	0.00000706

602	RCTOs	RCTO 3 Natural Gas	91-20-3	Naphthalene			No	No	0.0003	0.0003	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00772941	0.00002118
603	RCTOs	RCTO 3 Natural Gas	75-07-0	Acetaldehyde			No	No	0.0043	0.0043	lb/MMSCF	CAO NG Ext. Comb. (a)	0.11078824	0.00030353
604	RCTOs	RCTO 3 Natural Gas	107-02-8	Acrolein			No	No	0.0027	0.0027	lb/MMSCF	CAO NG Ext. Comb. (a)	0.06956471	0.00019059
605	RCTOs	RCTO 3 Natural Gas	7664-41-7	Ammonia			No	No	3.2	3.2	lb/MMSCF	CAO NG Ext. Comb. (a)	82.44705882	0.22588235
606	RCTOs	RCTO 3 Natural Gas	7440-38-2	Arsenic and compounds			No	No	0.0002	0.0002	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00515294	0.00001412
607	RCTOs	RCTO 3 Natural Gas	7440-39-3	Barium and compounds			No	No	0.0044	0.0044	lb/MMSCF	CAO NG Ext. Comb. (a)	0.11336471	0.00031059
608	RCTOs	RCTO 3 Natural Gas	7440-41-7	Beryllium and compounds			No	No	0.000012	0.000012	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00030918	0.00000085
609	RCTOs	RCTO 3 Natural Gas	7440-43-9	Cadmium and compounds			No	No	0.0011	0.0011	lb/MMSCF	CAO NG Ext. Comb. (a)	0.02834118	0.00007765
610	RCTOs	RCTO 3 Natural Gas	18540-29-9	Chromium VI, chromate and dichromate particulate			No	No	0.0014	0.0014	lb/MMSCF	CAO NG Ext. Comb. (a)	0.03607059	0.00009882
611	RCTOs	RCTO 3 Natural Gas	7440-48-4	Cobalt and compounds			No	No	0.000084	0.000084	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00216424	0.00000593
612	RCTOs	RCTO 3 Natural Gas	7440-50-8	Copper and compounds			No	No	0.00085	0.00085	lb/MMSCF	CAO NG Ext. Comb. (a)	0.0219	0.00006
613	RCTOs	RCTO 3 Natural Gas	100-41-4	Ethyl benzene			No	No	0.0095	0.0095	lb/MMSCF	CAO NG Ext. Comb. (a)	0.24476471	0.00067059
614	RCTOs	RCTO 3 Natural Gas	110-54-3	Hexane			No	No	0.0063	0.0063	lb/MMSCF	CAO NG Ext. Comb. (a)	0.16231765	0.00044471
615	RCTOs	RCTO 3 Natural Gas	7439-92-1	Lead and compounds			No	No	0.0005	0.0005	lb/MMSCF	CAO NG Ext. Comb. (a)	0.01288235	0.00003529
616	RCTOs	RCTO 3 Natural Gas	7439-96-5	Manganese and compounds			No	No	0.00038	0.00038	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00979059	0.00002682
617	RCTOs	RCTO 3 Natural Gas	7439-97-6	Mercury and compounds			No	No	0.00026	0.00026	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00669882	0.00001835
618	RCTOs	RCTO 3 Natural Gas	1313-27-5	Molybdenum trioxide			No	No	0.00165	0.00165	lb/MMSCF	CAO NG Ext. Comb. (a)	0.04251176	0.00011647
619	RCTOs	RCTO 3 Natural Gas	365	Nickel compounds, insoluble			No	No	0.0021	0.0021	lb/MMSCF	CAO NG Ext. Comb. (a)	0.05410588	0.00014824
620	RCTOs	RCTO 3 Natural Gas	7782-49-2	Selenium and compounds			No	No	0.000024	0.000024	lb/MMSCF	CAO NG Ext. Comb. (a)	0.00061835	0.00000169
621	RCTOs	RCTO 3 Natural Gas	108-88-3	Toluene			No	No	0.0366	0.0366	lb/MMSCF	CAO NG Ext. Comb. (a)	0.94298824	0.00258353
622	RCTOs	RCTO 3 Natural Gas	7440-62-2	Vanadium (fume or dust)			No	No	0.0023	0.0023	lb/MMSCF	CAO NG Ext. Comb. (a)	0.05925882	0.00016235
623	RCTOs	RCTO 3 Natural Gas	1330-20-7	Xylene (mixture), including m-xylene, o-xylene, p-xylene			No	No	0.0272	0.0272	lb/MMSCF	CAO NG Ext. Comb. (a)	0.7008	0.00192
624	RCTOs	RCTO 3 Natural Gas	7440-66-6	Zinc and compounds			No	No	0.029	0.029	lb/MMSCF	CAO NG Ext. Comb. (a)	0.74717647	0.00204706
625	Semiconductor Fab	50:1 BOE Use (NH3 Emissions)	7664-41-7	Ammonia	100.00%	0.00%	No	No	0.00126445	0.00126445	lb/lb used	Proprietary emission factor	270.10736178	0.74002017
626	Semiconductor Fab	7:1 BOE Use (NH3 Emissions)	7664-41-7	Ammonia	100.00%	0.00%	No	No	0.0018392	0.0018392	lb/lb used	Proprietary emission factor	40.85670609	0.11193618
627	Semiconductor Fab	50:1 BOE Use (HF Emissions)	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.0022593	0.0022593	lb/lb used	Proprietary emission factor	193.04948791	0.52890271
628	Semiconductor Fab	7:1 BOE Use (HF Emissions)	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.0047108	0.0047108	lb/lb used	Proprietary emission factor	41.85901936	0.11468224
629	Semiconductor Fab	Ammonia Use	7664-41-7	Ammonia	100.00%	0.00%	No	No	1	1	lb/lb used	Proprietary emission factor	12777.82514888	35.00774013
630	Semiconductor Fab	Isopropanol - Bottles	67-63-0	Isopropyl alcohol			No	No	1	1	lb/lb used	Assumes all evaporates	12500	34.24657534
631	Semiconductor Fab	Isopropanol - Process	67-63-0	Isopropyl alcohol	100.00%	90.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	9000	24.65753425
632	Semiconductor Fab	Isopropanol - Wipe Cleaning	67-63-0	Isopropyl alcohol			No	No	1	1	lb/lb used	Assumes all evaporates	20000	54.79452055
633	Semiconductor Fab	Nitric Acid Use (Process 1)	7697-37-2	Nitric acid	100.00%	96.95%	No	No	0.4	0.4	lb/lb used	Proprietary emission factor	1615.52552107	4.42609732
634	Semiconductor Fab	Nitric Acid Use (Process 2)	7697-37-2	Nitric acid	100.00%	40.00%	No	No	0.01	0.01	lb/lb used	Proprietary emission factor	1185.76032047	3.24865841
635	Semiconductor Fab	Phosphoric Acid Use	7664-38-2	Phosphoric acid	100.00%	40.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	133.98560256	0.36708384
636	Semiconductor Fab	Silver Nitrate Use	7440-22-4	Silver and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.0006037	0.00000165
637	Semiconductor Fab	Sodium Hydroxide Wk Sol'n Use	1310-73-2	Sodium hydroxide	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00252844	0.00000693
638	Semiconductor Fab	Sulfuric Acid Use	7664-93-9	Sulfuric acid	100.00%	40.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	1381.3323029	3.78447206
639	Semiconductor Fab	Boron Trichloride Use	7429-90-5	Aluminum and compounds	100.00%	0.00%	No	No	0.087	0.087	lb/lb used	Proprietary emission factor	191.04018323	0.52339776
640	Semiconductor Fab	Boron Trichloride Use	7647-01-0	Hydrochloric acid	100.00%	96.00%	No	No	0.934	0.934	lb/lb used	Proprietary emission factor	82.03748558	0.22476023
641	Semiconductor Fab	Silane Use	7631-86-9	Silica, crystalline (respirable)	100.00%	50.00%	No	No	1.87	1.87	lb/lb used	Proprietary emission factor	17488.46309197	47.91359751
642	Semiconductor Fab	Dichlorosilane	7631-86-9	Silica, crystalline (respirable)	100.00%	50.00%	No	No	0.595	0.595	lb/lb used	Proprietary emission factor	186.34328219	0.51052954
643	Semiconductor Fab	Dichlorosilane	7647-01-0	Hydrochloric acid	100.00%	60.00%	No	No	0.722	0.722	lb/lb used	Proprietary emission factor	180.89391562	0.49559977
644	Semiconductor Fab	Phosphine Use (Process 1)	7803-51-2	Phosphine	100.00%	0.00%	No	No	0.05	0.05	lb/lb used	Proprietary emission factor	3.34780333	0.00917206
645	Semiconductor Fab	Phosphine Use (Process 2)	7803-51-2	Phosphine	100.00%	0.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	0	0
646	Semiconductor Fab	Phosphine Use (Process 2)	1314-56-3	Phosphorus pentoxide	100.00%	0.00%	No	No	1.67	1.67	lb/lb used	Proprietary emission factor	0	0
647	Semiconductor Fab	Phosphine Use (Process 3)	7803-51-2	Phosphine	100.00%	0.00%	No	No	1	1	lb/lb used	Proprietary emission factor	61.3203657	0.168001
648	Semiconductor Fab	HMDS Oxidation in RCTO	7631-86-9	Silica, crystalline (respirable)	100.00%	0.00%	No	No	0.744	0.744	lb/lb used	Proprietary emission factor	6336.49958372	17.36027283
649	Semiconductor Fab	DEATS Oxidation in RCTO	7631-86-9	Silica, crystalline (respirable)	100.00%	0.00%	No	No	0.413	0.413	lb/lb used	Proprietary emission factor	17.67557092	0.04842622
650	Semiconductor Fab	HCl Storage Tank	7647-01-0	Hydrochloric acid	100.00%	0.00%	No	No	0.000188	0.000188	lb/gal used	Proprietary emission factor	3.91537942	0.01072707
651	Semiconductor Fab	Cresols Use	1319-77-3	Cresols (mixture), including m-cresol, o-cresol, p-cresol	100.00%	90.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	4.26216286	0.01167716

652	Semiconductor Fab	M-Cresol Use	108-39-4	m-Cresol	100.00%	90.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	1.63425309	0.00447741
653	Semiconductor Fab	1,4-Dioxane Use	123-91-1	1,4-Dioxane	100.00%	90.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	6.24190341	0.01710111
654	Semiconductor Fab	n-Butyl Alcohol Use	71-36-3	n-Butyl alcohol	100.00%	90.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	1.52127901	0.00416789
655	Semiconductor Fab	Ethylene Glycol Use	107-21-1	Ethylene glycol	100.00%	0.00%	No	No	1	1	lb/lb used	Assumes all evaporates	1563.80833333	4.28440639
656	Semiconductor Fab	Hydrochloric Acid Use	7647-01-0	Hydrochloric acid	100.00%	60.00%	No	No	0.05	0.05	lb/lb used	Proprietary emission factor	1579.53049368	4.3274808
657	Semiconductor Fab	Hydrofluoric Acid Wk Soln Use	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.05	0.05	lb/lb used	Proprietary emission factor	197.62672008	0.54144307
658	Semiconductor Fab	Hydrofluoric Acid 49% Soln Use	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.05	0.05	lb/lb used	Proprietary emission factor	2191.403676	6.00384569
659	Semiconductor Fab	Methanol Use	67-56-1	Methanol	100.00%	0.00%	No	No	1	1	lb/lb used	Assumes all evaporates	182.78346349	0.50077661
660	Semiconductor Fab	Arsine Use	7784-42-1	Arsine	100.00%	0.00%	No	No	0.05	0.05	lb/lb used	Proprietary emission factor	3.22390409	0.00883261
661	Semiconductor Fab	Chlorine Use	7782-50-5	Chlorine	100.00%	66.33%	No	No	1	1	lb/lb used	Proprietary emission factor	1012.65208757	2.77438928
662	Semiconductor Fab	Boron Trifluoride Use	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.885	0.885	lb/lb used	Proprietary emission factor	2.93806883	0.0080495
663	Semiconductor Fab	Difluoromethane Use	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.533	0.533	lb/lb used	Proprietary emission factor	196.05617153	0.5371402
664	Semiconductor Fab	Fluorine Use	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	1.05	1.05	lb/lb used	Proprietary emission factor	0.9224196	0.00252718
665	Semiconductor Fab	Germanium Tetrafluoride Use	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.52	0.52	lb/lb used	Proprietary emission factor	3.25251522	0.008911
666	Semiconductor Fab	Hexafluoroethane Use	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.219	0.219	lb/lb used	Proprietary emission factor	83.80229169	0.22959532
667	Semiconductor Fab	Hexafluoroethane Use - HF Byproduct from C2F6 combustion in POU abatement devices	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.46889602	0.46889602	lb/lb used	Proprietary emission factor	179.42722015	0.49158143
668	Semiconductor Fab	Hexafluoroethane Use - HF Byproduct from CF4 combustion in POU abatement devices	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.15034786	0.15034786	lb/lb used	Proprietary emission factor	57.53194303	0.15762176
669	Semiconductor Fab	Nitrogen Trifluoride Use (Process 1)	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.566	0.566	lb/lb used	Proprietary emission factor	0	0
670	Semiconductor Fab	Nitrogen Trifluoride Use (Process 1)	7782-41-4	Fluorine gas	100.00%	90.00%	No	No	0.658	0.658	lb/lb used	Proprietary emission factor	0	0
671	Semiconductor Fab	Nitrogen Trifluoride Use (Process 1) - HF Byproduct from NF3 combustion in POU abatement devices in process 1	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.14610118	0.14610118	lb/lb used	Proprietary emission factor	0	0
672	Semiconductor Fab	Nitrogen Trifluoride Use (Process 1) - HF Byproduct from CF4 combustion in POU abatement devices in process 1	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.11078264	0.11078264	lb/lb used	Proprietary emission factor	0	0
673	Semiconductor Fab	Nitrogen Trifluoride Use (Process 2)	7664-39-3	Hydrogen fluoride	100.00%	95.52%	No	No	0.808	0.808	lb/lb used	Proprietary emission factor	1178.07982543	3.22761596
674	Semiconductor Fab	Nitrogen Trifluoride Use (Process 2)	7782-41-4	Fluorine gas	100.00%	90.00%	No	No	0.789	0.789	lb/lb used	Proprietary emission factor	2566.43194115	7.03132039
675	Semiconductor Fab	Nitrogen Trifluoride Use (Process 2) - HF Byproduct from NF3 combustion in POU abatement devices in process 2	7664-39-3	Hydrogen fluoride	100.00%	95.52%	No	No	0.02272685	0.02272685	lb/lb used	Proprietary emission factor	33.13619345	0.09078409
676	Semiconductor Fab	Nitrogen Trifluoride Use (Process 2) - HF Byproduct from CF4 combustion in POU abatement devices in process 2	7664-39-3	Hydrogen fluoride	100.00%	95.52%	No	No	0.01186957	0.01186957	lb/lb used	Proprietary emission factor	17.30606289	0.04741387
677	Semiconductor Fab	Octafluorocyclobutane Use	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.522	0.522	lb/lb used	Proprietary emission factor	124.0272	0.33980055
678	Semiconductor Fab	Octafluorocyclopentene Use	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.686	0.686	lb/lb used	Proprietary emission factor	751.47706718	2.05884128
679	Semiconductor Fab	Octafluoropropane Use	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.329	0.329	lb/lb used	Proprietary emission factor	391.08488392	1.07146544
680	Semiconductor Fab	Octafluoropropane Use - HF Byproduct from C3F8 combustion in POU abatement devices	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.33374832	0.33374832	lb/lb used	Proprietary emission factor	396.72925472	1.08692946
681	Semiconductor Fab	Octafluoropropane Use - HF Byproduct from CF4 combustion in POU abatement devices	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.15826091	0.15826091	lb/lb used	Proprietary emission factor	188.1259856	0.51541366
682	Semiconductor Fab	Sulfur Hexafluoride Use	7664-39-3	Hydrogen fluoride	100.00%	73.32%	No	No	0.155	0.155	lb/lb used	Proprietary emission factor	128.98842881	0.35339296
683	Semiconductor Fab	Tetrafluoromethane (CF4) (Process 1)	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.073	0.073	lb/lb used	Proprietary emission factor	0	0
684	Semiconductor Fab	Tetrafluoromethane (CF4) (Process 1) - HF Byproduct from CF4 combustion in POU abatement devices	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.72800018	0.72800018	lb/lb used	Proprietary emission factor	0	0
685	Semiconductor Fab	Tetrafluoromethane (CF4) (Process 2)	7664-39-3	Hydrogen fluoride	100.00%	60.00%	No	No	0.132	0.132	lb/lb used	Proprietary emission factor	2552.11680601	6.99210084
686	Semiconductor Fab	Trifluoromethane	7664-39-3	Hydrogen fluoride	100.00%	63.24%	No	No	0.312	0.312	lb/lb used	Proprietary emission factor	170.46610884	0.46703044
687	Semiconductor Fab	Tungsten Hexafluoride	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.403	0.403	lb/lb used	Proprietary emission factor	104.84560717	0.28724824
688	Semiconductor Fab	Hydrogen Chloride Gas Use	7647-01-0	Hydrochloric acid	100.00%	60.00%	No	No	1	1	lb/lb used	Assumes all evaporates	428.36635985	1.17360647
689	Semiconductor Fab	Hydrogen Bromide Use	10035-10-6	Hydrogen bromide	100.00%	50.00%	No	No	1	1	lb/lb used	Assumes all evaporates	2188.16333822	5.99496805
690	Semiconductor Fab	1-Methoxy-2-propanol (PGME) Use	107-98-2	Propylene glycol monomethyl ether	100.00%	90.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	8711.53311571	23.86721402
691	Semiconductor Fab	2-(1-Methoxy)propyl acetate (PGMEA) Use	108-65-6	Propylene glycol monomethyl ether acetate	100.00%	90.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	4126.33049585	11.30501506
692	Semiconductor Fab	3-Amino-1,2,4 Triazole Use	61-82-5	Amitrole	100.00%	0.00%	No	No	0.05	0.05	lb/lb used	Proprietary emission factor	4.5180112	0.01237811
693	Semiconductor Fab	Acetone Use	67-64-1	Acetone	100.00%	0.00%	No	No	1	1	lb/lb used	Assumes all evaporates	338.00791925	0.92604909
694	Semiconductor Fab	Phosphorus Oxychloride Use	7782-50-5	Chlorine	100.00%	50.00%	No	No	0.694	0.694	lb/lb used	Proprietary emission factor	132.28037516	0.36241199
695	Semiconductor Fab	Phosphorus Oxychloride Use	1314-56-3	Phosphorus pentoxide	100.00%	0.00%	No	No	0.463	0.463	lb/lb used	Proprietary emission factor	176.50090403	0.48356412
696	Semiconductor Fab	Pyrocatechol Use	120-80-9	Catechol	100.00%	90.00%	No	No	0.2	0.2	lb/lb used	Proprietary emission factor	208.56	0.57139726
697	Semiconductor Fab	Silicon Dioxide Use	7631-86-9	Silica, crystalline (respirable)	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	381.23212806	1.04447158
698	Semiconductor Fab	Silicon Tetrafluoride Use	7631-86-9	Silica, crystalline (respirable)	100.00%	50.00%	No	No	0.577	0.577	lb/lb used	Proprietary emission factor	11.54	0.03161644
699	Semiconductor Fab	Silicon Tetrafluoride Use	7664-39-3	Hydrogen fluoride	100.00%	96.00%	No	No	0.769	0.769	lb/lb used	Proprietary emission factor	1.2304	0.00337096
700	Semiconductor Fab	Fluorides	239	Fluorides	100.00%	0.00%	No	No	0.583	0.583	lb/lb HF emitted	Source Test	5355.13679739	14.67160766
701	Semiconductor Fab	Ammonium Hydroxide Use	7664-41-7	Ammonia	100.00%	0.00%	No	No	0.5	0.5	lb/lb used	Proprietary emission factor	49413.12390944	135.37842167

702	Semiconductor Fab	Aluminum Use Target/Anode Usage	7429-90-5	Aluminum and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	5.69472058	0.01560197
703	Semiconductor Fab	Cadmium Use Target/Anode Usage	7440-43-9	Cadmium and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00002113	0.00000006
704	Semiconductor Fab	Chlorine Use Target/Anode Usage	7782-50-5	Chlorine	100.00%	0.00%	No	No	1	1	lb/lb used	Proprietary emission factor	0.02163843	0.00005928
705	Semiconductor Fab	Copper Use Target/Anode Usage	7440-50-8	Copper and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	177.55613211	0.48645516
706	Semiconductor Fab	Manganese Use Target/Anode Usage	7439-96-5	Manganese and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00002164	0.00000006
707	Semiconductor Fab	Nickel Use Target/Anode Usage	365	Nickel compounds, insoluble	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00019343	0.00000053
708	Semiconductor Fab	Lead Use Target/Anode Usage	7439-92-1	Lead and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00114977	0.00000315
709	Semiconductor Fab	Vanadium Use Target/Anode Usage	7440-62-2	Vanadium (fume or dust)	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00004328	0.00000012
710	Semiconductor Fab	Antimony Use Target/Anode Usage	7440-36-0	Antimony and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00198348	0.00000543
711	Semiconductor Fab	Cobalt Use Target/Anode Usage	7440-48-4	Cobalt and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.56635472	0.00155166
712	Semiconductor Fab	Arsenic Use Target/Anode Usage	7440-38-2	Arsenic and compounds	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00005564	0.00000015
713	Semiconductor Fab	Uranium Use Target/Anode Usage	7440-61-1	Uranium	100.00%	0.00%	No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.00000002	5.04E-011
714	Semiconductor Fab	TMPI Use	67-56-1	Methanol	100.00%	0.00%	No	No	0.194	0.194	lb/lb used	Proprietary emission factor	63.438	0.17380274
715	Semiconductor Fab	TMPI Use	1314-56-3	Phosphorus pentoxide	100.00%	0.00%	No	No	0.57	0.57	lb/lb used	Proprietary emission factor	186.39	0.51065753
716	Semiconductor Fab	pH 7 Buffer solution-Yellow 4L	1310-73-2	Sodium hydroxide			No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.158555	0.0004344
717	Semiconductor Fab	pH 10 Buffer solution-Blue 4L	1310-73-2	Sodium hydroxide			No	No	0.001	0.001	lb/lb used	Proprietary emission factor	0.158555	0.0004344
862													0	0
863	INSERT ROWS ABOVE THIS LINE INSERT ROWS ABOVE THIS LINE INSERT ROWS ABOVE THIS LINE